JP2663625B2 - Magazine unloading device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Overview] Regarding a magazine carrying-out device attached to a wire bonding device or the like, an object of the present invention is to place a lead frame in a magazine sequentially from the top to prevent dust from being applied to the lead frame, A plurality of stacked magazines are slidably pinched,
And two guide walls opposed to each other in which fall prevention means for holding the magazine so as not to fall are intermittently introduced, and synchronized with the operation of the lead frame which is intermittently introduced and placed in the magazine sequentially from the top, The elevator is configured to intermittently move up and down between two guide walls with a magazine placed thereon, and a pulling means for placing an empty magazine placed on a support base on the elevator.

[Industrial applications]

The present invention relates to an apparatus for carrying out a magazine containing a lead frame or the like from a bonding apparatus or the like in a semiconductor manufacturing process.

2. Description of the Related Art In recent years, with the development of the semiconductor industry centering on semiconductor integrated circuits (ICs), rationalization in manufacturing processes has been actively promoted.

In the manufacturing process of this IC, there are various transport processes while rationalization is desired.

In the IC manufacturing process, for example, a semiconductor wafer in a wafer process or pattern formation is completed,
The semiconductor chip after being scribed, and furthermore, the chip is die-bonded, and wire-bonded lead frames and lead-bonded tape carriers are transported between various devices everywhere. I have.

Therefore, how to efficiently and reliably transport various ICs in a series of IC manufacturing processes is an indispensable issue for improving the yield, quality, and cost reduction of processes that greatly affect productivity. Has become.

In such various transport processes, the unloading of the lead frame after the semiconductor chip and the inner lead of the lead frame are wire-bonded in the bonding apparatus is generally also sealed with resin in the subsequent process. Requires careful handling.

[Conventional technology]

FIG. 2 is an explanatory view of a configuration of a conventional magazine unloading device, wherein FIG. 2A is a side view, and FIG. 2B is a partially cutaway front view.

FIG. 1 shows an example used by being attached to a wire bonding apparatus. In FIG. 1A, a magazine unloading apparatus 1 includes a lead frame transport unit 10 and a bonding head 11 arranged thereon. In the vicinity of a wire bonding apparatus.

The plurality of magazines 2 are supported so as to move smoothly between two opposing guide walls 4a and 4b of the magazine unloading device 1, and are mounted on the elevator 6 and lowered as shown in FIG. It is configured to be.

On the other hand, the lead frame 5 on which the semiconductor chip has been mounted by so-called die bonding is sequentially introduced into the lead frame transport unit 10 from a lead frame loading device (not shown) or the like.

Then, the bonding head 11 performs wire bonding between the inner lead of the lead frame 5 and the semiconductor chip.

Lead frame 5 after wire bonding
Is delivered by the lead frame transport unit 10 and stored in the magazine 2 held by the magazine unloading device 1.

Here, since a predetermined time is required for the wire bonding operation, the lead frame 5 is intermittently led out.

In accordance with this time interval, the magazine 2 is moved to the elevator 6
As a result, the lead frame 5 is intermittently lowered, and the lead frame 5 is sequentially stored in the magazine 2.

In the conventional magazine unloading device 1, an empty magazine 2 is inserted from above the guide walls 4a and 4b.

Then, the magazine 2 in which the lead frame 5 is fully stored is lowered onto the support base 7 by the elevator 6, where it is pushed out of the apparatus by the push rod 13 driven by the cylinder 12.

When the elevator 6 is lowered to the support 7, the guide wall
To prevent the magazine 2 remaining between 4a and 4b from falling, a member that is not shown but is protruded by, for example, compressed air is provided in the frame 14 to hold the magazine 2 firmly.

Thus, in the conventional magazine unloading device 1,
The magazine 2 descends sequentially from the top, and the lead frames 5 are stored therein one after another.

[Problems to be solved by the invention]

As described above, in the conventional magazine unloading device, a plurality of magazines are sequentially and intermittently lowered from above,
For example, a configuration is adopted in which a lead frame that is sequentially and intermittently introduced after wire bonding is completed is placed on a magazine shelf.

That is, in the conventional placement method, the next lead frame is stored on the shelf above the lead frame stored immediately before in the magazine.

Therefore, for example, dust generated due to friction between the magazine and the lead frame falls on the lead frame stored immediately before.

This lead frame is generally subjected to resin sealing thereafter.

However, since the dust is also sealed with the resin, there has been a problem that short-circuit and insulation failure occur due to the dust.

[Means for solving the problem]

The above-mentioned problem is that two or more overlapping magazines are slidably clamped, and two opposing guide walls in which drop prevention means for holding the magazine so as not to fall are intermittently provided. An elevator that intermittently moves upward between the two guide walls with the magazine mounted thereon while synchronizing with the operation of the lead frame that is introduced and sequentially placed in the magazine from the top, and an empty space disposed on the support base. This can be achieved by a magazine unloading device configured to have a detent means for placing a magazine on an elevator.

(Operation)

In the magazine unloading device of the present invention, the lead frame is housed while the magazine is lifted from the bottom, and the lead frame on which the semiconductor chip is mounted is covered with dust, which is completely opposite to the conventional magazine unloading device. So that resin sealing or the like is not performed.

In other words, the elevator that holds the magazine moves according to the movement of the lead frame that is intermittently introduced,
An ascending movement is made between two opposing guide walls.

Then, when the magazine shelf currently held is full of lead frames, the elevator descends to the support base and rises holding the next magazine, stores the lead frame again, and repeats this operation I have.

Here, the two guide walls incorporate descent prevention means comprising a one-way clutch which resiliently contacts the side surface of the magazine, and rotates when the magazine moves upward and does not rotate when trying to descend downward. To hold the magazine.

Therefore, when the elevator descends to the support,
The side of the magazine, which is left between the two guide walls, is held down by a one-way clutch to prevent it from falling down.

Various clutches, such as those using sprags such as balls, those using ratchets, cams, or coil springs, can be applied to the one-way clutch used for this descent prevention means.

On the other hand, the empty magazine placed on the support base can be loaded on the elevator by the pulling means when the elevator descends.

Various cylinders driven by electric or fluid pressure can be applied to the pulling means.

Thus, the magazine unloading device according to the present invention is attached to a wire bonding device or a die bonding device, etc., while raising the magazine by an elevator,
By sequentially storing the lead frames from the shelf above the magazine, dust can be prevented from being applied to the lead frames.

〔Example〕

FIG. 1 is an explanatory view of an embodiment of the present invention. FIG. 1 (A) is a partially cutaway side view, and FIG. 1 (B) is a partially cutaway front view.

In the figure, the elevator 6 is configured to reverse the operation of the elevator of the conventional magazine unloading device completely, and to intermittently ascend while holding the magazine 2 sequentially from the bottom in synchronization with the introduction of the lead frame 5.

The introduction timing of the lead frame 5 is detected by a sensor (not shown) and a pulse motor for driving the elevator 6 is controlled. A drive system (not shown) is provided in the frame 14.

A ratchet type one-way clutch was used as the descent prevention means 3.

Then, this direction clutch is incorporated, and the side surface of the magazine 2 is sandwiched between rubber rollers coated with silicone rubber so as to elastically contact the magazine 2. To
The two guide walls 4a and 4b were provided to face each other.

A cylinder 12 that reciprocates with compressed air is used as the pulling means 8, and a spatula is attached to the end of the rod so that the magazine 2 can be pulled and put on the elevator 6.

The magazine unloading device 1 assembled in this manner was placed close to a wire bonding device including a lead frame transport unit 10 and a bonding head 11 disposed thereon, and the operation was confirmed and evaluated.

As a result, if the lead frame 5 derived from the lead frame transport unit 10 is stored in the magazine 2, the magazine 2 is sequentially raised by the elevator 6, as in the conventional magazine unloading device.

Further, when the elevator 6 was lowered to the support base 7, it was confirmed that the magazine 2 remaining between the guide walls 4a and 4b was held without any problem by the descent prevention means 3 comprising a one-way clutch.

Furthermore, since the lead frame 5 is sequentially stored in the magazine 2 from the upper shelf, there is no fear that dust will fall and become dirty, and it has been confirmed that the object of the present invention can be sufficiently achieved.

In this case, a one-way clutch using a ratchet is used as the descent prevention means, but various modifications are possible, such as a sprag or cam, such as a ball, or a coil spring.

Further, although the installation place of the descent prevention means is provided on the two guide walls, it can be provided on a frame to control the movement of the magazine.

Further, as the pulling means, a cylinder in which the rod moves by air pressure is used, but the magazine can be pulled by a cylinder in which the table moves without the rod, and an electric conveyor or the like is used, and various modifications are possible. is there.

On the other hand, in this case, the operation was confirmed by attaching to a wire bonding apparatus, but this magazine unloading apparatus can also be applied to a die bonding apparatus.

Further, the magazine unloading device according to the present invention can be applied to storage of a magazine such as a tape carrier, instead of storing the lead frame in the magazine.

〔The invention's effect〕

As described above, in the magazine unloading device according to the present invention, for example, the lead frame led out from the wire bonding device is housed while moving the magazine upward from below.

Therefore, since the next lead frame is placed on the shelf above the lead frame placed in the magazine, it is possible to eliminate the conventional problem that dust falls and soils the lower lead frame. It greatly contributes to the improvement of productivity and quality in the manufacturing process of the device.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram of an embodiment of the present invention, and FIG. 2 is a structural explanatory diagram of a conventional magazine unloading device. In the figure, 1 is a magazine carry-out device, 2 is a magazine, 3 is a descent prevention means, 4a and 4b are guide walls, 5 is a lead frame, 6 is an elevator, 7 is a support stand, and 8 is a pull-in means.

Claims (1)

(57) [Claims] A plurality of stacked magazines (2) are slidably clamped, and a lowering prevention means (3) for holding the magazines (2) so as not to be lowered is provided inside the opposed two magazines. The magazine (2) is mounted while being synchronized with the operation of the two guide walls (4a, 4b) and the lead frame (5) which is intermittently introduced and is sequentially placed from above on the magazine (2). The two guide walls (4a,
4b) an elevator (6) intermittently ascending between the elevator (6) and detent means (8) for placing the empty magazine (2) placed on the support (7) on the elevator (6). A magazine unloading device.