JP2587214C - - Google Patents
Info
- Publication number
- JP2587214C JP2587214C JP2587214C JP 2587214 C JP2587214 C JP 2587214C JP 2587214 C JP2587214 C JP 2587214C
- Authority
- JP
- Japan
- Prior art keywords
- gas
- measured
- absorption
- light
- peak
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007789 gas Substances 0.000 claims description 212
- 238000010521 absorption reaction Methods 0.000 claims description 139
- 239000012535 impurity Substances 0.000 claims description 76
- 238000000862 absorption spectrum Methods 0.000 claims description 75
- 238000005259 measurement Methods 0.000 claims description 43
- 239000004065 semiconductor Substances 0.000 claims description 36
- 238000004458 analytical method Methods 0.000 claims description 35
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims description 26
- VEXZGXHMUGYJMC-UHFFFAOYSA-N HCl Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 23
- 238000004566 IR spectroscopy Methods 0.000 claims description 23
- 229910000041 hydrogen chloride Inorganic materials 0.000 claims description 23
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 23
- 229910001868 water Inorganic materials 0.000 claims description 22
- 230000001678 irradiating Effects 0.000 claims description 6
- CPELXLSAUQHCOX-UHFFFAOYSA-N hydrogen bromide Chemical compound Br CPELXLSAUQHCOX-UHFFFAOYSA-N 0.000 claims description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N HF Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 3
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims description 3
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical compound I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 claims description 3
- 229910000043 hydrogen iodide Inorganic materials 0.000 claims description 3
- RBFQJDQYXXHULB-UHFFFAOYSA-N Arsine Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 claims description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims description 2
- 229910000042 hydrogen bromide Inorganic materials 0.000 claims description 2
- 230000031700 light absorption Effects 0.000 claims description 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 claims description 2
- 229910000073 phosphorus hydride Inorganic materials 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims 1
- 150000002736 metal compounds Chemical class 0.000 claims 1
- -1 trichlorsilane Chemical compound 0.000 claims 1
- 238000001228 spectrum Methods 0.000 description 45
- 230000035945 sensitivity Effects 0.000 description 14
- 239000000463 material Substances 0.000 description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 11
- 238000011002 quantification Methods 0.000 description 10
- 238000004164 analytical calibration Methods 0.000 description 8
- 238000011088 calibration curve Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 5
- 229910001873 dinitrogen Inorganic materials 0.000 description 5
- 238000010494 dissociation reaction Methods 0.000 description 5
- 230000005593 dissociations Effects 0.000 description 5
- 238000005755 formation reaction Methods 0.000 description 5
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 230000000051 modifying Effects 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 3
- 238000011065 in-situ storage Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000010408 sweeping Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000002452 interceptive Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003287 optical Effects 0.000 description 2
- 238000004886 process control Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- RMHMFHUVIITRHF-UHFFFAOYSA-N Pirenzepine Chemical compound C1CN(C)CCN1CC(=O)N1C2=NC=CC=C2NC(=O)C2=CC=CC=C21 RMHMFHUVIITRHF-UHFFFAOYSA-N 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 125000004429 atoms Chemical group 0.000 description 1
- 238000005352 clarification Methods 0.000 description 1
- 230000000875 corresponding Effects 0.000 description 1
- 230000001419 dependent Effects 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
- 230000001360 synchronised Effects 0.000 description 1
- 238000004457 water analysis Methods 0.000 description 1
Family
ID=
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