JP2504666Y2 - 制動型水晶光偏向器 - Google Patents
制動型水晶光偏向器Info
- Publication number
- JP2504666Y2 JP2504666Y2 JP14635489U JP14635489U JP2504666Y2 JP 2504666 Y2 JP2504666 Y2 JP 2504666Y2 JP 14635489 U JP14635489 U JP 14635489U JP 14635489 U JP14635489 U JP 14635489U JP 2504666 Y2 JP2504666 Y2 JP 2504666Y2
- Authority
- JP
- Japan
- Prior art keywords
- light deflector
- crystal light
- type crystal
- deflector
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 title claims description 35
- 239000011553 magnetic fluid Substances 0.000 claims description 14
- 230000005484 gravity Effects 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 238000000206 photolithography Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000013256 coordination polymer Substances 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Landscapes
- Mechanical Optical Scanning Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14635489U JP2504666Y2 (ja) | 1989-12-19 | 1989-12-19 | 制動型水晶光偏向器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14635489U JP2504666Y2 (ja) | 1989-12-19 | 1989-12-19 | 制動型水晶光偏向器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0384805U JPH0384805U (enrdf_load_stackoverflow) | 1991-08-28 |
| JP2504666Y2 true JP2504666Y2 (ja) | 1996-07-10 |
Family
ID=31692948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14635489U Expired - Lifetime JP2504666Y2 (ja) | 1989-12-19 | 1989-12-19 | 制動型水晶光偏向器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2504666Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6587603B2 (ja) * | 2016-12-27 | 2019-10-09 | 三菱電機株式会社 | ガルバノスキャナ及びレーザ加工装置 |
-
1989
- 1989-12-19 JP JP14635489U patent/JP2504666Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0384805U (enrdf_load_stackoverflow) | 1991-08-28 |
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