JP2546174Y2 - 複合真空ポンプ - Google Patents

複合真空ポンプ

Info

Publication number
JP2546174Y2
JP2546174Y2 JP1988037680U JP3768088U JP2546174Y2 JP 2546174 Y2 JP2546174 Y2 JP 2546174Y2 JP 1988037680 U JP1988037680 U JP 1988037680U JP 3768088 U JP3768088 U JP 3768088U JP 2546174 Y2 JP2546174 Y2 JP 2546174Y2
Authority
JP
Japan
Prior art keywords
disk
stationary
thrust
compression pump
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988037680U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01142594U (enExample
Inventor
聡 秦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP1988037680U priority Critical patent/JP2546174Y2/ja
Publication of JPH01142594U publication Critical patent/JPH01142594U/ja
Application granted granted Critical
Publication of JP2546174Y2 publication Critical patent/JP2546174Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP1988037680U 1988-03-24 1988-03-24 複合真空ポンプ Expired - Lifetime JP2546174Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988037680U JP2546174Y2 (ja) 1988-03-24 1988-03-24 複合真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988037680U JP2546174Y2 (ja) 1988-03-24 1988-03-24 複合真空ポンプ

Publications (2)

Publication Number Publication Date
JPH01142594U JPH01142594U (enExample) 1989-09-29
JP2546174Y2 true JP2546174Y2 (ja) 1997-08-27

Family

ID=31264257

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988037680U Expired - Lifetime JP2546174Y2 (ja) 1988-03-24 1988-03-24 複合真空ポンプ

Country Status (1)

Country Link
JP (1) JP2546174Y2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5344849B2 (ja) * 2008-04-17 2013-11-20 株式会社荏原製作所 ターボ型真空ポンプ
EP2108844A3 (en) 2008-03-26 2013-09-18 Ebara Corporation Turbo vacuum pump
JP2009235923A (ja) * 2008-03-26 2009-10-15 Ebara Corp ターボ型真空ポンプ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4376070A (en) * 1980-06-25 1983-03-08 Westinghouse Electric Corp. Containment of nuclear waste
JPS60204997A (ja) * 1984-03-28 1985-10-16 Osaka Shinku Kiki Seisakusho:Kk 複合真空ポンプ
JPS61185696A (ja) * 1985-02-13 1986-08-19 Hitachi Ltd 分子ポンプ
JPS6229796A (ja) * 1985-07-31 1987-02-07 Hitachi Ltd 真空ポンプ
JPH01167495A (ja) * 1987-12-23 1989-07-03 Hitachi Ltd 真空ポンプ
JPH0786357B2 (ja) * 1988-07-08 1995-09-20 株式会社荏原製作所 オイルフリー型真空ポンプ

Also Published As

Publication number Publication date
JPH01142594U (enExample) 1989-09-29

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