JP2506766Y2 - イオン源の制御装置 - Google Patents
イオン源の制御装置Info
- Publication number
- JP2506766Y2 JP2506766Y2 JP1990055846U JP5584690U JP2506766Y2 JP 2506766 Y2 JP2506766 Y2 JP 2506766Y2 JP 1990055846 U JP1990055846 U JP 1990055846U JP 5584690 U JP5584690 U JP 5584690U JP 2506766 Y2 JP2506766 Y2 JP 2506766Y2
- Authority
- JP
- Japan
- Prior art keywords
- power supply
- breakdown
- discharge
- ion source
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000015556 catabolic process Effects 0.000 claims description 31
- 230000001133 acceleration Effects 0.000 claims description 22
- 238000001514 detection method Methods 0.000 claims description 21
- 238000010884 ion-beam technique Methods 0.000 claims description 12
- 230000002459 sustained effect Effects 0.000 claims description 6
- 238000000605 extraction Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000009684 ion beam mixing Methods 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
- Control Of Voltage And Current In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990055846U JP2506766Y2 (ja) | 1990-05-28 | 1990-05-28 | イオン源の制御装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990055846U JP2506766Y2 (ja) | 1990-05-28 | 1990-05-28 | イオン源の制御装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0415142U JPH0415142U (cs) | 1992-02-06 |
| JP2506766Y2 true JP2506766Y2 (ja) | 1996-08-14 |
Family
ID=31579160
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990055846U Expired - Fee Related JP2506766Y2 (ja) | 1990-05-28 | 1990-05-28 | イオン源の制御装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2506766Y2 (cs) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA3229072A1 (en) * | 2017-01-18 | 2018-08-09 | Shine Technologies, Llc | High power ion beam generator systems and methods |
| CN108695128A (zh) * | 2017-04-11 | 2018-10-23 | 上海伟钊光学科技股份有限公司 | 具有束流自动反馈控制的考夫曼离子源 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6074299A (ja) * | 1983-09-30 | 1985-04-26 | 株式会社東芝 | イオン源電源装置 |
| JPS60182639A (ja) * | 1984-03-01 | 1985-09-18 | Toshiba Corp | イオン源放電電源装置 |
| JP2609674B2 (ja) * | 1988-04-18 | 1997-05-14 | 日本電信電話株式会社 | イオン発生器 |
| JP2625942B2 (ja) * | 1988-08-18 | 1997-07-02 | 日新電機株式会社 | イオン処理装置の制御方法 |
-
1990
- 1990-05-28 JP JP1990055846U patent/JP2506766Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0415142U (cs) | 1992-02-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |