JP2529173Y2 - エキソ電子顕微鏡 - Google Patents

エキソ電子顕微鏡

Info

Publication number
JP2529173Y2
JP2529173Y2 JP1990007678U JP767890U JP2529173Y2 JP 2529173 Y2 JP2529173 Y2 JP 2529173Y2 JP 1990007678 U JP1990007678 U JP 1990007678U JP 767890 U JP767890 U JP 767890U JP 2529173 Y2 JP2529173 Y2 JP 2529173Y2
Authority
JP
Japan
Prior art keywords
sample
exo
electron microscope
vacuum chamber
gear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990007678U
Other languages
English (en)
Japanese (ja)
Other versions
JPH03100351U (enrdf_load_stackoverflow
Inventor
純 堀川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1990007678U priority Critical patent/JP2529173Y2/ja
Publication of JPH03100351U publication Critical patent/JPH03100351U/ja
Application granted granted Critical
Publication of JP2529173Y2 publication Critical patent/JP2529173Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP1990007678U 1990-01-30 1990-01-30 エキソ電子顕微鏡 Expired - Lifetime JP2529173Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990007678U JP2529173Y2 (ja) 1990-01-30 1990-01-30 エキソ電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990007678U JP2529173Y2 (ja) 1990-01-30 1990-01-30 エキソ電子顕微鏡

Publications (2)

Publication Number Publication Date
JPH03100351U JPH03100351U (enrdf_load_stackoverflow) 1991-10-21
JP2529173Y2 true JP2529173Y2 (ja) 1997-03-19

Family

ID=31511333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990007678U Expired - Lifetime JP2529173Y2 (ja) 1990-01-30 1990-01-30 エキソ電子顕微鏡

Country Status (1)

Country Link
JP (1) JP2529173Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55159143A (en) * 1979-05-31 1980-12-11 Agency Of Ind Science & Technol Metal surface flaw detector
JPS60105056U (ja) * 1983-12-22 1985-07-17 日本電子株式会社 走査電子顕微鏡等における試料装置

Also Published As

Publication number Publication date
JPH03100351U (enrdf_load_stackoverflow) 1991-10-21

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