JP2533551Y2 - 半導体ウエハ保持治具 - Google Patents

半導体ウエハ保持治具

Info

Publication number
JP2533551Y2
JP2533551Y2 JP1988111223U JP11122388U JP2533551Y2 JP 2533551 Y2 JP2533551 Y2 JP 2533551Y2 JP 1988111223 U JP1988111223 U JP 1988111223U JP 11122388 U JP11122388 U JP 11122388U JP 2533551 Y2 JP2533551 Y2 JP 2533551Y2
Authority
JP
Japan
Prior art keywords
wafer
holding
wall
semiconductor wafer
holding groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988111223U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0233427U (enExample
Inventor
博至 木村
Original Assignee
信越石英 株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 信越石英 株式会社 filed Critical 信越石英 株式会社
Priority to JP1988111223U priority Critical patent/JP2533551Y2/ja
Publication of JPH0233427U publication Critical patent/JPH0233427U/ja
Application granted granted Critical
Publication of JP2533551Y2 publication Critical patent/JP2533551Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988111223U 1988-08-26 1988-08-26 半導体ウエハ保持治具 Expired - Lifetime JP2533551Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988111223U JP2533551Y2 (ja) 1988-08-26 1988-08-26 半導体ウエハ保持治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988111223U JP2533551Y2 (ja) 1988-08-26 1988-08-26 半導体ウエハ保持治具

Publications (2)

Publication Number Publication Date
JPH0233427U JPH0233427U (enExample) 1990-03-02
JP2533551Y2 true JP2533551Y2 (ja) 1997-04-23

Family

ID=31349086

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988111223U Expired - Lifetime JP2533551Y2 (ja) 1988-08-26 1988-08-26 半導体ウエハ保持治具

Country Status (1)

Country Link
JP (1) JP2533551Y2 (enExample)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS516664A (enExample) * 1974-07-05 1976-01-20 Hitachi Ltd
JPS51161071U (enExample) * 1975-06-16 1976-12-22
JPS62201928U (enExample) * 1986-06-13 1987-12-23

Also Published As

Publication number Publication date
JPH0233427U (enExample) 1990-03-02

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