JP2507709Y2 - 液相結晶成長装置 - Google Patents
液相結晶成長装置Info
- Publication number
- JP2507709Y2 JP2507709Y2 JP1986157623U JP15762386U JP2507709Y2 JP 2507709 Y2 JP2507709 Y2 JP 2507709Y2 JP 1986157623 U JP1986157623 U JP 1986157623U JP 15762386 U JP15762386 U JP 15762386U JP 2507709 Y2 JP2507709 Y2 JP 2507709Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- solution
- crystal growth
- dummy
- reservoir
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 title claims description 24
- 239000007791 liquid phase Substances 0.000 title description 2
- 239000000758 substrate Substances 0.000 claims description 104
- 239000004973 liquid crystal related substance Substances 0.000 claims description 10
- 125000006850 spacer group Chemical group 0.000 description 13
- 230000002093 peripheral effect Effects 0.000 description 6
- 239000011800 void material Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986157623U JP2507709Y2 (ja) | 1986-10-14 | 1986-10-14 | 液相結晶成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986157623U JP2507709Y2 (ja) | 1986-10-14 | 1986-10-14 | 液相結晶成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6364028U JPS6364028U (enrdf_load_stackoverflow) | 1988-04-27 |
| JP2507709Y2 true JP2507709Y2 (ja) | 1996-08-21 |
Family
ID=31080343
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986157623U Expired - Lifetime JP2507709Y2 (ja) | 1986-10-14 | 1986-10-14 | 液相結晶成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2507709Y2 (enrdf_load_stackoverflow) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5931972B2 (ja) * | 1977-06-21 | 1984-08-06 | 富士通株式会社 | 液相エピタキシヤル成長法 |
-
1986
- 1986-10-14 JP JP1986157623U patent/JP2507709Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6364028U (enrdf_load_stackoverflow) | 1988-04-27 |
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