JP2514974Y2 - 半導体３軸力覚センサーの起歪体構造 - Google Patents

半導体３軸力覚センサーの起歪体構造

Info

Publication number
JP2514974Y2
JP2514974Y2 JP10214590U JP10214590U JP2514974Y2 JP 2514974 Y2 JP2514974 Y2 JP 2514974Y2 JP 10214590 U JP10214590 U JP 10214590U JP 10214590 U JP10214590 U JP 10214590U JP 2514974 Y2 JP2514974 Y2 JP 2514974Y2
Authority
JP
Japan
Prior art keywords
force sensor
strain
force
diaphragm
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP10214590U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0459436U (en, 2012
Inventor
靖 梶原
集 蝦名
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Enplas Corp
Original Assignee
Enplas Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Enplas Corp filed Critical Enplas Corp
Priority to JP10214590U priority Critical patent/JP2514974Y2/ja
Publication of JPH0459436U publication Critical patent/JPH0459436U/ja
Application granted granted Critical
Publication of JP2514974Y2 publication Critical patent/JP2514974Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Pressure Sensors (AREA)
JP10214590U 1990-09-27 1990-09-27 半導体３軸力覚センサーの起歪体構造 Expired - Lifetime JP2514974Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10214590U JP2514974Y2 (ja) 1990-09-27 1990-09-27 半導体３軸力覚センサーの起歪体構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10214590U JP2514974Y2 (ja) 1990-09-27 1990-09-27 半導体３軸力覚センサーの起歪体構造

Publications (2)

Publication Number Publication Date
JPH0459436U JPH0459436U (en, 2012) 1992-05-21
JP2514974Y2 true JP2514974Y2 (ja) 1996-10-23

Family

ID=31846153

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10214590U Expired - Lifetime JP2514974Y2 (ja) 1990-09-27 1990-09-27 半導体３軸力覚センサーの起歪体構造

Country Status (1)

Country Link
JP (1) JP2514974Y2 (en, 2012)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005045388A1 (ja) * 2003-11-10 2005-05-19 Nitta Corporation 歪みゲージ型センサおよびこれを利用した歪みゲージ型センサユニット
WO2023132109A1 (ja) * 2022-01-04 2023-07-13 住友重機械工業株式会社 歯車装置及びセンサ設置部材

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017166847A (ja) * 2016-03-14 2017-09-21 トヨタ自動車株式会社 力センサの設計方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005045388A1 (ja) * 2003-11-10 2005-05-19 Nitta Corporation 歪みゲージ型センサおよびこれを利用した歪みゲージ型センサユニット
CN100449286C (zh) * 2003-11-10 2009-01-07 新田株式会社 应变计型传感器及利用该传感器的应变计型传感器单元
WO2023132109A1 (ja) * 2022-01-04 2023-07-13 住友重機械工業株式会社 歯車装置及びセンサ設置部材
JP2023099959A (ja) * 2022-01-04 2023-07-14 住友重機械工業株式会社 歯車装置及びセンサ設置部材

Also Published As

Publication number Publication date
JPH0459436U (en, 2012) 1992-05-21

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