JP2523340B2 - Paste coating device for pellet bonding - Google Patents

Abstract

PURPOSE:To effectively and easily set a gap between a substrate and a discharge nozzle at the time of coating with paste by setting the position of the nozzle as a nozzle zero point in a state that the contact state of the substrate with the nozzle is detected. CONSTITUTION:A state that a discharge nozzle 7 is brought in contact with a substrate 6 is detected by contact detecting means 3, and the position of the nozzle 7 at the time of detecting with the means 3 is set (stored) as a nozzle zero point in nozzle zero point setting means 4. Accordingly, a nozzle driver 1 can effectively and easily grasp the relative position of the nozzle 7 with respect to the substrate 6 on the basis of set data of nozzle operation setting means 2. Thus, the gap between the substrate 6 and the nozzle 7 can be effectively and easily set at the time of coating with paste.

Description

Description: FIELD OF THE INVENTION The present invention relates to a pellet bonding paste coating apparatus suitable for bonding pellets such as semiconductor parts and ceramic parts to a substrate.

[Prior Art] In a paste coating apparatus for manufacturing electronic parts,
The pellet bonding paste (adhesive) discharge nozzle is moved toward / away from the substrate (lead frame), and the paste discharged from the discharge nozzle is applied onto the substrate.
A semiconductor pellet is bonded onto the paste.

Here, in order to ensure the bonding quality of the pellet to the substrate, it is not appropriate that bubbles remain in the paste or the distribution of the paste is uneven. Need to stabilize. In order to stabilize the paste application state on the substrate in this way, when the discharge nozzle is closest to the substrate, the gap between the substrate and the discharge nozzle is kept at an optimum value to stabilize the paste application state. There is a need to.

[Problems to be Solved by the Invention] However, in the conventional paste coating apparatus, the gap of the discharge nozzle with respect to the substrate is adjusted visually by an operator or by using a gap gauge. Therefore, there is a problem that the gap adjustment work is difficult and the result of the gap adjustment varies depending on the operator.

An object of the present invention is to reliably and easily grasp the relative position of the discharge nozzle with respect to the substrate, and to reliably and easily set the gap between the substrate and the discharge nozzle during paste application.

[Means for Solving Problems] FIG. 1 is a block diagram showing the overall configuration of the present invention.
The present invention provides a pellet bonding paste coating apparatus for coating a substrate with the paste discharged from the above-mentioned discharge nozzle, which comprises a nozzle driving device 1 for moving a pellet bonding paste discharge nozzle toward and away from the substrate. Nozzle operation setting means 2 for setting the operation content of the ejection nozzle driven by the nozzle driving device 1, contact detection means 3 for detecting the contact state between the substrate and the ejection nozzle, and contact detection means 3 for the substrate and the ejection nozzle. Nozzle zero point setting means 4 for setting the position of the discharge nozzle (see FIG. 2 (A)) as a nozzle zero point when the contact state is detected, setting data of the nozzle zero point setting means 4, and nozzle operation setting means 2 The nozzle driving device 1 is controlled based on the setting data of, for example, the gap H between the discharge nozzle and the substrate (see FIG. 2B).
Nozzle drive control means 5 for setting (see). In FIGS. 2A and 2B, 6 is a substrate, and 7 is
Is a discharge nozzle.

[Operation] According to the present invention, the discharge nozzle 7 is driven by the nozzle driving device 1.
And the discharge nozzle 7 is moved to the substrate 6 as shown in FIG. 2 (A).
The contact detection means 3 detects the state of contact with the contact detection means 3, and the position of the discharge nozzle 7 at the time of detection by the contact detection means 3 is set (stored) in the nozzle zero point setting means 4 as a nozzle zero point. As a result, when the nozzle drive device 1 applies the discharge nozzle 7 based on the setting data of the nozzle operation setting means 2, the nozzle drive control means 5 for controlling the nozzle drive device 1 controls the setting data of the nozzle zero point setting means 4. That is, the nozzle zero point as the contact position of the discharge nozzle 7 with respect to the substrate 6 can be used as a reference for the current or target operating position of the discharge nozzle 7. That is, the relative position of the discharge nozzle 7 with respect to the substrate 6 can be grasped surely and easily, and, for example, the gap between the substrate 6 and the discharge nozzle 7 can be surely and easily set at the time of applying the paste.

[Embodiment] FIG. 3 is a schematic diagram showing a paste coating apparatus according to one embodiment of the present invention, and FIG. 4 is a control block diagram showing one embodiment of the present invention.

A slide block 12 is slidably supported on a base 11 of the paste applying apparatus 10, a syringe holder 13 is coupled to the slide block 12, and a syringe 15 filled with a paste 14 is fixed to the syringe holder 13. It The syringe 15 is provided with a discharge nozzle 16 and is connected with an air pipe 17 for supplying air of a constant pressure.

The paste coating device 10 also includes a pulse motor (nozzle drive device) 18 and a microcomputer 19.

The pulse motor 18 drives the syringe holder 13 to move up and down so as to move the discharge nozzle 16 toward and away from the substrate 20. The microcomputer 19 controls the drive state of the pulse motor 18 and discharge nozzles as described in detail below.
Digitally control 16 operations (moving state).

The pulse motor 18 includes a feed screw 18A, toothed pulleys 18B, 18
With C, toothed belt 18D, nut 18E. That is,
The pulse motor 18 rotates the feed screw 18A,
The nut 18E screwed together is moved up and down, whereby the syringe holder 13 to which the nut 18E is attached is moved up and down. The pulse motor 18 rotates in reverse when the discharge nozzle 16 is switched between up and down.

The paste application device 10 includes a contact detection sensor (contact detection means) 21, and the contact detection sensor 21 detects the contact timing between the discharge nozzle 16 descending with respect to the substrate 20 and the substrate 20. In this embodiment, the discharge nozzle 16 and the substrate
A power supply 23 and a contact detection sensor 21 composed of a current detector are provided in series in an intermediate portion of a lead wire 22 extending between 20 and,
The contact detection sensor 21 detects the energized state when the discharge nozzle 16 and the substrate 20 are in contact with each other. Therefore, in this embodiment, the discharge nozzle 16 and the substrate 20 are made of a conductive material, and the syringe 15, which is a supporting member of the discharge nozzle 16, and the like,
Alternatively, it is necessary that at least one of the guide rails 24, etc., which is a supporting member of the substrate 20, be made of an electrically insulating material. However, in the practice of the present invention, the contact detection means may be configured in any other manner.

The microcomputer 19 has a CPU (central processing unit) 2
5, ROM (read only memory) 26, RAM (writable and readable memory) 27, input circuit 28, output circuit 29. The microcomputer 19 constitutes the nozzle operation setting means, the nozzle zero point setting means, and the nozzle drive control means in the present invention.

That is, the microcomputer 19 is a pulse motor
The content of operation of the discharge nozzle 16 driven by 18, such as the ascending end position, the descending end position, the descending speed and the ascending speed, is set in the ROM 26, and constitutes the nozzle operation setting means in the present invention.

Further, the microcomputer 19 has a contact detection sensor 21.
The position of the discharge nozzle 16 under the condition that the contact state between the substrate 20 and the discharge nozzle 16 is detected is set in the RAM 27 as the nozzle zero point, and constitutes the nozzle zero point setting means in the present invention.

Further, the microcomputer 19 uses the CPU 2 as the CPU 2 based on the zero point data of the discharge nozzle 16 set in the RAM 27 and the operation data of the discharge nozzle 16 set in the ROM 26.
The pulse motor 18 is controlled by 5 to constitute the nozzle drive control means in the present invention.

The paste applying apparatus 10 includes an origin sensor 30 that detects the rising end position of the syringe holder 13 and a sensor dog 31 that operates the origin sensor 30.

That is, in the paste coating device 10, the substrate
20 is carried by a lead frame carrying device (not shown),
When the positioning is stopped at the paste application position and the positioning completion signal is transferred to the microcomputer 19, the microcomputer 19 starts driving the pulse motor 18. The CPU 25 of the microcomputer 19 is the R
Pulse motor 18 based on the data defined in OM26 and RAM27
Is controlled, and the discharge nozzle 16 is lowered, stopped, and raised for one cycle to apply the paste to the substrate 20.
The microcomputer 19 transfers the ejection signal to a dispenser controller (not shown) while the ejection nozzle 16 is descending. As a result, the dispenser controller controls the magnitude of the pressure of the compressed air supplied to the syringe 15 by the air tube 17, the pressurizing time, and the paste application amount and the like.

 Next, the operation of the above embodiment will be described.

According to the above embodiment, the discharge nozzle is driven by the pulse motor 18.
16 is lowered and the state where the discharge nozzle 16 is in contact with the substrate 20 is detected by the contact detection sensor 21, and the position of the discharge nozzle 16 at the time of detection by the contact detection sensor 21 is set in the RAM 27 of the microcomputer 19 as a nozzle zero point. (Remember. Thus, when the pulse motor 18 applies the discharge nozzle 16 based on the setting data of the RAM 27, the CPU 25 of the microcomputer 19 that controls the pulse motor 18 sets the setting data of the RAM 27, that is, the substrate 20 of the discharge nozzle 16.
The nozzle zero point as the contact position for
Can be used as a reference for the current or target operating position of the. That is, the discharge nozzle 16 for the substrate 20
The relative position of can be grasped reliably and easily.

As a result, the discharge nozzle 16 can be lowered while accurately grasping the relative position of the discharge nozzle 16 with respect to the substrate 20, and the discharge nozzle 16 positioned at the lower end will be positioned.
A predetermined optimum gap can be reliably and easily formed between the substrate and the substrate 20.

Further, it is also possible to accurately determine that the discharge nozzle 16 has reached a certain height position with respect to the substrate 20 while the discharge nozzle 16 is descending, and to decelerate the descending speed of the discharge nozzle 16. The lowering operation of can be reliably and easily optimized.

Therefore, the descending operation of the discharge nozzle 16 is optimized according to the size of the pellet, the viscosity of the paste, etc., and thereby the paste application position is set stably, and as a result, the paste application amount and the application on the substrate 20 are performed. The shape can be stabilized.

In the implementation of the present invention, the nozzle driving device is not limited to the pulse motor, but may be one having another configuration such as a linear motor.

In the implementation of the present invention, the timing of setting the operation content of the discharge nozzle to the nozzle setting means may be before or after the timing of setting the nozzle zero point, or may be changed during the operation of the paste coating device. .

[Effects of the Invention] As described above, according to the present invention, the relative position of the discharge nozzle with respect to the substrate can be reliably and easily grasped, and the gap between the substrate and the discharge nozzle during paste application can be reliably and easily set. be able to.

[Brief description of drawings]

FIG. 1 is a block diagram showing the overall structure of the present invention, FIGS. 2 (A) and 2 (B) are schematic diagrams showing the relative positions of a discharge nozzle and a substrate, and FIG. 3 is a paste according to an embodiment of the present invention. FIG. 4 is a schematic diagram showing a coating device, and FIG. 4 is a control block diagram showing an embodiment of the present invention. 1 ... Nozzle drive device, 2 ... Nozzle operation setting means, 3 ... Contact detection means, 4 ... Nozzle zero point setting means, 5 ... Nozzle drive control means, 6 ... Substrate, 7 ... Discharge nozzle, 10 ...... Paste coating device, 16 …… Discharge nozzle, 18 …… Pulse motor (nozzle drive device), 19 …… Microcomputer, 20 …… Board, 21 …… Contact detection sensor (contact detection means).

Claims (1)

(57) [Claims] 1. A pellet bonding paste applying apparatus for applying a paste discharged from the discharging nozzle onto a substrate, comprising a nozzle drive device for moving a pellet bonding paste discharging nozzle toward and away from a substrate, Nozzle operation setting means for setting the operation content of the ejection nozzle driven by the nozzle drive device, contact detection means for detecting the contact state between the substrate and the ejection nozzle, and contact detection means for detecting the contact state between the substrate and the ejection nozzle Nozzle zero point setting means for setting the position of the discharge nozzle in this state as a nozzle zero point, and nozzle drive control means for controlling the nozzle drive device based on the setting data of the nozzle zero point setting means and the setting data of the nozzle operation setting means. A paste coating device for pellet bonding, comprising: