JPH0253965U - - Google Patents

Info

Publication number
JPH0253965U
JPH0253965U JP13111888U JP13111888U JPH0253965U JP H0253965 U JPH0253965 U JP H0253965U JP 13111888 U JP13111888 U JP 13111888U JP 13111888 U JP13111888 U JP 13111888U JP H0253965 U JPH0253965 U JP H0253965U
Authority
JP
Japan
Prior art keywords
guide
frame
holder
revolving base
substrate holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13111888U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13111888U priority Critical patent/JPH0253965U/ja
Publication of JPH0253965U publication Critical patent/JPH0253965U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP13111888U 1988-10-06 1988-10-06 Pending JPH0253965U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13111888U JPH0253965U (enrdf_load_stackoverflow) 1988-10-06 1988-10-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13111888U JPH0253965U (enrdf_load_stackoverflow) 1988-10-06 1988-10-06

Publications (1)

Publication Number Publication Date
JPH0253965U true JPH0253965U (enrdf_load_stackoverflow) 1990-04-18

Family

ID=31386885

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13111888U Pending JPH0253965U (enrdf_load_stackoverflow) 1988-10-06 1988-10-06

Country Status (1)

Country Link
JP (1) JPH0253965U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0444358U (enrdf_load_stackoverflow) * 1990-08-08 1992-04-15

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0444358U (enrdf_load_stackoverflow) * 1990-08-08 1992-04-15

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