JP2645235B2 - Wire bonding method - Google Patents

Wire bonding method

Info

Publication number
JP2645235B2
JP2645235B2 JP1187996A JP1187996A JP2645235B2 JP 2645235 B2 JP2645235 B2 JP 2645235B2 JP 1187996 A JP1187996 A JP 1187996A JP 1187996 A JP1187996 A JP 1187996A JP 2645235 B2 JP2645235 B2 JP 2645235B2
Authority
JP
Japan
Prior art keywords
wire
connection terminal
bonding
distance
terminal group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1187996A
Other languages
Japanese (ja)
Other versions
JPH08279528A (en
Inventor
善作 渡辺
仁 千代間
国明 木田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP1187996A priority Critical patent/JP2645235B2/en
Publication of JPH08279528A publication Critical patent/JPH08279528A/en
Application granted granted Critical
Publication of JP2645235B2 publication Critical patent/JP2645235B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/02Bonding areas ; Manufacturing methods related thereto
    • H01L24/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L24/06Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
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    • H01L24/02Bonding areas ; Manufacturing methods related thereto
    • H01L24/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L24/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
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    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/04042Bonding areas specifically adapted for wire connectors, e.g. wirebond pads
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    • H01L2224/0554External layer
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    • H01L2224/48463Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H01L2224/48465Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
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  • Engineering & Computer Science (AREA)
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  • Wire Bonding (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明はワイヤボンディング
方法に係る。特にファクシミリなどに用いられるサーマ
ルプリンティングヘッドや金融機器などに用いられる密
着型イメージセンサ等の段差を介し、相対向して高密度
に配置された接続端子間をワイヤリングする際にワイヤ
間の接触も少なく、また接触の修繕も容易にして、段差
を有する接続端子間を高信頼性をもってワイヤリングす
ることが可能なワイヤボンディング方法に関するもので
ある。
[0001] The present invention relates to a wire bonding method. In particular, there is less contact between wires when wiring between high-density connection terminals facing each other through steps such as thermal printing heads used for facsimile and contact type image sensors used for financial equipment etc. Also, the present invention relates to a wire bonding method capable of easily repairing a contact and wiring a connection terminal having a step with high reliability.

【0002】[0002]

【従来の技術】例えばファクシミリに使用されているサ
ーマルプリティングヘッドを図1及び図2により説明す
る。
2. Description of the Related Art A thermal printing head used for a facsimile, for example, will be described with reference to FIGS.

【0003】即ち、セラミック等の絶縁基板上に薄膜技
術や厚膜技術によって一列に高密度に並べられた複数の
発熱抵抗体1と、シフトレジスタ,トランジスタドライ
ブ及びセレクタからなる発熱抵抗体駆動用集積回路(以
下集積回路という)2と各発熱抵抗体1の一端10を共通
接続した共通電極3と、各発熱抵抗体1を集積回路2を
介して選択的に通電発熱させるための入力信号群4を主
構成とし、各発熱抵抗体1からの第1の接続端群11は選
択的に出力される集積回路2からの第2の接続端子群2
1に対応するように設けられ、それぞれの接続端子間は
ワイヤのボンディングにより接続されている。
That is, a plurality of heating resistors 1 arranged in a line at a high density on a ceramic or other insulating substrate by a thin film technique or a thick film technique, and a heating resistor driving integration comprising a shift register, a transistor drive and a selector. A common electrode 3 to which a circuit (hereinafter referred to as an integrated circuit) 2 and one end 10 of each heating resistor 1 are connected in common; and an input signal group 4 for selectively energizing and heating each heating resistor 1 via the integrated circuit 2. The first connection terminal group 11 from each heating resistor 1 is selectively connected to the second connection terminal group 2 from the integrated circuit 2.
1, and the connection terminals are connected by wire bonding.

【0004】この第2の接続端子群21の接続端子数
は、一般に集積回路21個当り32の接続端子のものが
経済的に優れているといわれている。従って発熱抵抗体
1は32個単位で集積回路2からの第2の接続端子群2
1と接続されることになる。図において5は集積回路2
の出力信号用端子、6は集積回路2への電源である。
As for the number of connection terminals of the second connection terminal group 21, it is generally said that 32 connection terminals per 21 integrated circuits are economically superior. Accordingly, the second group of connection terminals 2 from the integrated circuit 2 is generated in units of 32 heating resistors 1.
1 will be connected. In the figure, 5 is an integrated circuit 2
An output signal terminal 6 is a power supply to the integrated circuit 2.

【0005】このような構造のサーマルプリンティング
ヘッドによるファクシミリの記録は所定の発熱抵抗体1
を選択的に通電して発熱させ、発熱抵抗体1に熱転写フ
ィルムを接触させ、この熱転写フィルムを介して普通紙
に転写されるようになっている。
The facsimile recording by the thermal printing head having such a structure is performed by a predetermined heating resistor 1.
Is selectively energized to generate heat, a heat transfer film is brought into contact with the heat generating resistor 1, and is transferred to plain paper via the heat transfer film.

【0006】この状態を図2により説明すると、発熱抵
抗体1を高密度で紙面に直角方向に一列に並べたセラミ
ックなどの抵抗基板40と、集積回路2を配設したドラ
イブ基板411 及び共通電極3を配設した共通電極基板
412 とはアルミニウム等の金属からなりヒートシンク
42上に載置固定されている。
This state will be described with reference to FIG. 2. A resistance board 40 made of ceramic or the like in which the heating resistors 1 are arranged at high density in a direction perpendicular to the paper surface, a drive board 411 on which the integrated circuit 2 is disposed, and a common electrode 3 and the common electrode substrate 412 arranged are fixedly mounted on the heat sink 42 made of metal such as aluminum.

【0007】この発熱抵抗体1上には熱軟化性インクを
塗付した熱転写フィルム43,普通紙44が発熱抵抗体
1と、この発熱抵抗体1に圧接摺動するプラテンローラ
45との間に挿入されており、このプラテンローラ45
の矢印451 の回転により熱転写フイルム43と普通紙
44が共に矢印50方向に移動するようになっている。
図において461 ,462 は熱転写フィルム43の動き
を支持する補助ローラである。
A heat transfer film 43 coated with a heat-softening ink and plain paper 44 are disposed on the heating resistor 1 between the heating resistor 1 and a platen roller 45 which is slidably pressed against the heating resistor 1. The platen roller 45 is inserted
The rotation of the arrow 451 causes the thermal transfer film 43 and the plain paper 44 to move in the direction of the arrow 50 together.
In the drawing, reference numerals 461 and 462 denote auxiliary rollers for supporting the movement of the thermal transfer film 43.

【0008】またサーマルプリンティングヘッドの接続
は、発熱抵抗体1からの第1の接続端子群11と集積回
路2の出力からの第2の接続端子群21とも接続するワ
イヤ47,発熱抵抗体1の一端10と共通電極3とを接続
するワイヤ48,集積回路2と入力信号群4とを接続す
るワイヤ49により図1のような回路に構成されること
になる。
The thermal printing head is connected to the first connecting terminal group 11 from the heating resistor 1 and the second connecting terminal group 21 from the output of the integrated circuit 2 to the wire 47 and the heating resistor 1. A wire 48 connecting the one end 10 to the common electrode 3 and a wire 49 connecting the integrated circuit 2 to the input signal group 4 constitute a circuit as shown in FIG.

【0009】この構造で補助ローラ461 ,462 間の
熱転写フィルム43に“たるみ”や“しわ”が生じると
発熱抵抗体1から熱転写フィルム43を介して普通紙4
4への記録する位置がずれたり、発熱抵抗体1の熱が均
一に伝導せず、記録像の解像度を悪くするばかりでな
く、繊細な記録ができないことになるので補助ローラ4
61 ,462 間の距離lはできるだけ小さくすることが
望ましい。
With this structure, when "slack" or "wrinkle" occurs in the thermal transfer film 43 between the auxiliary rollers 461 and 462, the heat generating resistor 1 passes through the thermal transfer film 43 from the plain paper 4 through the thermal transfer film 43.
The recording position on the recording medium 4 is shifted, the heat of the heating resistor 1 is not uniformly conducted, and not only the resolution of the recorded image is deteriorated, but also the delicate recording cannot be performed.
It is desirable that the distance l between 61 and 462 be as small as possible.

【0010】そのため、図のように抵抗基板40とドラ
イブ基板411 及び共通電極基板412 との間に段差h
を設け、距離lを小さくする技術が特開昭54-139558 号
公報に示されている。
As a result, a step h is formed between the resistance substrate 40 and the drive substrate 411 and the common electrode substrate 412 as shown in FIG.
Japanese Patent Application Laid-Open No. 54-139558 discloses a technique for reducing the distance l.

【0011】この公報によれば段差hが0.3 mm程度で
は、通常のワイヤボンデイング方法で、この段差h間の
接続は可能であっても、この程度の大きさでは補助ロー
ラ461 ,462 間の距離lを小さくする効果はほとん
ど望めない。即ち、通常、集積回路2の厚さは0.3乃
至0.5mmあるからである。このことから、段差hは
0.5乃至1.5mmが必要となる。
According to this publication, when the step h is about 0.3 mm, the connection between the steps h can be made by the ordinary wire bonding method, but at this size, the distance between the auxiliary rollers 461 and 462 is large. The effect of reducing l can hardly be expected. That is, the thickness of the integrated circuit 2 is usually 0.3 to 0.5 mm. For this reason, the step h needs to be 0.5 to 1.5 mm.

【0012】次に図1及び図2の要部を図3により説明
する。
Next, the main parts of FIGS. 1 and 2 will be described with reference to FIG.

【0013】即ち抵抗基板40上の発熱抵抗体からのリ
ード線の端部に接続端子111 ,112 が千鳥状に配設
された第1の接続端子群11と、ドライブ基板41上の
集積回路2の抵抗基板1側に出力用の接続端子211 ,
212 が千鳥状に配設された第2の接続端子群21とを
段差hを介して相対向させて配置し、第1の接続端子群
11と第2の接続端子群21それぞれの段差hに近いも
の同志111 と211、遠いもの同志112 と212 と
を従来技術でそれぞれワイヤ471 ,472 により接続
する。
That is, a first connection terminal group 11 in which connection terminals 111 and 112 are arranged in a staggered manner at ends of lead wires from a heating resistor on a resistance substrate 40, and an integrated circuit 2 on a drive substrate 41. Output connection terminals 211,.
The second connecting terminal group 21 arranged in a zigzag pattern is arranged to face each other via a step h, and the first connecting terminal group 11 and the second connecting terminal group 21 The near ones 111 and 211 and the far ones 112 and 212 are connected by wires 471 and 472, respectively, according to the prior art.

【0014】この場合、抵抗基板40とドライブ基板41
が同一平面にあるか、また集積回路2の厚さ分だけ段差
を有し、高い側から低い側にワイヤボンディングを行
い、このとき第1の接続端子群11と第2の接続端子群
21の接続方法として、第1の接続端子群11,第2の接
続端子群21の近距離同志即ち111 と211 および遠
距離同志即ち112 と212 とを接続し、近距離同志の
ワイヤ471 の高さを遠距離同志のワイヤ472 の高さ
より低く配設するワイヤボンディング方法が特開昭57-1
65272 号公報に示されている。
In this case, the resistance substrate 40 and the drive substrate 41
Are on the same plane or have a step corresponding to the thickness of the integrated circuit 2, and wire bonding is performed from the higher side to the lower side. At this time, the first connection terminal group 11 and the second connection terminal group
As a connection method of the first connection terminal group 21, the short-distance connection between the first connection terminal group 11 and the second connection terminal group 21, ie, 111 and 211, and the long-distance connection between the second connection terminal group 21 and 212 are connected, and the height of the short-distance wire 471 is increased. The wire bonding method of arranging the wire lower than the height of the wire 472 at a long distance is disclosed in
No. 65272 discloses this.

【0015】しかし、このワイヤボンディング方法は直
径30μmの金ワイヤでフルオートボンダ{(株)新
川、型名SWB−FA−UTC−7}の超音波ボンダを
用いた提案者らの実験によれば、段差の大きさが集積回
路2の厚さ分、すなわち0.3乃至0.5mmの範囲よび
ワイヤ長さが2mm以下において有用でも段差が0.5mm
以上、ワイヤ長さが2mm以上となると、図3に示すよう
に近距離同志のワイヤ471 および遠距離同志のワイヤ
472 の段差の高い部分において20μmから30μm
と近接し極端な場合は図3aのようにワイヤ471 ,4
72 が接触するものがみられた。
However, this wire bonding method is based on an experiment conducted by the present inventors using an ultrasonic bonder of a full-auto bonder {Shinkawa Co., Ltd., model name SWB-FA-UTC-7} using a gold wire having a diameter of 30 μm. The size of the step is equal to the thickness of the integrated circuit 2, that is, the step is 0.5 mm even if it is useful in the range of 0.3 to 0.5 mm and the wire length is 2 mm or less.
As described above, when the wire length is 2 mm or more, as shown in FIG. 3, 20 μm to 30 μm in the high step portion of the short-distance wire 471 and the long-distance wire 472.
In the extreme case, the wires 471, 4 are connected as shown in FIG.
Some were in contact with 72.

【0016】また図3aのように近距離同志のワイヤ4
71 のうちには下側まで曲がりを示すものが見られた。
とくに接触しやすいものはワイヤ471 同志やワイヤ4
72同志よりも、当然、より接近したワイヤ471とワ
イヤ472 間において発生する。これはフルオートボン
ダの場合、ボンディング中のワイヤ切れ対策として金ワ
イヤの伸び率(常温で7乃至10%)の大きいものを用
いることから、ワイヤが高速で張られたのち縮むため、
ワイヤループとしての安定を保つための自由度は張った
ワイヤに対して直角方向のみとなり、ワイヤ倒れになっ
てあらわれると考えられる。また実験中におけるワイヤ
倒れは1個の集積回路内においては一方向性をもってい
るし、またワイヤ471 ,472 間の接触位置はワイヤ
のほぼ中央であった。更に図3bに示すように近距離同
志のワイヤ471 をボンディングしたのち、遠距離同志
のワイヤ472 をボンディングしようとする、キャビラ
リ51の降下時にこのキャビラリ51の先端や側端部が
ワイヤ471 に接触し、キャビラリ51によるワイヤ踏
み現象がみられ、ワイヤ471 が471 ´のように変形
することもある。
Also, as shown in FIG.
Some of them showed a bend to the bottom.
Particularly easy to contact is wire 471 comrade or wire 4
Of course, it occurs between the wires 471 and 472 that are closer together than the 72 comrades. This is because, in the case of a full-auto bonder, a wire having a large elongation rate (7 to 10% at room temperature) is used as a measure against wire breakage during bonding, so the wire is stretched at a high speed and then contracted.
It is considered that the degree of freedom for maintaining the stability as a wire loop is only in the direction perpendicular to the stretched wire, and the wire may fall down. Further, the wire falling during the experiment was unidirectional in one integrated circuit, and the contact position between the wires 471 and 472 was almost at the center of the wire. Further, as shown in FIG. 3B, after bonding the short-distance wire 471, the bonding of the long-distance wire 472 is attempted. When the cabillary 51 descends, the tip or side end of the cabillary 51 contacts the wire 471. In addition, the wire stepping phenomenon due to the cavities 51 is observed, and the wire 471 may be deformed like 471 '.

【0017】これは、段差が0.5mm以上の所をボンデ
ィングするとき、ワイヤループ形状を決めるワイヤテン
ション(通常ワイヤを挟み込む摩擦方式をとっている)
をゆるめて行うため、ワイヤ471 は最初の接続点であ
る接続端子211 にボンディング後、次の接続点である
接続端子111 にボンディング中に長めになるため矢印
方向に変形し、最初の接続点である接続端子211 の外
方に変形するため、次にワイヤ472 を最初の接続点で
ある接続端子212 にボンディングするときのキャビラ
リ51の降下時に、ワイヤ471 を踏む現象が表われ
る。
This is because, when bonding a step having a step of 0.5 mm or more, a wire tension which determines a wire loop shape (usually adopts a friction method for sandwiching a wire).
The wire 471 is bonded to the connection terminal 211, which is the first connection point, and is deformed in the direction of the arrow because it becomes longer during bonding to the connection terminal 111, which is the next connection point. Since the connection terminal 211 is deformed outwardly, the phenomenon that the wire 471 is stepped on when the cabillary 51 descends when the wire 472 is bonded next to the connection terminal 212 as the first connection point appears.

【0018】この現象は、近距離同志の接続端子111
,211 のボンディング位置間の距離ISLと、遠距
離同志の接続端子112 ,212 のボンディング位置間
の距離OSLとの比が不適当、とくにh/ISL比が大
きいとこの傾向が顕著にあらわれることが実験的に確認
された。
This phenomenon is caused by short-range connection terminals 111.
, 211, and the distance OSL between the bonding positions of the connection terminals 112, 212 at long distances are inappropriate, especially when the h / ISL ratio is large. Confirmed experimentally.

【0019】[0019]

【発明が解決しようとする課題】この発明は上述した不
都合に鑑みなされたものであり、ワイヤ間の接触事故を
少なくし、高密度化をはかり得る段差を有する接続端子
群間のワイヤボンディング方法を提供することを目的と
している。
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned inconveniences, and a wire bonding method between connection terminal groups having steps which can reduce contact accidents between wires and achieve high density. It is intended to provide.

【0020】[0020]

【課題を解決するための手段】即ち、本発明は、段差を
もって対向するように設けられた第1の接続端子群及び
第2の接続端子群のそれぞれ相対応する接続端子対間を
ワイヤのボンディングにより接続するようになされたワ
イヤボンディング方法において、前記第1の接続端子群
と第2の接続端子群がそれぞれ近距離同志および遠距離
同志の接続端子対が相対応して千鳥状に配設され、かつ
前記第1の接続端子群と第2の接続端子群との段差を
、前記第1の接続端子群と第2の接続端子群の近距離
同志の接続端子対のボンディング位置間の距離をIS
L、遠距離同志の接続端子対のボンディング位置間の距
離をOSLとしたとき、h/ISL、h/OSLともに
0.4乃至0.6で、かつh/ISL>h/OSLの
係をもたせたことを特徴とするワイヤボンディング方法
である。
That is, according to the present invention, there is provided a method of bonding a wire between a pair of corresponding connection terminals of a first connection terminal group and a second connection terminal group provided so as to face each other with a step. In the wire bonding method, the first connection terminal group
And the second connection terminal group are short-distance and long-distance, respectively.
The connection terminal pairs of the comrades are arranged in a staggered manner corresponding to each other, and
Short distance the level difference between the first connection terminal group and the second connecting terminal groups h, of the first connection terminal group and the second connecting terminal groups
The distance between the bonding positions of the connection terminal pairs of the competitors is IS
L, distance between bonding positions of connection terminal pairs at long distances
A wire bonding method , wherein h / ISL and h / OSL are both 0.4 to 0.6 , where h / ISL> h / OSL, when the separation is OSL. It is.

【0021】この関係において、さらに第1の接続端子
群及び第2接続端子群がそれぞれ千鳥状に配設され、近
距離同志および遠距離同志の接続端子対をそれぞれ相対
応させ、近距離同志の接続端子対のボンディング位置間
の距離をISL、遠距離同志の接続端子対のボンディン
グ位置間の距離をOSLとした時、h/ISL=0.50乃
至0.60、h/OSL=0.40乃至0.45の関係
を選ぶこと、段差hが0.5乃至1.5mmの範囲1.5
mmの範囲であること、ワイヤのボンディングが段差の低
い側を先に、段差の高い側を後にすることを実施態様と
ている
In this relation, the first connection terminal group and the second connection terminal group are further arranged in a zigzag pattern, and the short-distance and long-distance connection terminal pairs are made to correspond to each other. Assuming that the distance between the bonding positions of the connection terminal pair is ISL and the distance between the bonding positions of the long distance connection terminal pairs is OSL, h / ISL = 0.50 to 0.60 and h / OSL = 0.40 to 0. .45, and the step h is in the range of 1.5 to 1.5 mm.
It mm in the range of, wire bonding before the lower step side is <br/> the embodiment that after the high step side.

【0022】[0022]

【発明の実施の形態】サーマルプリンティングヘッドで
は、発熱抵抗体の数が前述のように数1000個程度と極め
て多数であるため駆動回路を集積化して、外部周辺回路
の低減を図っている。この場合に問題となるのは数1000
個という多数の発熱抵抗体と集積回路の出力及び発熱抵
抗体と共通電極をいかに作業能率よく高信頼性をもたせ
て接続し、かつボンディング中のワイヤ倒れをいかに容
易に修繕できるかという点である。
DESCRIPTION OF THE PREFERRED EMBODIMENTS In a thermal printing head, since the number of heat generating resistors is extremely large, about several thousands as described above, the drive circuits are integrated to reduce external peripheral circuits. In this case, the problem is several thousand
The point is how to connect the large number of heating resistors and the output of the integrated circuit and the heating resistor and the common electrode with high work efficiency and high reliability, and how to easily repair wire collapse during bonding. .

【0023】この点について発明者らは更に段差を介し
て対向するように設けられた第1の接続端子群及び第2
の接続端子群のそれぞれ相対応する接続端子対間をワイ
ヤのボンディングにより接続するワイヤボンディグ方法
について種々実験検討した結果、段差が大きくなるとワ
イヤが長くなるのでワイヤ切れ対策からワイヤのテンシ
ョンもワイヤの短い場合に比較して小さくしなければな
らずワイヤのたるみを防止する必要から段差とボンディ
ング位置間の比を最適化することにより、ワイヤのたる
みもなくなることを見い出した。
In this regard, the inventors further have a first connection terminal group and a second connection terminal group provided so as to face each other via a step.
After conducting various experiments and studies on the wire bonding method of connecting the corresponding connection terminal pairs of the connection terminal groups by wire bonding, the wire becomes longer as the step becomes larger. Since it is necessary to reduce the length of the wire as compared with the case where the length is short and it is necessary to prevent the slack of the wire, it has been found that the slack of the wire is eliminated by optimizing the ratio between the step and the bonding position.

【0024】この場合、段差の大きさが0.5mm以下で
あると従来技術によるワイヤボンディング方法が可能で
あるが段差が0.5mm以上になると前述した問題点があ
り、段差が1.5mm以上になるとワイヤが長くなり、ボ
ンディング中に最初にボンディングしたワイヤと接続電
極のボンディング位置に引張り力が働き、剥離をまねく
危険性が高まると同時にワイヤに内在している曲がり
(通常カール現象と云う)が発生し、隣接ワイヤとの接
触が多くなり、例えば1mmに9個の接続端子を有するよ
うな高密度配線には適さない。従って、本発明のワイヤ
ボンディング方法における段差の範囲は0.5mmから
1.5mmが最適となる。またワイヤのボンディングを段
差の高い側を先にすると、段差の低い側をボンディング
する際、特に金やアルミニウムのワイヤを使用するとボ
ンディング部のすぐ上のワイヤのネック部に引張り力が
働き、極端な場合はボンディング位置の剥離を引き起こ
す危険があるし、またボンディングの適用製品の補助ロ
ーラ間を小さくするという制約条件から段差の低い側を
先にボンディングした方が好ましい。
In this case, if the size of the step is 0.5 mm or less, the wire bonding method according to the prior art is possible. However, if the step is 0.5 mm or more, there is the above-mentioned problem, and the step is 1.5 mm or more. Becomes longer, the tensile force acts on the bonding position between the first bonded wire and the connection electrode during bonding, increasing the risk of peeling, and at the same time, the bending inherent in the wire (usually referred to as curl phenomenon). Occurs and the contact with adjacent wires increases, which is not suitable for high-density wiring having, for example, nine connection terminals per 1 mm. Therefore, the range of the step in the wire bonding method of the present invention is optimally 0.5 mm to 1.5 mm. Also, when bonding the wire with the high step first, when bonding the low step, especially when using gold or aluminum wire, a tensile force acts on the neck of the wire immediately above the bonding part, and extreme In this case, there is a risk that the bonding position may be peeled off, and it is preferable that the side with the lower step is bonded first because of the constraint that the distance between the auxiliary rollers of the product to which the bonding is applied is reduced.

【0025】次に本発明のワイヤボンディング方法の一
実施形態を図4により説明する。但し、図3と同一符号
は同一部を示す。
Next, one embodiment of the wire bonding method of the present invention will be described with reference to FIG. However, the same reference numerals as those in FIG. 3 indicate the same parts.

【0026】即ち、図示しない複数個の発熱抵抗体に接
続された導出線がその先端において、千鳥状の接続端子
111 ,112 からなる第1の接続端子群11として配
設されている抵抗基板40はヒートシンク42上の図示
しない位置合わせマークと抵抗基板40上の発熱抵抗体
との位置合わせを行い装着により載置される。
That is, a lead wire connected to a plurality of heating resistors (not shown) is provided at its tip with a resistance board 40 provided as a first connection terminal group 11 composed of staggered connection terminals 111 and 112. Is an alignment mark (not shown) on the heat sink 42 and a heating resistor on the resistance substrate 40
And is placed by mounting.

【0027】また集積回路2が接着載置されたドライブ
基板411 は抵抗基板40の接続端子111 ,112
と、ドライブ基板41上の集積回路2の千鳥状の接続端
子211 ,212 からなる第2の接続端子群21と適正
な距離を保ち、顕微鏡等により近距離同志、遠距離同志
の接続端子111 と211 及び112 と212 の位置出
しが行われ、ヒートシンク42上に接着載置される。
The drive substrate 411 on which the integrated circuit 2 is adhered is connected to the connection terminals 111, 112 of the resistance substrate 40.
And a second connection terminal group 21 composed of the staggered connection terminals 211 and 212 of the integrated circuit 2 on the drive substrate 41 at an appropriate distance, and a short distance and long distance connection terminals 111 connected to each other by a microscope or the like. The positions of 211, 112 and 212 are determined, and the adhesive is placed on the heat sink 42.

【0028】この場合抵抗基板40の高さと集積回路2
面上の高さの差即ち段差hは図2に示したプラテンロー
ラ径40mm,補助ローラ径10mmで考えると1mm前後が
望ましいので、本実施例では1mmとした。
In this case, the height of the resistance substrate 40 and the integrated circuit 2
The height difference on the surface, that is, the step h, is preferably about 1 mm when considering the platen roller diameter of 40 mm and the auxiliary roller diameter of 10 mm shown in FIG.

【0029】この時、抵抗基板40側の千鳥状の第1接
続端子群11と、集積回路2側の千鳥状の第2の接続端
子群21とは遠距離同志即ち111 と211 および近距
離同志即ち112 と212 のものが相対向して配設さ
れ、これをワイヤでボンディングすることによりサーマ
ルプリンテイングヘッドが完成する。
At this time, the staggered first connection terminal group 11 on the resistance substrate 40 side and the staggered second connection terminal group 21 on the integrated circuit 2 side are located at long distances, ie, 111 and 211 and short distances. That is, the elements 112 and 212 are arranged opposite to each other, and are bonded by wires to complete the thermal printing head.

【0030】ここでボンディング位置間の段差hとボン
ディング位置間距離の近距離同志の距離ISL及び遠距
離同志の距離OSLの比即ちボンディング段差比は、ボ
ンディング段差比=h/ISL、h/OSLで表わされ
る。また、ISLとOSLを含めてSLとすればh/S
Lとなる。
Here, the ratio of the step h between the bonding positions and the distance ISL of the short distance between the bonding positions and the distance OSL of the long distances, that is, the bonding step ratio is: bonding step ratio = h / ISL, h / OSL. Is represented. Also, if SL is included including ISL and OSL, h / S
L.

【0031】次に従来の方法によるボンディング段差比
のものを含めて0.35から0.80まで変化させたボ
ンディング結果を下表に示す。但し、ボンディングは低
い側を先に行った。
Next, the following table shows the bonding results obtained by changing the bonding step ratio from 0.35 to 0.80 according to the conventional method. However, the bonding was performed on the lower side first.

【0032】[0032]

【表1】 [Table 1]

【0033】表から遠距離同志のボンディング段差比を
一定とした場合、近距離同志のボンディング段差比が大
きくなるにつけれてワイヤ曲り→ワイヤ接触→ワイヤ踏
み現象と変化していくことがわかる。
From the table, it can be seen that when the bonding step ratio between long distances is constant, the wire bending → wire contact → wire stepping phenomenon changes as the bonding step ratio between short distances increases.

【0034】また、ワイヤを先にボンディングした集積
回路2の接続端子21からのワイヤの剥離はボンディン
グ段差比が0.40以下になると発生する確率が高まる
が、これは段差hが大きくなるとワイヤテンションは小
さくてもキャビラリ内における摩擦が働いているため
と、ボンディング位置間の距離が大きいこともからみ、
ワイヤが長くなることに起因している。
Further, the probability of the peeling of the wire from the connection terminal 21 of the integrated circuit 2 to which the wire has been previously bonded increases when the bonding step ratio becomes 0.40 or less. Even if is small, the friction between the cavities is working and the distance between the bonding positions is large,
This is due to the longer wire.

【0035】また同表の判定においてワイヤ接触が発生
しても良となっているのはサーマルプリンティングヘッ
ドの場合、段差間におけるワイヤ数が数1000本あり、数
個所のワイヤ接触で不良にすると歩留り低下となるので
ワイヤ接触が極めて少く、接触部を細い針金などで修繕
可能なものは良と判断しているためである。
In the judgment in the table, it is good that even if a wire contact occurs, the thermal printing head has thousands of wires between the steps, and the yield can be reduced if the wires are defective at several places. This is because the wire contact is extremely small and the contact portion can be repaired with a thin wire or the like, so that it is judged to be good.

【0036】また同表でワイヤ踏み現象はワイヤを取り
はずして修繕となるのでボンディングとして不良であ
る。このときのボンディング段差比は0.6以上である
ことがわかる。
In the same table, the stepping on the wire is defective as bonding because the wire is detached and repaired. It can be seen that the bonding step ratio at this time is 0.6 or more.

【0037】従って同表より修繕可能なボンディング段
差比は0.40乃至0.60であり、千鳥状配置で近距
離同志、遠距離同志の接続端子を相対向させた場合の内
側のボンディング段差比は0.50乃至0.60,外側
のボンディング段差比は0.40乃至0.45である。
Accordingly, from the table, the bonding step ratio that can be repaired is 0.40 to 0.60, and the inner bonding step ratio when the connection terminals of short distance and long distance are opposed to each other in a staggered arrangement. Is 0.50 to 0.60, and the outer bonding step ratio is 0.40 to 0.45.

【0038】図4図bには実施例におけるワイヤボンデ
ィングのワイヤリング状態を示す。表で判定が良のもの
はボンディングの後のボンディング位置側において高さ
方向には近距離同志のワイヤ471 ,遠距離同志のワイ
ヤ472 間に差はなく、ほぼ同一レベルでボンディング
された。これは図中矢印方向にキャピラリ内でワイヤに
摩擦力がかかりながら、即ち、ワイヤを初めのボンディ
ング位置にボンディング後、ワイヤを、引張りながら次
のボンディング位置にボンディングされるためである。
FIG. 4B shows a wiring state of wire bonding in the embodiment. In the table, those having a good judgment showed that there was no difference between the short-distance wire 471 and the long-distance wire 472 in the height direction on the bonding position side after bonding, and the bonding was performed at substantially the same level. This is because the wire is bonded to the next bonding position while pulling the wire while applying a frictional force to the wire in the capillary in the direction of the arrow in the drawing, that is, after bonding the wire to the first bonding position.

【0039】[0039]

【発明の効果】本発明のワイヤボンディング方法を用い
ることにより接続したワイヤ間の接触が極めて少なくな
るばかりでなく、接触が生じても容易に修繕可能とな
る。さらに製品の歩留りも向上するとともに修繕個所も
少なくなることによりワイヤボンディングの作業能率が
向上する。またワイヤの曲りも少ないことからワイヤ保
護を行うエンキャップ剤のワイヤ間の通りが良くなるこ
とによりエンキャップ工程でのワイヤの接触を未然に防
止できる。
According to the wire bonding method of the present invention, not only the contact between the connected wires is extremely reduced, but also if the contact occurs, the wire can be easily repaired. Further, the yield of the product is improved, and the number of repairs is reduced, so that the work efficiency of wire bonding is improved. Also, since the wire is less bent, the passage of the encapsulant for protecting the wire between the wires is improved, so that the contact of the wire in the encapsulation process can be prevented.

【0040】更に、このような段差を設けることにより
補助ローラ間の距離が小さくでき熱転写フィルムのたる
み、しわの発生も防止でき、普通紙への微細な転写が可
能となる。
Further, by providing such a step, the distance between the auxiliary rollers can be reduced, the sagging and wrinkling of the thermal transfer film can be prevented, and fine transfer to plain paper can be performed.

【0041】[0041]

【図面の簡単な説明】[Brief description of the drawings]

【0042】[0042]

【図1】サーマルプリンティングヘッドの説明図、FIG. 1 is an explanatory diagram of a thermal printing head,

【0043】[0043]

【図2】サーマルプリンティングヘッドを用い熱転写フ
ィルムを介して普通紙へ記録する状態を示す説明用断面
図、
FIG. 2 is an explanatory cross-sectional view showing a state where recording is performed on plain paper via a thermal transfer film using a thermal printing head;

【0044】[0044]

【図3】従来のワイヤボンディング方法による段差ボン
ディングを示す図であり、(a)は説明用平面図、
(b)は説明用断面図、
3A and 3B are views showing step bonding by a conventional wire bonding method, wherein FIG. 3A is a plan view for explanation,
(B) is a sectional view for explanation,

【0045】[0045]

【図4】本発明のワイヤボンディング方法の一実施例に
よる段差ボンディングを示す図であり、(a)は説明用
平面図、(b)は説明用断面図。
4A and 4B are diagrams showing step bonding according to an embodiment of the wire bonding method of the present invention, wherein FIG. 4A is a plan view for explanation, and FIG. 4B is a sectional view for explanation.

【0046】[0046]

【符号の説明】[Explanation of symbols]

1……発熱抵抗体 2……集積回路 3……共通電極 4……入力信号群 11,21……接続端子群 111 ,112 ,211 ,212 ……接続端子 40……抵抗基板 41……ドライブ基板 412 ……共通電極基板 42……ヒートシンク 43……熱転写フィルム 44……普通紙 45……プラテンローラ 461 ,462 ……補助ローラ 47,471 ,472 ,471 ´,48,49……ワイ
ヤ 51……キャピラリ。
DESCRIPTION OF SYMBOLS 1 ... Heating resistor 2 ... Integrated circuit 3 ... Common electrode 4 ... Input signal group 11, 21 ... Connection terminal group 111, 112, 211, 212 ... Connection terminal 40 ... Resistor board 41 ... Drive Substrate 412: Common electrode substrate 42: Heat sink 43: Thermal transfer film 44: Plain paper 45: Platen rollers 461, 462: Auxiliary rollers 47, 471, 472, 471 ', 48, 49 Wire 51: ... capillary.

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 段差をもって対向するように設けられた
第1の接続端子群及び第2の接続端子群のそれぞれ相対
応する接続端子対間をワイヤのボンディングにより接続
するようになされたワイヤボンディング方法において、
前記第1の接続端子群と第2の接続端子群がそれぞれ近
距離同志および遠距離同志の接続端子対が相対応して千
鳥状に配設され、かつ前記第1の接続端子群と第2の接
続端子群との段差をh、前記第1の接続端子群と第2の
接続端子群の近距離同志の接続端子対のボンディング位
置間の距離をISL、遠距離同志の接続端子対のボンデ
ィング位置間の距離をOSLとしたとき、h/ISL、
h/OSLがともに0.4乃至0.6で、かつh/IS
L>h/OSLの関係をもたせたことを特徴とするワイ
ヤボンディング方法。
1. A first connecting terminal groups and a second wire bonding method that is adapted between the connecting terminal pairs are connected by bonding wires respectively corresponding phase connecting terminal groups arranged so as to face each other with a step At
The first connection terminal group and the second connection terminal group are close to each other.
The connection terminal pairs of the long distance and long distance
A step difference between the first connection terminal group and the second connection terminal group is h , and the first connection terminal group and the second connection terminal group are arranged in a bird shape.
Bonding position of connection terminal pairs in short distance between connection terminal groups
The distance between the terminals is ISL, and the bond
H / ISL, where OSL is the distance between
h / OSL is both 0.4 to 0.6 and h / IS
A wire bonding method characterized by having a relationship of L> h / OSL .
【請求項2】 段差hが0.5乃至1.5mmの範囲であ
ることを特徴とする特許請求の範囲第1項記載のワイヤ
ボンディング方法。
2. The wire bonding method according to claim 1, wherein the step h is in a range of 0.5 to 1.5 mm.
JP1187996A 1996-01-26 1996-01-26 Wire bonding method Expired - Lifetime JP2645235B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1187996A JP2645235B2 (en) 1996-01-26 1996-01-26 Wire bonding method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1187996A JP2645235B2 (en) 1996-01-26 1996-01-26 Wire bonding method

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP59031413A Division JPS60176245A (en) 1984-02-23 1984-02-23 Wire bonding method

Publications (2)

Publication Number Publication Date
JPH08279528A JPH08279528A (en) 1996-10-22
JP2645235B2 true JP2645235B2 (en) 1997-08-25

Family

ID=11790026

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1187996A Expired - Lifetime JP2645235B2 (en) 1996-01-26 1996-01-26 Wire bonding method

Country Status (1)

Country Link
JP (1) JP2645235B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5696367B2 (en) * 2010-03-30 2015-04-08 富士通株式会社 Semiconductor device and manufacturing method thereof

Also Published As

Publication number Publication date
JPH08279528A (en) 1996-10-22

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