JP2513846Y2 - 原料ガス供給装置 - Google Patents

原料ガス供給装置

Info

Publication number
JP2513846Y2
JP2513846Y2 JP1989067896U JP6789689U JP2513846Y2 JP 2513846 Y2 JP2513846 Y2 JP 2513846Y2 JP 1989067896 U JP1989067896 U JP 1989067896U JP 6789689 U JP6789689 U JP 6789689U JP 2513846 Y2 JP2513846 Y2 JP 2513846Y2
Authority
JP
Japan
Prior art keywords
raw material
sealed chamber
chamber
teos
vaporized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989067896U
Other languages
English (en)
Japanese (ja)
Other versions
JPH038434U (enExample
Inventor
明 吉野
鼎士 渡部
健治 奥村
Original Assignee
大同ほくさん 株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 大同ほくさん 株式会社 filed Critical 大同ほくさん 株式会社
Priority to JP1989067896U priority Critical patent/JP2513846Y2/ja
Publication of JPH038434U publication Critical patent/JPH038434U/ja
Application granted granted Critical
Publication of JP2513846Y2 publication Critical patent/JP2513846Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
JP1989067896U 1989-06-10 1989-06-10 原料ガス供給装置 Expired - Lifetime JP2513846Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989067896U JP2513846Y2 (ja) 1989-06-10 1989-06-10 原料ガス供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989067896U JP2513846Y2 (ja) 1989-06-10 1989-06-10 原料ガス供給装置

Publications (2)

Publication Number Publication Date
JPH038434U JPH038434U (enExample) 1991-01-28
JP2513846Y2 true JP2513846Y2 (ja) 1996-10-09

Family

ID=31601881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989067896U Expired - Lifetime JP2513846Y2 (ja) 1989-06-10 1989-06-10 原料ガス供給装置

Country Status (1)

Country Link
JP (1) JP2513846Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016125809A1 (ja) * 2015-02-03 2016-08-11 株式会社湯山製作所 滅菌装置及び滅菌方法

Also Published As

Publication number Publication date
JPH038434U (enExample) 1991-01-28

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