JP2629964B2 - Method for manufacturing thin-film magnetic head - Google Patents
Method for manufacturing thin-film magnetic headInfo
- Publication number
- JP2629964B2 JP2629964B2 JP17223689A JP17223689A JP2629964B2 JP 2629964 B2 JP2629964 B2 JP 2629964B2 JP 17223689 A JP17223689 A JP 17223689A JP 17223689 A JP17223689 A JP 17223689A JP 2629964 B2 JP2629964 B2 JP 2629964B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- thin
- coil
- forming
- magnetic head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【発明の詳細な説明】 産業上の利用分野 本発明は磁気記録再生装置に搭載される磁気ヘッド、
特に複数巻のコイルを具備するマルチチャンネル薄膜磁
気ヘッドの製造方法に関するものである。The present invention relates to a magnetic head mounted on a magnetic recording / reproducing apparatus,
More particularly, the present invention relates to a method for manufacturing a multi-channel thin-film magnetic head having a plurality of coils.
従来の技術 最近、磁気記録再生装置の高記録密度化、データの高
転送速度化に対応して、狭トラック化・マルチチャンネ
ル化を容易に実現できる薄膜磁気ヘッドが注目されてい
る。2. Description of the Related Art In recent years, a thin film magnetic head that can easily realize a narrow track and a multi-channel in response to an increase in recording density and an increase in data transfer rate of a magnetic recording / reproducing apparatus has attracted attention.
従来、複数巻のコイルを有する薄膜磁気ヘッドは、第
３図に示すように基板10上に平面的にヘリカル状に薄膜
コイル51を形成して作製されていた。しかし、この場
合、平面的に薄膜コイルが広がっているため、磁気ヘッ
ドを構成する磁気回路の磁気コアが長くなり磁気コア内
での損失が大きく複数巻の効果を発揮できない欠点があ
った。また、高密度にマルチチャンネルの薄膜磁気ヘッ
ドを作製できない欠点もあった。Conventionally, a thin-film magnetic head having a coil having a plurality of turns has been manufactured by forming a thin-film coil 51 on a substrate 10 in a helical shape in a plane as shown in FIG. However, in this case, since the thin-film coil is spread in a plane, the magnetic core of the magnetic circuit constituting the magnetic head becomes long, and the loss in the magnetic core is large, so that the effect of multiple turns cannot be exhibited. There is also a disadvantage that a multi-channel thin film magnetic head cannot be manufactured at a high density.
また、第４図に示したような薄膜磁気ヘッドも提案さ
れている。磁気ヘッドのトラック幅方向と垂直な方向
に、ジグザグ状に複数巻の薄膜コイル52を形成し薄膜磁
気ヘッドを作製する。この薄膜磁気ヘッドにおいては、
高密度にマルチチャンネルの薄膜磁気ヘッドを作製でき
る効果はあるが、磁気コアでの損失が大きくなる欠点は
依然解決されていない。A thin film magnetic head as shown in FIG. 4 has also been proposed. A plurality of thin-film coils 52 are formed in a zigzag shape in a direction perpendicular to the track width direction of the magnetic head to manufacture a thin-film magnetic head. In this thin-film magnetic head,
Although there is an effect that a multi-channel thin-film magnetic head can be manufactured at a high density, the disadvantage that the loss in the magnetic core increases has not been solved yet.
これを避ける方法として、第５図に示したように一層
ずつ薄膜コイルを形成してこれを積層して複数巻の積層
コイル53を形成して薄膜磁気ヘッドを作製する方法も提
案されている。この場合、コイル導体膜および絶縁膜を
一層ずつ形成しフォトリソグラフィを行って、接続部54
で上下のコイルを接続し、これを繰り返して複数巻の薄
膜コイル53を形成するため、作製工程が複雑で長く安価
に薄膜磁気ヘッドを作製できない欠点があった。As a method of avoiding this, a method has been proposed in which a thin film coil is formed one layer at a time as shown in FIG. In this case, the coil conductor film and the insulating film are formed one by one, and photolithography is performed to form the connection portion 54.
In this case, the upper and lower coils are connected to each other, and this process is repeated to form the thin-film coil 53 having a plurality of turns.
発明が解決しようとする課題 以上述べてきたように、従来の薄膜磁気ヘッドの製造
方法では、磁気コアでの損失が大きくなり、高密度にマ
ルチチャンネル化を図ることが出来ず、また安価に製造
できない課題があった。Problems to be Solved by the Invention As described above, in the conventional method of manufacturing a thin film magnetic head, the loss in the magnetic core becomes large, multi-channeling cannot be achieved at high density, and the manufacturing cost is low. There was a task that could not be done.
本発明の目的は上記課題に鑑み、磁気記録再生装置の
高記録密度化、データの高転送速度化、および高密度な
マルチチャンネル化が図れ、高効率で安価な複数巻の薄
膜コイルを有した薄膜磁気ヘッドを容易に得ることが出
来る薄膜磁気ヘッドの製造方法を提供することにある。SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to provide a high-efficiency and inexpensive multi-turn thin-film coil that can achieve high recording density, high data transfer speed, and high-density multi-channel of a magnetic recording and reproducing apparatus. It is an object of the present invention to provide a method of manufacturing a thin film magnetic head that can easily obtain a thin film magnetic head.
課題を解決するための手段 本発明の薄膜磁気ヘッドの製造方法においては、前記
薄膜コイルの形成されるべき領域の少なくとも一部にス
テップ状の下地層を形成する工程と、コイル導体膜と絶
縁膜の複数層からなる積層体を形成する工程と、複数個
単層のコイル形状を一度に形成する工程と、コイル導体
の段差を平坦化し、各コイル導体の一部を露出する工程
と、前記露出部で各層コイルを相互に接続する接続導体
を形成する工程と少なくとも含む製造方法によって積層
体で構成された複数個の単層コイルを多層複数巻の薄膜
コイルにすることを特徴としている。In a method of manufacturing a thin-film magnetic head according to the present invention, a step of forming a step-like underlayer on at least a part of a region where the thin-film coil is to be formed; Forming a laminated body composed of a plurality of layers, forming a plurality of single-layer coil shapes at one time, flattening a step of the coil conductor, exposing a part of each coil conductor, The method is characterized in that a plurality of single-layer coils formed of a laminated body are formed into a multi-layer, multi-layer thin film coil by a manufacturing method including at least a step of forming a connection conductor for connecting the respective layer coils to each other at a portion.
作用 本発明の薄膜磁気ヘッドの製造方法においては、薄膜
コイル形状の加工に際して、コイル導体層と絶縁膜の複
数層からなる積層体を一度にコイル形状に加工する。ま
た、段差部の平坦化を行なうことによって各コイルの露
出部を一度に形成し、その後、形成される接続導体によ
って多層複数巻のコイルが作製される。従って一層毎に
単層コイルと上層コイルとの接続部を形成して、これを
繰り返すことによって複数巻の薄膜コイルを作製する従
来の製造方法と異なり、その製造方法が極めて簡単にな
る。また、複数巻の薄膜コイルは積層構造で作製される
ため、コイル部が形成される領域は平面的に広がらず極
めて小さな部分でよい。In the method of manufacturing a thin-film magnetic head according to the present invention, when processing a thin-film coil shape, a laminated body including a plurality of layers of a coil conductor layer and an insulating film is processed at a time into a coil shape. Further, the exposed portion of each coil is formed at a time by flattening the stepped portion, and thereafter, a multilayer multi-turn coil is manufactured by the formed connection conductor. Therefore, unlike the conventional manufacturing method in which a connecting portion between a single-layer coil and an upper-layer coil is formed for each layer and this is repeated to manufacture a thin-film coil having a plurality of turns, the manufacturing method becomes extremely simple. Further, since the thin-film coil having a plurality of turns is formed in a laminated structure, the region where the coil portion is formed does not spread in a plane and may be an extremely small portion.
実施例 以下に、本発明の実施例について図面を参照しながら
説明する。Embodiments Hereinafter, embodiments of the present invention will be described with reference to the drawings.
第１図は第２図に示す本発明の一実施例にかかる薄膜
磁気ヘッドの製造方法によって作製された４ターンの薄
膜磁気ヘッドの斜視図である。第２図は同実施例の特に
薄膜コイル作製方法を中心に示したもので第１図におけ
るＸ−Ｙ断面を示している。以下、第１図と第２図を用
いて薄膜コイル部の作製方法についてのべる。FIG. 1 is a perspective view of a four-turn thin-film magnetic head manufactured by the method for manufacturing a thin-film magnetic head according to one embodiment of the present invention shown in FIG. FIG. 2 mainly shows a method of manufacturing a thin-film coil of the embodiment, and shows an XY cross section in FIG. Hereinafter, a method for manufacturing the thin film coil portion will be described with reference to FIGS.
まず、下部磁性膜30をガラス等の基板10上に形成す
る。次に、第２図（ａ）のように基板10上に銅薄膜11、
SiO2薄膜12、銅薄膜13を順次形成する。次に同図（ｂ）
に示すように、これら薄膜はフォトリソグラフィにより
ステップ状の下地層14にされる。次に同図（ｃ）のよう
にSiO2絶縁薄膜16a、16b、16c、16dとアルミ薄膜17a、1
7b、17c、17dを真空蒸着あるいはスパッタリングの方法
をもちいて４層の積層体15を形成する。そして、同図
（ｄ）に示すように、これら積層体15をイオンエッチン
グ等の方法により一括してコイル形状にする。次に同図
（ｅ）に示すようにまた、SiO2薄膜18を下地層14の膜厚
以上で形成する。そして、イオンビームを用いたエッチ
ングバック手法あるいは研磨等の手法により各層が平坦
化され同図（ｆ）のように積層体15の各導体層の一部を
露出させる。つぎにまた、SiO2薄膜19を形成してフォト
リソグラィ技術により同図（ｇ）に示す接続窓20a、2
0b、20c、20dを作製する。この後同図（ｈ）のように、
接続導体21a、21b、21cが形成され積層体の１層目と２
層目、２層目と３層目、３層目と４層目が接続され４パ
ターンの薄膜コイルが形成される。その後、磁気ギャッ
プ31となるSiO2層介して上部磁性膜32を形成して第１図
のような４ターンの薄膜磁気ヘッドを得る。First, a lower magnetic film 30 is formed on a substrate 10 such as glass. Next, as shown in FIG. 2 (a), a copper thin film 11,
An SiO 2 thin film 12 and a copper thin film 13 are sequentially formed. Next, FIG.
As shown in FIG. 6, these thin films are formed into a step-like underlayer 14 by photolithography. Next, as shown in FIG. 2C, the SiO 2 insulating thin films 16 a , 16 b , 16 c , 16 d and the aluminum thin films 17 a , 1
Four layers 15 are formed from 7 b , 17 c , and 17 d by vacuum deposition or sputtering. Then, as shown in FIG. 3D, the laminates 15 are collectively formed into a coil shape by a method such as ion etching. Next, as shown in FIG. 2E, an SiO 2 thin film 18 is formed to have a thickness equal to or greater than the thickness of the underlayer 14. Each layer is flattened by an etching back method or a polishing method using an ion beam, and a part of each conductor layer of the laminate 15 is exposed as shown in FIG. Next, an SiO 2 thin film 19 is formed, and the connection windows 20 a , 2 a shown in FIG.
Create 0 b , 20 c , and 20 d . After this, as shown in FIG.
The connection conductors 21 a , 21 b , 21 c are formed and the first and second layers of the laminate are
The layers, the second and third layers, and the third and fourth layers are connected to form four patterns of thin-film coils. Thereafter, an upper magnetic film 32 is formed via an SiO 2 layer serving as a magnetic gap 31 to obtain a four-turn thin-film magnetic head as shown in FIG.
なお、上記実施例においては、各層１ターンのコイル
を４層積層して４ターンコイルを構成したが、各層のコ
イルターン数として２ターン以上で構成しても良い。In the above embodiment, a four-turn coil is formed by laminating four one-turn coils in each layer. However, the number of coil turns in each layer may be two or more.
発明の効果 以上のように、本発明の薄膜磁気ヘッドの構造方法に
よれば、作製方法が極めて簡単になり、トラック密度の
高い、高効率の薄膜磁気ヘッドを歩留まりよく、安価に
作製できる効果を有する。また、コイル導体の段差を平
坦化する前に下地層の膜厚以上の絶縁薄膜を形成し、コ
イル部以外の凹部を絶縁層で埋めることによりコイル間
に形成される接続導体もまた、ほぼ平面上に形成される
ため、コイル段差に起因する断線などの問題も解消する
ものである。As described above, according to the method of the present invention for manufacturing a thin-film magnetic head, the manufacturing method is extremely simplified, and the effect of manufacturing a high-efficiency thin-film magnetic head having a high track density with good yield and low cost can be obtained. Have. Also, before the step of the coil conductor is flattened, an insulating thin film having a thickness equal to or greater than the thickness of the underlying layer is formed, and the recesses other than the coil portion are filled with the insulating layer, so that the connection conductor formed between the coils is also substantially flat. Since it is formed on the upper side, the problem such as disconnection due to the coil step is also solved.
第１図は本発明の一実施例にかかる薄膜磁気ヘッドの製
造方法に従って作製された４ターン薄膜磁気ヘッドの斜
視図、第２図（ａ）〜（ｈ）は第１図に示された薄膜磁
気ヘッドの薄膜コイル部の作製方法を示したもので、第
１図におけるＸ−Ｙ断面図、第３図、第４図、第５図
は、従来の製造方法により製造された薄膜磁気ヘッドの
斜視図である。 10……基板、11、13……銅薄膜、12……SiO2薄膜、14…
…下地層、15……積層体、16a〜16d……SiO2薄膜、17a
〜17b……アルミ薄膜、18、19……絶縁膜、20a〜20b…
…接続窓、30……下部磁性膜、31……磁気ギャップ、32
……上部磁性膜。FIG. 1 is a perspective view of a four-turn thin-film magnetic head manufactured according to a method of manufacturing a thin-film magnetic head according to one embodiment of the present invention, and FIGS. 2 (a) to (h) are thin films shown in FIG. FIG. 1 shows a method of manufacturing a thin-film coil portion of a magnetic head. FIG. 1 is a cross-sectional view taken along the line XY of FIG. 1, and FIGS. 3, 4 and 5 are views of a thin-film magnetic head manufactured by a conventional manufacturing method. It is a perspective view. 10 ... substrate, 11, 13 ... copper thin film, 12 ... SiO 2 thin film, 14 ...
... underlayer, 15 ...... laminate, 16 a ~16 d ...... SiO 2 film, 17 a
~17 b ...... aluminum thin film, 18 and 19 ...... insulating film, 20 a ~20 b ...
... Connection window, 30 ... Lower magnetic film, 31 ... Magnetic gap, 32
...... Upper magnetic film.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 戸崎 善博 大阪府門真市大字門真1006番地 松下電 器産業株式会社内 (56)参考文献 特開 昭57−58217（ＪＰ，Ａ) 特開 平２−31316（ＪＰ，Ａ) 特開 平３−19113（ＪＰ，Ａ) ────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Yoshihiro Tozaki 1006 Kazuma Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (56) References JP-A-57-58217 (JP, A) JP-A-2- 31316 (JP, A) JP-A-3-19113 (JP, A)
Claims (2)
一端で磁気ギャップを介して対向し、かつ他端で各々対
向するように積層して磁気回路を構成し、かつ磁気回路
に鎖交するように複数巻された薄膜コイルを具備する薄
膜磁気ヘッドの製造方法において、前記薄膜コイルの形
成されるべき領域の少なくとも一部にステップ状の下地
層を形成する工程と、コイル導体膜と絶縁膜の複数層か
らなる積層体を形成する工程と、複数個単層のコイル形
状を一度に形成する工程と、そのコイル導体の段差を平
坦化し、各層コイル導体の一部を露出する工程と、前記
露出部で各コイルを相互に接続する接続導体を形成して
多層の薄膜コイルを作製する工程とを含むことを特徴と
する薄膜磁気ヘッドの製造方法。A magnetic circuit is formed by laminating a lower magnetic film and an upper magnetic film so as to face each other via a magnetic gap at one end of both magnetic films and to face each other at the other end. In a method of manufacturing a thin-film magnetic head including a thin-film coil wound in plural numbers so as to interlink, a step of forming a step-like underlayer on at least a part of a region where the thin-film coil is to be formed; Forming a multilayer body composed of a plurality of layers of insulating films, forming a single-layer coil shape at one time, flattening the step of the coil conductor, and exposing a part of each layer coil conductor. And a step of forming a connecting conductor for connecting the respective coils to each other at the exposed portion to produce a multilayered thin-film coil.
とも一部にステップ状の下地層を形成する工程と、コイ
ル導体膜と絶縁膜の複数層からなる積層体を形成する工
程と、複数個単層のコイル形状を一度に形成する工程
と、少なくとも前記下地層と同等以上の膜厚の絶縁膜を
形成し、コイル導体部の段差を平坦化し、各層コイル導
体の一部を露出する工程と、前記露出部で各コイルを相
互に接続する接続導体を形成し多層の薄膜コイルを作製
する工程とを含むことを特徴とした請求項１記載の薄膜
磁気ヘッドの製造方法。A step of forming a step-shaped underlayer on at least a part of a region where a thin-film coil is to be formed; a step of forming a laminate composed of a plurality of layers of a coil conductor film and an insulating film; A step of forming a single-layer coil shape at a time, and a step of forming an insulating film having a thickness equal to or greater than at least the underlayer, flattening a step of the coil conductor portion, and exposing a part of each layer coil conductor. 2. A method of manufacturing a thin-film magnetic head according to claim 1, further comprising the steps of: forming a connecting conductor for connecting the coils to each other at the exposed portion to produce a multilayer thin-film coil.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17223689A JP2629964B2 (en) | 1989-07-03 | 1989-07-03 | Method for manufacturing thin-film magnetic head |
| DE69011755T DE69011755T2 (en) | 1989-06-16 | 1990-06-13 | Manufacturing process of a thin film coil with multi-part winding. |
| EP90111142A EP0402880B1 (en) | 1989-06-16 | 1990-06-13 | Method for manufacturing multiturn thin film coil |
| US07/539,738 US5022141A (en) | 1989-06-16 | 1990-06-18 | Method for manufacturing multiturn thin film coil |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17223689A JP2629964B2 (en) | 1989-07-03 | 1989-07-03 | Method for manufacturing thin-film magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0337812A JPH0337812A (en) | 1991-02-19 |
| JP2629964B2 true JP2629964B2 (en) | 1997-07-16 |
Family
ID=15938140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17223689A Expired - Fee Related JP2629964B2 (en) | 1989-06-16 | 1989-07-03 | Method for manufacturing thin-film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2629964B2 (en) |
-
1989
- 1989-07-03 JP JP17223689A patent/JP2629964B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0337812A (en) | 1991-02-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |