JP2524697Y2 - 回転式基板処理装置の排気連通装置 - Google Patents
回転式基板処理装置の排気連通装置Info
- Publication number
- JP2524697Y2 JP2524697Y2 JP10538390U JP10538390U JP2524697Y2 JP 2524697 Y2 JP2524697 Y2 JP 2524697Y2 JP 10538390 U JP10538390 U JP 10538390U JP 10538390 U JP10538390 U JP 10538390U JP 2524697 Y2 JP2524697 Y2 JP 2524697Y2
- Authority
- JP
- Japan
- Prior art keywords
- exhaust
- spin cup
- forced
- exhaust pipe
- cup
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004891 communication Methods 0.000 title claims description 29
- 239000000758 substrate Substances 0.000 title claims description 28
- 238000012545 processing Methods 0.000 title claims description 20
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 230000001174 ascending effect Effects 0.000 claims description 2
- 239000007788 liquid Substances 0.000 description 10
- 101100327917 Caenorhabditis elegans chup-1 gene Proteins 0.000 description 9
- 239000003595 mist Substances 0.000 description 9
- 238000012423 maintenance Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000003670 easy-to-clean Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10538390U JP2524697Y2 (ja) | 1990-10-05 | 1990-10-05 | 回転式基板処理装置の排気連通装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10538390U JP2524697Y2 (ja) | 1990-10-05 | 1990-10-05 | 回転式基板処理装置の排気連通装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0461351U JPH0461351U (enrdf_load_stackoverflow) | 1992-05-26 |
| JP2524697Y2 true JP2524697Y2 (ja) | 1997-02-05 |
Family
ID=31851046
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10538390U Expired - Lifetime JP2524697Y2 (ja) | 1990-10-05 | 1990-10-05 | 回転式基板処理装置の排気連通装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2524697Y2 (enrdf_load_stackoverflow) |
-
1990
- 1990-10-05 JP JP10538390U patent/JP2524697Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0461351U (enrdf_load_stackoverflow) | 1992-05-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |