JP2529173Y2 - Exo electron microscope - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION A. Industrial Field of the Invention The present invention relates to an oxo-electron microscope for observing a damaged state of a material surface according to the intensity of exo-electrons emitted from a new surface of the material.

B. Prior Art FIG. 5 is a schematic configuration diagram of a conventionally known exo-electron microscope. The exo-electron microscope basically has a structure in which an optical device for exo-electron excitation and a visualizing mechanism are incorporated in a well-known scanning electron microscope, and the electron gun 10a and the electron beam emitted from the electron gun 10a A scanning electron microscope 10 comprising a focusing lens 10b arranged along the optical axis, an electron beam scanning deflection coil 10c, and an objective lens 10d, and a reflecting mirror 11 provided directly below the electron gun 10a so as to be rotatable in the direction of the arrow. An electron detector 12 for detecting secondary electrons emitted from the sample TP, and a sample
UV light irradiation device 13 that excites exo electrons to TP, and sample
A CRT 14 for observing the electron image of the TP, and a scanning signal generating circuit 15 for synchronizing the scanning of the electron beam on the sample TP with the scanning on the CRT.
And an amplifier 16 for amplifying a detection signal from the detector 12, and an image intensifier 17 that is disposed directly below the reflecting mirror 11 so as to be rotatable in the direction of the arrow and visualizes an image formed by exo electrons.
And

When the exo-electron microscope configured as described above is operated in the EXO mode, the scanning electron microscope 10 is stopped, and the reflecting mirror 11 and the image intensifier 17 are irradiated with the electron beam as shown in FIG. Ultraviolet light irradiation device inserted into shaft
The sample surface is irradiated with ultraviolet light from step 13. The exoelectrons generated from the sample surface by the irradiation of the ultraviolet light are accelerated upward along the optical axis by the negative acceleration voltage applied to the sample TP, and are enlarged by the lens groups 10b and 10d to the image intensifier 17. Incident light is visualized on the phosphor screen. By observing this visualized image from the observation window of the lens barrel, the state of the sample surface can be known.

C. Problems to be Solved by the Invention However, in the conventional exo-electron microscope as described above, a sample whose surface has been previously scratched outside the vacuum chamber is installed and observed in the vacuum chamber. Could not be observed in real time.

The technical problem of the present invention is to observe the state of a defect in a sample in real time.

D. Means for Solving the Problems The present invention is based on a light source that irradiates the surface of a sample installed in a vacuum chamber with light for exo-electron excitation, and exo-electrons excited from the sample surface by this light irradiation. And applied to an oxo-electron microscope provided with a visualizing means for visualizing the sample surface.

A first gear that slides on a first rotating shaft that extends from the outside of the vacuum chamber and extends in the horizontal direction; a first gear that holds the sample horizontally in the vacuum chamber and is rotatable in a horizontal plane; A sample holder that can move horizontally in the axial direction, a second rotation shaft that is connected to the sample holder, and extends in the vertical direction, and a second rotation shaft that meshes with the first gear and rotates together with the second rotation shaft. A gear and an indenter that presses the sample surface held by the sample holder and scratches the sample surface by rotating the sample by a motor,
A linear moving mechanism for moving the sample holder in the horizontal direction along the first rotation axis.

E. Action When the sample holder is rotated while the indenter is pressed against the sample,
A scratch, ie, a new surface, can be created on the surface of the sample while being installed in the vacuum chamber, and the sample can be observed in real time. When the sample holder is moved along the first rotation axis by the linear movement mechanism and the sample holder is rotated again, a scratch can be created in a place different from the one previously attached. Further, the observation area of the exo-electron microscope can be changed by the linear moving mechanism.

F. Embodiment Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

1 to 4 show details of the inside of the sample chamber of the exo-electron microscope, and the same parts as those in FIG. 5 are denoted by the same reference numerals.

Inside the case 21, there is a vacuum chamber 21a in which the sample TP is installed.
Is formed. A motor 22 is provided on an outer wall of the case 21 and a support stand 23 is provided on an inner wall thereof. Output shaft 22 of motor 22
a (first rotating shaft) is inserted horizontally into the vacuum chamber 21a, and its tip is supported by a bearing 24 installed on a support 23.
The cross-sectional shape of the central portion 22a1 of the output shaft 22a is quadrangular, and the outer peripheral surface thereof is covered with a bush 25 so as to be slidable in the axial direction.
The bush 25 is screwed to the helical gear 26. One end of the bush 25 is rotatably supported by a roller bearing of a bearing 51 attached to the support base 28, and one end surface of the helical gear 26 is in contact with a ball bearing of the bearing 51 to maintain the thrust force. Thus, the helical gear 26 is provided so as to be rotatable integrally with the shaft 22a and to be horizontally movable in the axial direction. When the helical gear 26 moves in the direction away from the motor 22 during the axial movement, the helical gear 26 is pushed by the bearing 51 and the motor 22
When approaching the helical gear, stop mechanism (not shown)
26 can move with a slider 28.

On the other hand, a guide rail 27 extending in the direction of the output shaft 22a is installed on the support base 23, and a slider 28 is mounted on the guide rail 27.
Is movably mounted. A shaft 30 (second rotating shaft) is supported by a bearing 29 at the center of the slider 28, and a second helical gear 31 meshing with the first helical gear 26 is fixed to a lower end of the shaft 30. ing. At the upper end of the shaft 30, a sample holder 33 is provided via an insulating joint 32. A plate 34 is placed on the sample holder 33, and a sample TP is placed on the plate 34, and is fixed by a holder 35. The plate 34 is inserted in order to set the distance between the objective lens 10d (see FIG. 5) and the sample surface, that is, the working distance to a predetermined value, but when the working distance cannot be adjusted only by the thickness of the plate 34, , Height adjustment screw 36
Can be adjusted by screwing in and out.

An operating tool 38 for rotating a screw rod 37 traversing the inside of the case 21 is attached to the outer wall of the case 21, and the screw rod 37 is screwed to a nut 39 fixed on the slider 28. Therefore, the screw rod is
When the 37 is rotated, the slider 28 moves on the guide rail 27. A spring 40 is stretched between the slider 27 and the support 23 to eliminate backlash between the screw rod 37 and the nut 39.

Furthermore, a bracket 41 provided on the inner wall of the case 21
An indenter 43 is axially supported at the tip of the
At the other end of 43, a weight 45 is axially mounted via a similar insulating joint 44, and a moment load about the connection point 41X with the bracket 41 acts on the sample TP from the indenter 43, and is applied to the surface of the sample TP. It is possible to create a wound.

As shown in FIG. 4, a fixed contact 47 is mounted on the slider 28 via an insulating stand 46, and the fixed contact 47 is in contact with a rotary contact 33a on the bottom surface of the sample holder 33.
The fixed contact 47 is connected via a cable 48 to a power supply installed outside the case 21.

Further, the case 21 is provided with a well-known secondary electron detector 12 and an ultraviolet light irradiator 13 whose tips are inserted into a vacuum chamber.

 Next, the operation will be described.

First, when observing the sample in the EXO mode,
Then, the image intensifier 1 is inserted into the optical axis as shown in FIG. The plate 34 is placed on the sample holder 33, and the sample TP is placed thereon. Next, the height adjusting screw 36 is advanced and retracted so that a predetermined working distance is obtained, and the holder 35 is fixed with the screw 35A to complete the setting of the sample TP. Further, the indenter 43 is pressed against the sample surface by the weight 45. Thereafter, the vacuum chamber 21a is evacuated to a predetermined degree of vacuum, the motor 22 is rotated, and a circular scratch 52 is formed on the sample surface by the indenter 43. FIG. 1 shows this state.

A negative acceleration voltage is applied to the sample TP via the rotary contact 33a, the fixed contact 47, and the cable 48, and the ultraviolet light irradiation device 13 irradiates the sample surface with ultraviolet light. At this time, the exo-electrons generated from the sample surface are accelerated upward on the anode side, that is, incident on the image intensifier 17, and the image visualized on the fluorescent plate can be observed from the observation window.

When observing the condition of a scratch or a defect in another portion while the sample TP is placed in the vacuum chamber 21a, the operating tool 38 is rotated to move the slider 28 in the left-right direction in FIG. As the sample holder 33 moves on the guide rail 27 while holding the sample TP, the second helical gear 31 also moves. Since the first helical gear 26 meshing with the first helical gear 26 is slidably supported on the motor output shaft 22a1 having a square cross section, when the second helical gear 31 is moved by the movement of the slider 28, the first helical gear is moved. 26 moves on the motor output shaft 22a1. Thereafter, when the motor 22 is driven again, circular indentations having different radii are newly formed on the sample surface by the indenter 43, and exoelectrons are excited from the newly formed surface by irradiation with ultraviolet light, and can be observed similarly.

In this embodiment, since the motor 22 is installed outside the vacuum chamber, the influence of the magnetic field of the motor 22 on the excited exoelectrons is suppressed. Further, when the motor 22 is provided in the vacuum chamber, lubricating oil and the like in the motor are vaporized and the degree of vacuum is reduced, but there is no danger by providing the motor 22 outside the vacuum chamber 21a.

When observing in the SEM mode, the reflecting mirror 11 and the image intensifier 17 are retracted from the axis of the electron gun 10a, and electrons are projected from the electron gun 10a onto the sample to detect secondary electrons from the sample surface. The image is detected by the detector 12 and is imaged on the CRT 14 by a known method.

Although the case where the exo-electron microscope is incorporated in the scanning electron microscope has been described above, the present invention can be applied to a single-electron microscope. In the EXO mode, the image is visualized by the image intensifier. However, the present invention may be applied to a scanning exo-electron microscope that visualizes ultraviolet light irradiation in synchronization with scanning of an electron beam of a CRT. Further, a rotary shaft that holds the first helical gear 26 so as to be rotatable and slidable may be provided horizontally in the vacuum chamber 21a, and the rotary shaft may be rotated from outside the vacuum chamber 21a. . It is sufficient that the rotary shaft holding the first helical gear 26 extends horizontally, and the transmission shaft that applies a rotational force to the rotary shaft from outside the vacuum chamber does not need to extend in the horizontal direction. Furthermore, the present invention is not limited to other configurations of the embodiment.

G. Effects of the Invention As described above, according to the present invention, since a flaw is formed by the indenter while the sample is placed in the vacuum chamber, a flaw or the like where the new surface is exposed can be observed in real time. Also, the first gear that rotates integrally with the first rotation shaft extending in the horizontal direction is slidable on the first rotation shaft,
The support shaft (second rotation shaft) of the sample holder is rotated by the second gear that obtains the transmission force from the gear, and the sample holder is moved to the first rotation shaft while the first and second gears are engaged. , It is easy to change the location of the scratch on the sample surface and the observation area, and it is possible to provide an exo-electron microscope with good operability.

[Brief description of the drawings]

1 to 4 illustrate an embodiment of the present invention.
FIG. 1 is a perspective view showing details of a sample moving mechanism, FIG. 2 is a plan view showing a sample chamber of an exo-electron microscope, and FIG.
FIG. 4 is a sectional view taken along the line III-III, FIG. 4 is a sectional view taken along the line IV-IV, and FIG. 5 is a schematic configuration diagram of a conventionally known exo-electron microscope. 10: Scanning electron microscope, 10a: Electron gun 10b: Focusing lens, 10c: Deflection coil 10d: Objective lens, 11: Reflector mirror 12: Electron detector, 13: Ultraviolet light irradiation device 14: CRT, 15: Scan signal generation Circuit 16: Amplifier, 17: Image intensifier 21: Case, 21a: Vacuum chamber 22: Motor, 22a: Output shaft (first rotating shaft) 26: First helical gear, 27: Guide rail 28: Slider, 30: shaft (second rotating shaft) 31: second helical gear, 32: insulating joint 33: sample holder, 34: plate 37: screw rod, 38: operating tool 43: indenter, 45: weight 52: Scar

Claims (1)

(57) [Scope of request for utility model registration] 1. A light source for irradiating exo-electron excitation light to a surface of a sample placed in a vacuum chamber, and a visualization means for visualizing the sample surface based on exo-electrons excited from the sample surface by the irradiation of the light. An exo-electron microscope comprising: a first gear that slides on a first rotation axis that extends in a horizontal direction and that is rotated from outside the vacuum chamber; and that holds the sample horizontally in the vacuum chamber. A sample holder rotatable in a horizontal plane and horizontally movable in the direction of the first rotation axis;
A second rotating shaft connected to the sample holder and extending in the vertical direction, a second gear meshing with the first gear and rotating with the second rotating shaft, and held by the sample holder. An indenter that presses the sample surface being pressed and damages the sample surface by rotation of the sample by a motor, and a linear movement mechanism that horizontally moves the sample holder along the first rotation axis. An exo-electron microscope characterized by: