JP2515777Y2 - ウエ−ハ洗浄装置のシャッタ−装置 - Google Patents

ウエ−ハ洗浄装置のシャッタ−装置

Info

Publication number
JP2515777Y2
JP2515777Y2 JP1989068063U JP6806389U JP2515777Y2 JP 2515777 Y2 JP2515777 Y2 JP 2515777Y2 JP 1989068063 U JP1989068063 U JP 1989068063U JP 6806389 U JP6806389 U JP 6806389U JP 2515777 Y2 JP2515777 Y2 JP 2515777Y2
Authority
JP
Japan
Prior art keywords
opening
valve seat
partition wall
container
shutter device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989068063U
Other languages
English (en)
Japanese (ja)
Other versions
JPH037577U (enExample
Inventor
秀雄 工藤
Original Assignee
信越半導体 株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 信越半導体 株式会社 filed Critical 信越半導体 株式会社
Priority to JP1989068063U priority Critical patent/JP2515777Y2/ja
Priority to EP90306455A priority patent/EP0407044B1/en
Priority to DE69006948T priority patent/DE69006948T2/de
Publication of JPH037577U publication Critical patent/JPH037577U/ja
Application granted granted Critical
Publication of JP2515777Y2 publication Critical patent/JP2515777Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3306—Horizontal transfer of a single workpiece
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/20—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the seats
    • F16K3/207—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the seats by means of hydraulic forces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0416—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0441—Apparatus for sealing, encapsulating, glassing, decapsulating or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Lift Valve (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP1989068063U 1989-06-13 1989-06-13 ウエ−ハ洗浄装置のシャッタ−装置 Expired - Lifetime JP2515777Y2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP1989068063U JP2515777Y2 (ja) 1989-06-13 1989-06-13 ウエ−ハ洗浄装置のシャッタ−装置
EP90306455A EP0407044B1 (en) 1989-06-13 1990-06-13 A shutter system
DE69006948T DE69006948T2 (de) 1989-06-13 1990-06-13 Verschlusssystem.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989068063U JP2515777Y2 (ja) 1989-06-13 1989-06-13 ウエ−ハ洗浄装置のシャッタ−装置

Publications (2)

Publication Number Publication Date
JPH037577U JPH037577U (enExample) 1991-01-24
JP2515777Y2 true JP2515777Y2 (ja) 1996-10-30

Family

ID=13362951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989068063U Expired - Lifetime JP2515777Y2 (ja) 1989-06-13 1989-06-13 ウエ−ハ洗浄装置のシャッタ−装置

Country Status (3)

Country Link
EP (1) EP0407044B1 (enExample)
JP (1) JP2515777Y2 (enExample)
DE (1) DE69006948T2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5762184U (enExample) * 1980-09-30 1982-04-13
JPH085623Y2 (ja) * 1987-08-31 1996-02-21 コクヨ株式会社 事務用家具の棚受装置
EP0849772A1 (en) * 1996-12-20 1998-06-24 Interuniversitair Micro-Elektronica Centrum Vzw Apparatus and method for wet cleaning or etching of flat substrates
ATE288622T1 (de) 1996-06-24 2005-02-15 Imec Inter Uni Micro Electr Vorrichtung und verfahren zur nassreinigung oder zum ätzen eines flachen substrats
EP0817246B1 (en) * 1996-06-24 2005-02-02 Interuniversitair Microelektronica Centrum Vzw Apparatus and method for wet cleaning or etching of flat substrates
CN103008282B (zh) * 2012-11-29 2015-07-15 北京七星华创电子股份有限公司 清洗兆声波换能器的装置
KR101649149B1 (ko) * 2014-10-30 2016-08-19 주식회사 토박스코리아 신고 벗기 용이한 유아용 신발

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53139226A (en) * 1977-05-11 1978-12-05 Hitachi Ltd Air lock valve
US4418646A (en) * 1982-03-29 1983-12-06 Eaton Corporation Load lock valve
US4746397A (en) * 1986-01-17 1988-05-24 Matsushita Electric Industrial Co., Ltd. Treatment method for plate-shaped substrate
US4715764A (en) * 1986-04-28 1987-12-29 Varian Associates, Inc. Gate valve for wafer processing system
WO1987006862A1 (en) * 1986-05-16 1987-11-19 Eastman Kodak Company Ultrasonic cleaning method and apparatus

Also Published As

Publication number Publication date
DE69006948T2 (de) 1994-08-25
DE69006948D1 (de) 1994-04-07
EP0407044A1 (en) 1991-01-09
JPH037577U (enExample) 1991-01-24
EP0407044B1 (en) 1994-03-02

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