JP2523690Y2 - 基板の熱処理装置 - Google Patents

基板の熱処理装置

Info

Publication number
JP2523690Y2
JP2523690Y2 JP10063490U JP10063490U JP2523690Y2 JP 2523690 Y2 JP2523690 Y2 JP 2523690Y2 JP 10063490 U JP10063490 U JP 10063490U JP 10063490 U JP10063490 U JP 10063490U JP 2523690 Y2 JP2523690 Y2 JP 2523690Y2
Authority
JP
Japan
Prior art keywords
heat treatment
substrate
plate
chamber
cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP10063490U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0459132U (enrdf_load_stackoverflow
Inventor
英治 奥野
保夫 今西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP10063490U priority Critical patent/JP2523690Y2/ja
Publication of JPH0459132U publication Critical patent/JPH0459132U/ja
Application granted granted Critical
Publication of JP2523690Y2 publication Critical patent/JP2523690Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP10063490U 1990-09-25 1990-09-25 基板の熱処理装置 Expired - Lifetime JP2523690Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10063490U JP2523690Y2 (ja) 1990-09-25 1990-09-25 基板の熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10063490U JP2523690Y2 (ja) 1990-09-25 1990-09-25 基板の熱処理装置

Publications (2)

Publication Number Publication Date
JPH0459132U JPH0459132U (enrdf_load_stackoverflow) 1992-05-21
JP2523690Y2 true JP2523690Y2 (ja) 1997-01-29

Family

ID=31843420

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10063490U Expired - Lifetime JP2523690Y2 (ja) 1990-09-25 1990-09-25 基板の熱処理装置

Country Status (1)

Country Link
JP (1) JP2523690Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0459132U (enrdf_load_stackoverflow) 1992-05-21

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