JP2519543Y2 - 光球面波発生装置 - Google Patents
光球面波発生装置Info
- Publication number
- JP2519543Y2 JP2519543Y2 JP1989138337U JP13833789U JP2519543Y2 JP 2519543 Y2 JP2519543 Y2 JP 2519543Y2 JP 1989138337 U JP1989138337 U JP 1989138337U JP 13833789 U JP13833789 U JP 13833789U JP 2519543 Y2 JP2519543 Y2 JP 2519543Y2
- Authority
- JP
- Japan
- Prior art keywords
- spherical wave
- pinhole
- flat plate
- wave generator
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims description 8
- 239000010409 thin film Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 description 16
- 239000002184 metal Substances 0.000 description 16
- 239000011888 foil Substances 0.000 description 8
- 239000011521 glass Substances 0.000 description 8
- 230000004075 alteration Effects 0.000 description 7
- 239000010408 film Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 201000009310 astigmatism Diseases 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000004441 surface measurement Methods 0.000 description 1
Landscapes
- Optical Elements Other Than Lenses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989138337U JP2519543Y2 (ja) | 1989-11-29 | 1989-11-29 | 光球面波発生装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989138337U JP2519543Y2 (ja) | 1989-11-29 | 1989-11-29 | 光球面波発生装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0377901U JPH0377901U (enrdf_load_stackoverflow) | 1991-08-06 |
| JP2519543Y2 true JP2519543Y2 (ja) | 1996-12-04 |
Family
ID=31685444
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989138337U Expired - Fee Related JP2519543Y2 (ja) | 1989-11-29 | 1989-11-29 | 光球面波発生装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2519543Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005195739A (ja) * | 2004-01-05 | 2005-07-21 | Nikon Corp | 共焦点光学系及び高さ測定装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60108246A (ja) * | 1983-11-18 | 1985-06-13 | Washino Koki Kk | センタリングマシン |
| JP2679221B2 (ja) * | 1989-03-02 | 1997-11-19 | 株式会社ニコン | 干渉計 |
-
1989
- 1989-11-29 JP JP1989138337U patent/JP2519543Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0377901U (enrdf_load_stackoverflow) | 1991-08-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |