JP2512630Y2 - 成膜装置 - Google Patents

成膜装置

Info

Publication number
JP2512630Y2
JP2512630Y2 JP11495790U JP11495790U JP2512630Y2 JP 2512630 Y2 JP2512630 Y2 JP 2512630Y2 JP 11495790 U JP11495790 U JP 11495790U JP 11495790 U JP11495790 U JP 11495790U JP 2512630 Y2 JP2512630 Y2 JP 2512630Y2
Authority
JP
Japan
Prior art keywords
substrate
mask
inner peripheral
peripheral mask
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP11495790U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0472324U (enrdf_load_html_response
Inventor
浩貴 田中
美津雄 宮崎
久雄 有宗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP11495790U priority Critical patent/JP2512630Y2/ja
Publication of JPH0472324U publication Critical patent/JPH0472324U/ja
Application granted granted Critical
Publication of JP2512630Y2 publication Critical patent/JP2512630Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Manufacturing Optical Record Carriers (AREA)
JP11495790U 1990-10-31 1990-10-31 成膜装置 Expired - Fee Related JP2512630Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11495790U JP2512630Y2 (ja) 1990-10-31 1990-10-31 成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11495790U JP2512630Y2 (ja) 1990-10-31 1990-10-31 成膜装置

Publications (2)

Publication Number Publication Date
JPH0472324U JPH0472324U (enrdf_load_html_response) 1992-06-25
JP2512630Y2 true JP2512630Y2 (ja) 1996-10-02

Family

ID=31862681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11495790U Expired - Fee Related JP2512630Y2 (ja) 1990-10-31 1990-10-31 成膜装置

Country Status (1)

Country Link
JP (1) JP2512630Y2 (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240170016A1 (en) * 2021-03-31 2024-05-23 Sony Group Corporation Sputtering device for multilayer optical recording medium and method for manufacturing multilayer optical recording medium

Also Published As

Publication number Publication date
JPH0472324U (enrdf_load_html_response) 1992-06-25

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