JP2517929Y2 - 分離型レ−ザ干渉計 - Google Patents

分離型レ−ザ干渉計

Info

Publication number
JP2517929Y2
JP2517929Y2 JP1987052869U JP5286987U JP2517929Y2 JP 2517929 Y2 JP2517929 Y2 JP 2517929Y2 JP 1987052869 U JP1987052869 U JP 1987052869U JP 5286987 U JP5286987 U JP 5286987U JP 2517929 Y2 JP2517929 Y2 JP 2517929Y2
Authority
JP
Japan
Prior art keywords
laser
light source
optical fiber
photoelectric conversion
interference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987052869U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63159706U (US06272168-20010807-M00014.png
Inventor
吉久 谷村
啓文 山田
毅 初沢
幸司 豊田
俊郎 黒沢
Original Assignee
工業技術院長
株式会社 東京精密
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 工業技術院長, 株式会社 東京精密 filed Critical 工業技術院長
Priority to JP1987052869U priority Critical patent/JP2517929Y2/ja
Publication of JPS63159706U publication Critical patent/JPS63159706U/ja
Application granted granted Critical
Publication of JP2517929Y2 publication Critical patent/JP2517929Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
JP1987052869U 1987-04-08 1987-04-08 分離型レ−ザ干渉計 Expired - Lifetime JP2517929Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987052869U JP2517929Y2 (ja) 1987-04-08 1987-04-08 分離型レ−ザ干渉計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987052869U JP2517929Y2 (ja) 1987-04-08 1987-04-08 分離型レ−ザ干渉計

Publications (2)

Publication Number Publication Date
JPS63159706U JPS63159706U (US06272168-20010807-M00014.png) 1988-10-19
JP2517929Y2 true JP2517929Y2 (ja) 1996-11-20

Family

ID=30878429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987052869U Expired - Lifetime JP2517929Y2 (ja) 1987-04-08 1987-04-08 分離型レ−ザ干渉計

Country Status (1)

Country Link
JP (1) JP2517929Y2 (US06272168-20010807-M00014.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112006002170B4 (de) * 2005-08-16 2011-01-20 Tokyo Seimitsu Co. Ltd., Mitaka-shi Laser-Entfernungsmessgerät
JP2015034792A (ja) * 2013-08-09 2015-02-19 キヤノン株式会社 干渉計測装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3774558B2 (ja) * 1998-01-23 2006-05-17 日本電子株式会社 荷電粒子ビーム装置における試料装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6018727A (ja) * 1983-07-12 1985-01-30 Hitachi Cable Ltd 光干渉計
JPS60176109U (ja) * 1984-04-28 1985-11-21 鈴木　範人 干渉縞の移動方向判定装置
JPS61219803A (ja) * 1985-03-27 1986-09-30 Nippon Kogaku Kk <Nikon> 物理量測定装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
「計測法シリーズ光応用計測技術」日本機械学会編１９８５−３−２０発行 朝倉書店

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112006002170B4 (de) * 2005-08-16 2011-01-20 Tokyo Seimitsu Co. Ltd., Mitaka-shi Laser-Entfernungsmessgerät
JP2015034792A (ja) * 2013-08-09 2015-02-19 キヤノン株式会社 干渉計測装置

Also Published As

Publication number Publication date
JPS63159706U (US06272168-20010807-M00014.png) 1988-10-19

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