JP2517385Y2 - 半導体装置の樹脂欠け検査装置 - Google Patents

半導体装置の樹脂欠け検査装置

Info

Publication number
JP2517385Y2
JP2517385Y2 JP10048590U JP10048590U JP2517385Y2 JP 2517385 Y2 JP2517385 Y2 JP 2517385Y2 JP 10048590 U JP10048590 U JP 10048590U JP 10048590 U JP10048590 U JP 10048590U JP 2517385 Y2 JP2517385 Y2 JP 2517385Y2
Authority
JP
Japan
Prior art keywords
semiconductor device
resin
camera
detection range
chipping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP10048590U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0459149U (OSRAM
Inventor
全夫 荻原
Original Assignee
鹿児島日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 鹿児島日本電気株式会社 filed Critical 鹿児島日本電気株式会社
Priority to JP10048590U priority Critical patent/JP2517385Y2/ja
Publication of JPH0459149U publication Critical patent/JPH0459149U/ja
Application granted granted Critical
Publication of JP2517385Y2 publication Critical patent/JP2517385Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
JP10048590U 1990-09-26 1990-09-26 半導体装置の樹脂欠け検査装置 Expired - Fee Related JP2517385Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10048590U JP2517385Y2 (ja) 1990-09-26 1990-09-26 半導体装置の樹脂欠け検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10048590U JP2517385Y2 (ja) 1990-09-26 1990-09-26 半導体装置の樹脂欠け検査装置

Publications (2)

Publication Number Publication Date
JPH0459149U JPH0459149U (OSRAM) 1992-05-21
JP2517385Y2 true JP2517385Y2 (ja) 1996-11-20

Family

ID=31843190

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10048590U Expired - Fee Related JP2517385Y2 (ja) 1990-09-26 1990-09-26 半導体装置の樹脂欠け検査装置

Country Status (1)

Country Link
JP (1) JP2517385Y2 (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5563388B2 (ja) * 2010-06-30 2014-07-30 第一実業ビスウィル株式会社 チップｌｅｄ検査装置
JP7040870B2 (ja) * 2017-07-28 2022-03-23 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、及び基板処理装置の部品検査方法

Also Published As

Publication number Publication date
JPH0459149U (OSRAM) 1992-05-21

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