JP2540555Y2 - 洗浄槽 - Google Patents

洗浄槽

Info

Publication number
JP2540555Y2
JP2540555Y2 JP1990121208U JP12120890U JP2540555Y2 JP 2540555 Y2 JP2540555 Y2 JP 2540555Y2 JP 1990121208 U JP1990121208 U JP 1990121208U JP 12120890 U JP12120890 U JP 12120890U JP 2540555 Y2 JP2540555 Y2 JP 2540555Y2
Authority
JP
Japan
Prior art keywords
cleaning tank
hole
quartz
tank
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990121208U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0479423U (enExample
Inventor
篤泰 朝香
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kaijo Corp
Original Assignee
Kaijo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kaijo Corp filed Critical Kaijo Corp
Priority to JP1990121208U priority Critical patent/JP2540555Y2/ja
Publication of JPH0479423U publication Critical patent/JPH0479423U/ja
Application granted granted Critical
Publication of JP2540555Y2 publication Critical patent/JP2540555Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
JP1990121208U 1990-11-21 1990-11-21 洗浄槽 Expired - Lifetime JP2540555Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990121208U JP2540555Y2 (ja) 1990-11-21 1990-11-21 洗浄槽

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990121208U JP2540555Y2 (ja) 1990-11-21 1990-11-21 洗浄槽

Publications (2)

Publication Number Publication Date
JPH0479423U JPH0479423U (enExample) 1992-07-10
JP2540555Y2 true JP2540555Y2 (ja) 1997-07-09

Family

ID=31869079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990121208U Expired - Lifetime JP2540555Y2 (ja) 1990-11-21 1990-11-21 洗浄槽

Country Status (1)

Country Link
JP (1) JP2540555Y2 (enExample)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5665642U (enExample) * 1979-10-24 1981-06-01
JPS6382723U (enExample) * 1986-11-18 1988-05-31
JPH0331174Y2 (enExample) * 1987-04-27 1991-07-02
JPH0195521A (ja) * 1987-10-07 1989-04-13 Hitachi Ltd 洗浄方法および装置

Also Published As

Publication number Publication date
JPH0479423U (enExample) 1992-07-10

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