JP2526071Y2 - 回転塗布装置の回転吸着ヘッド - Google Patents

回転塗布装置の回転吸着ヘッド

Info

Publication number
JP2526071Y2
JP2526071Y2 JP9751790U JP9751790U JP2526071Y2 JP 2526071 Y2 JP2526071 Y2 JP 2526071Y2 JP 9751790 U JP9751790 U JP 9751790U JP 9751790 U JP9751790 U JP 9751790U JP 2526071 Y2 JP2526071 Y2 JP 2526071Y2
Authority
JP
Japan
Prior art keywords
substrate
rotary
suction
suction head
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP9751790U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0457278U (enrdf_load_stackoverflow
Inventor
寿彦 森
治朗 泉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Casio Computer Co Ltd
Original Assignee
Casio Computer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Casio Computer Co Ltd filed Critical Casio Computer Co Ltd
Priority to JP9751790U priority Critical patent/JP2526071Y2/ja
Publication of JPH0457278U publication Critical patent/JPH0457278U/ja
Application granted granted Critical
Publication of JP2526071Y2 publication Critical patent/JP2526071Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Coating Apparatus (AREA)
JP9751790U 1990-09-19 1990-09-19 回転塗布装置の回転吸着ヘッド Expired - Lifetime JP2526071Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9751790U JP2526071Y2 (ja) 1990-09-19 1990-09-19 回転塗布装置の回転吸着ヘッド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9751790U JP2526071Y2 (ja) 1990-09-19 1990-09-19 回転塗布装置の回転吸着ヘッド

Publications (2)

Publication Number Publication Date
JPH0457278U JPH0457278U (enrdf_load_stackoverflow) 1992-05-15
JP2526071Y2 true JP2526071Y2 (ja) 1997-02-12

Family

ID=31837955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9751790U Expired - Lifetime JP2526071Y2 (ja) 1990-09-19 1990-09-19 回転塗布装置の回転吸着ヘッド

Country Status (1)

Country Link
JP (1) JP2526071Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0457278U (enrdf_load_stackoverflow) 1992-05-15

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