JP2570756Y2 - 縦型ｃｖｄ・拡散装置 - Google Patents

縦型ｃｖｄ・拡散装置

Info

Publication number
JP2570756Y2
JP2570756Y2 JP1988017237U JP1723788U JP2570756Y2 JP 2570756 Y2 JP2570756 Y2 JP 2570756Y2 JP 1988017237 U JP1988017237 U JP 1988017237U JP 1723788 U JP1723788 U JP 1723788U JP 2570756 Y2 JP2570756 Y2 JP 2570756Y2
Authority
JP
Japan
Prior art keywords
cassette
wafer
boat
reaction chamber
furnace port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988017237U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01121923U (enrdf_load_stackoverflow
Inventor
利一 狩野
昭一郎 泉
康博 原田
幸二 遠目塚
Original Assignee
国際電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 国際電気株式会社 filed Critical 国際電気株式会社
Priority to JP1988017237U priority Critical patent/JP2570756Y2/ja
Publication of JPH01121923U publication Critical patent/JPH01121923U/ja
Application granted granted Critical
Publication of JP2570756Y2 publication Critical patent/JP2570756Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Chemical Vapour Deposition (AREA)
JP1988017237U 1988-02-12 1988-02-12 縦型ｃｖｄ・拡散装置 Expired - Lifetime JP2570756Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988017237U JP2570756Y2 (ja) 1988-02-12 1988-02-12 縦型ｃｖｄ・拡散装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988017237U JP2570756Y2 (ja) 1988-02-12 1988-02-12 縦型ｃｖｄ・拡散装置

Publications (2)

Publication Number Publication Date
JPH01121923U JPH01121923U (enrdf_load_stackoverflow) 1989-08-18
JP2570756Y2 true JP2570756Y2 (ja) 1998-05-13

Family

ID=31230840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988017237U Expired - Lifetime JP2570756Y2 (ja) 1988-02-12 1988-02-12 縦型ｃｖｄ・拡散装置

Country Status (1)

Country Link
JP (1) JP2570756Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0797564B2 (ja) * 1990-02-21 1995-10-18 国際電気株式会社 縦型半導体製造装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5945219B2 (ja) * 1976-05-17 1984-11-05 株式会社日立製作所 ウェハ処理装置
US4770590A (en) * 1986-05-16 1988-09-13 Silicon Valley Group, Inc. Method and apparatus for transferring wafers between cassettes and a boat

Also Published As

Publication number Publication date
JPH01121923U (enrdf_load_stackoverflow) 1989-08-18

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