JP2547950Y2 - 厚膜圧力センサ - Google Patents
厚膜圧力センサInfo
- Publication number
- JP2547950Y2 JP2547950Y2 JP1990088545U JP8854590U JP2547950Y2 JP 2547950 Y2 JP2547950 Y2 JP 2547950Y2 JP 1990088545 U JP1990088545 U JP 1990088545U JP 8854590 U JP8854590 U JP 8854590U JP 2547950 Y2 JP2547950 Y2 JP 2547950Y2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- zirconia substrate
- pedestal
- substrate
- zirconia
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 84
- 239000000758 substrate Substances 0.000 claims description 43
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 21
- 239000010408 film Substances 0.000 description 14
- 239000004065 semiconductor Substances 0.000 description 9
- 239000000919 ceramic Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 230000035882 stress Effects 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 239000007789 gas Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000010304 firing Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000010705 motor oil Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000006355 external stress Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990088545U JP2547950Y2 (ja) | 1990-08-24 | 1990-08-24 | 厚膜圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990088545U JP2547950Y2 (ja) | 1990-08-24 | 1990-08-24 | 厚膜圧力センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0447641U JPH0447641U (enrdf_load_stackoverflow) | 1992-04-22 |
| JP2547950Y2 true JP2547950Y2 (ja) | 1997-09-17 |
Family
ID=31821848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990088545U Expired - Fee Related JP2547950Y2 (ja) | 1990-08-24 | 1990-08-24 | 厚膜圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2547950Y2 (enrdf_load_stackoverflow) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6079242A (ja) * | 1983-10-07 | 1985-05-07 | Hitachi Ltd | 圧力変換器 |
| JPS60185129A (ja) * | 1984-03-03 | 1985-09-20 | Aisin Seiki Co Ltd | 圧力センサ |
| JPS60253280A (ja) * | 1984-05-29 | 1985-12-13 | Omron Tateisi Electronics Co | 半導体圧力センサ |
| JPS6421331A (en) * | 1987-07-17 | 1989-01-24 | Jgc Corp | Pressure sensor |
-
1990
- 1990-08-24 JP JP1990088545U patent/JP2547950Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0447641U (enrdf_load_stackoverflow) | 1992-04-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |