JP2509202Y2 - ウエハ貼付用フレ―ム - Google Patents

ウエハ貼付用フレ―ム

Info

Publication number
JP2509202Y2
JP2509202Y2 JP2238590U JP2238590U JP2509202Y2 JP 2509202 Y2 JP2509202 Y2 JP 2509202Y2 JP 2238590 U JP2238590 U JP 2238590U JP 2238590 U JP2238590 U JP 2238590U JP 2509202 Y2 JP2509202 Y2 JP 2509202Y2
Authority
JP
Japan
Prior art keywords
frame
wafer
cassette
groove
outer peripheral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2238590U
Other languages
English (en)
Japanese (ja)
Other versions
JPH03112941U (enrdf_load_stackoverflow
Inventor
健一 岡本
英雄 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority to JP2238590U priority Critical patent/JP2509202Y2/ja
Publication of JPH03112941U publication Critical patent/JPH03112941U/ja
Application granted granted Critical
Publication of JP2509202Y2 publication Critical patent/JP2509202Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2238590U 1990-03-05 1990-03-05 ウエハ貼付用フレ―ム Expired - Lifetime JP2509202Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2238590U JP2509202Y2 (ja) 1990-03-05 1990-03-05 ウエハ貼付用フレ―ム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2238590U JP2509202Y2 (ja) 1990-03-05 1990-03-05 ウエハ貼付用フレ―ム

Publications (2)

Publication Number Publication Date
JPH03112941U JPH03112941U (enrdf_load_stackoverflow) 1991-11-19
JP2509202Y2 true JP2509202Y2 (ja) 1996-08-28

Family

ID=31525393

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2238590U Expired - Lifetime JP2509202Y2 (ja) 1990-03-05 1990-03-05 ウエハ貼付用フレ―ム

Country Status (1)

Country Link
JP (1) JP2509202Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5308218B2 (ja) * 2009-04-10 2013-10-09 株式会社ディスコ 加工装置

Also Published As

Publication number Publication date
JPH03112941U (enrdf_load_stackoverflow) 1991-11-19

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