JP2504119Y2 - ウェ―ハキャリア - Google Patents

ウェ―ハキャリア

Info

Publication number
JP2504119Y2
JP2504119Y2 JP7246190U JP7246190U JP2504119Y2 JP 2504119 Y2 JP2504119 Y2 JP 2504119Y2 JP 7246190 U JP7246190 U JP 7246190U JP 7246190 U JP7246190 U JP 7246190U JP 2504119 Y2 JP2504119 Y2 JP 2504119Y2
Authority
JP
Japan
Prior art keywords
wafer
wafer carrier
side plates
plates
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP7246190U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0430740U (OSRAM
Inventor
郁夫 上柿
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7246190U priority Critical patent/JP2504119Y2/ja
Publication of JPH0430740U publication Critical patent/JPH0430740U/ja
Application granted granted Critical
Publication of JP2504119Y2 publication Critical patent/JP2504119Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP7246190U 1990-07-06 1990-07-06 ウェ―ハキャリア Expired - Lifetime JP2504119Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7246190U JP2504119Y2 (ja) 1990-07-06 1990-07-06 ウェ―ハキャリア

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7246190U JP2504119Y2 (ja) 1990-07-06 1990-07-06 ウェ―ハキャリア

Publications (2)

Publication Number Publication Date
JPH0430740U JPH0430740U (OSRAM) 1992-03-12
JP2504119Y2 true JP2504119Y2 (ja) 1996-07-10

Family

ID=31610417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7246190U Expired - Lifetime JP2504119Y2 (ja) 1990-07-06 1990-07-06 ウェ―ハキャリア

Country Status (1)

Country Link
JP (1) JP2504119Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003086667A (ja) * 2001-09-12 2003-03-20 Takatori Corp 薄厚ウェーハ用カセット及び吸着ハンド

Also Published As

Publication number Publication date
JPH0430740U (OSRAM) 1992-03-12

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