JP2543738Y2 - Ｃｖｄ装置におけるエアク−ラの取り付け構造 - Google Patents
Ｃｖｄ装置におけるエアク−ラの取り付け構造Info
- Publication number
- JP2543738Y2 JP2543738Y2 JP40525690U JP40525690U JP2543738Y2 JP 2543738 Y2 JP2543738 Y2 JP 2543738Y2 JP 40525690 U JP40525690 U JP 40525690U JP 40525690 U JP40525690 U JP 40525690U JP 2543738 Y2 JP2543738 Y2 JP 2543738Y2
- Authority
- JP
- Japan
- Prior art keywords
- air cooler
- lower cover
- frame
- cvd apparatus
- upper cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims 1
- 239000002516 radical scavenger Substances 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Furnace Housings, Linings, Walls, And Ceilings (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP40525690U JP2543738Y2 (ja) | 1990-12-28 | 1990-12-28 | Ｃｖｄ装置におけるエアク−ラの取り付け構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP40525690U JP2543738Y2 (ja) | 1990-12-28 | 1990-12-28 | Ｃｖｄ装置におけるエアク−ラの取り付け構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0492629U JPH0492629U (OSRAM) | 1992-08-12 |
| JP2543738Y2 true JP2543738Y2 (ja) | 1997-08-13 |
Family
ID=31882727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP40525690U Expired - Lifetime JP2543738Y2 (ja) | 1990-12-28 | 1990-12-28 | Ｃｖｄ装置におけるエアク−ラの取り付け構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2543738Y2 (OSRAM) |
-
1990
- 1990-12-28 JP JP40525690U patent/JP2543738Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0492629U (OSRAM) | 1992-08-12 |
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