JP2025081992A5 - - Google Patents

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Publication number
JP2025081992A5
JP2025081992A5 JP2023195146A JP2023195146A JP2025081992A5 JP 2025081992 A5 JP2025081992 A5 JP 2025081992A5 JP 2023195146 A JP2023195146 A JP 2023195146A JP 2023195146 A JP2023195146 A JP 2023195146A JP 2025081992 A5 JP2025081992 A5 JP 2025081992A5
Authority
JP
Japan
Prior art keywords
heating
cooling
heat medium
pipe
return pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023195146A
Other languages
English (en)
Japanese (ja)
Other versions
JP2025081992A (ja
JP7864678B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2023195146A priority Critical patent/JP7864678B2/ja
Priority claimed from JP2023195146A external-priority patent/JP7864678B2/ja
Priority to PCT/JP2024/036011 priority patent/WO2025105078A1/ja
Priority to TW113142460A priority patent/TW202527111A/zh
Publication of JP2025081992A publication Critical patent/JP2025081992A/ja
Publication of JP2025081992A5 publication Critical patent/JP2025081992A5/ja
Application granted granted Critical
Publication of JP7864678B2 publication Critical patent/JP7864678B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2023195146A 2023-11-16 2023-11-16 熱媒体供給装置 Active JP7864678B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2023195146A JP7864678B2 (ja) 2023-11-16 2023-11-16 熱媒体供給装置
PCT/JP2024/036011 WO2025105078A1 (ja) 2023-11-16 2024-10-08 熱媒体供給装置
TW113142460A TW202527111A (zh) 2023-11-16 2024-11-06 熱媒介供給裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2023195146A JP7864678B2 (ja) 2023-11-16 2023-11-16 熱媒体供給装置

Publications (3)

Publication Number Publication Date
JP2025081992A JP2025081992A (ja) 2025-05-28
JP2025081992A5 true JP2025081992A5 (enExample) 2026-01-06
JP7864678B2 JP7864678B2 (ja) 2026-05-25

Family

ID=95742486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023195146A Active JP7864678B2 (ja) 2023-11-16 2023-11-16 熱媒体供給装置

Country Status (3)

Country Link
JP (1) JP7864678B2 (enExample)
TW (1) TW202527111A (enExample)
WO (1) WO2025105078A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7707119B2 (ja) * 2022-03-31 2025-07-14 株式会社荏原製作所 半導体製造装置のための温度調節装置、および半導体製造システム

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113811833B (zh) 2019-04-23 2022-10-04 Ckd株式会社 热交换系统
JP7493895B2 (ja) 2021-08-20 2024-06-03 Ckd株式会社 温度制御システム
JP7707119B2 (ja) 2022-03-31 2025-07-14 株式会社荏原製作所 半導体製造装置のための温度調節装置、および半導体製造システム

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