JP2521257Y2 - 自公転治具付蒸着装置 - Google Patents

自公転治具付蒸着装置

Info

Publication number
JP2521257Y2
JP2521257Y2 JP1990084377U JP8437790U JP2521257Y2 JP 2521257 Y2 JP2521257 Y2 JP 2521257Y2 JP 1990084377 U JP1990084377 U JP 1990084377U JP 8437790 U JP8437790 U JP 8437790U JP 2521257 Y2 JP2521257 Y2 JP 2521257Y2
Authority
JP
Japan
Prior art keywords
vapor deposition
rotation
rotation shaft
revolution
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990084377U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0444358U (enrdf_load_stackoverflow
Inventor
弘毅 国井
利貞 関口
Original Assignee
株式会社コパル
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社コパル filed Critical 株式会社コパル
Priority to JP1990084377U priority Critical patent/JP2521257Y2/ja
Publication of JPH0444358U publication Critical patent/JPH0444358U/ja
Application granted granted Critical
Publication of JP2521257Y2 publication Critical patent/JP2521257Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1990084377U 1990-08-08 1990-08-08 自公転治具付蒸着装置 Expired - Lifetime JP2521257Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990084377U JP2521257Y2 (ja) 1990-08-08 1990-08-08 自公転治具付蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990084377U JP2521257Y2 (ja) 1990-08-08 1990-08-08 自公転治具付蒸着装置

Publications (2)

Publication Number Publication Date
JPH0444358U JPH0444358U (enrdf_load_stackoverflow) 1992-04-15
JP2521257Y2 true JP2521257Y2 (ja) 1996-12-25

Family

ID=31815470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990084377U Expired - Lifetime JP2521257Y2 (ja) 1990-08-08 1990-08-08 自公転治具付蒸着装置

Country Status (1)

Country Link
JP (1) JP2521257Y2 (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE50205082D1 (de) * 2001-05-08 2006-01-05 Unaxis Balzers Ag Werkstückträger
CN108866316A (zh) * 2017-05-11 2018-11-23 重庆理工大学 一种齿轮表面电子束处理系统
CN111101099B (zh) * 2020-01-06 2024-03-29 宣城托新精密科技有限公司 一种汽车饰件无水雾化蒸镀方法及其蒸镀装置
CN115011930A (zh) * 2022-05-31 2022-09-06 北海惠科半导体科技有限公司 蒸发镀膜装置
CN114990493B (zh) * 2022-06-23 2024-01-12 北海惠科半导体科技有限公司 蒸发镀膜装置及其镀膜方法
CN115110038B (zh) * 2022-06-29 2024-01-12 北海惠科半导体科技有限公司 蒸发镀膜装置和镀膜方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0253965U (enrdf_load_stackoverflow) * 1988-10-06 1990-04-18

Also Published As

Publication number Publication date
JPH0444358U (enrdf_load_stackoverflow) 1992-04-15

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