JP7864678B2 - 熱媒体供給装置 - Google Patents

熱媒体供給装置

Info

Publication number
JP7864678B2
JP7864678B2 JP2023195146A JP2023195146A JP7864678B2 JP 7864678 B2 JP7864678 B2 JP 7864678B2 JP 2023195146 A JP2023195146 A JP 2023195146A JP 2023195146 A JP2023195146 A JP 2023195146A JP 7864678 B2 JP7864678 B2 JP 7864678B2
Authority
JP
Japan
Prior art keywords
heating
cooling
heat transfer
transfer medium
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023195146A
Other languages
English (en)
Japanese (ja)
Other versions
JP2025081992A (ja
JP2025081992A5 (enExample
Inventor
幸大 福住
智紀 今井
淳 青山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP2023195146A priority Critical patent/JP7864678B2/ja
Priority to PCT/JP2024/036011 priority patent/WO2025105078A1/ja
Priority to TW113142460A priority patent/TW202527111A/zh
Publication of JP2025081992A publication Critical patent/JP2025081992A/ja
Publication of JP2025081992A5 publication Critical patent/JP2025081992A5/ja
Application granted granted Critical
Publication of JP7864678B2 publication Critical patent/JP7864678B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/01—Control of temperature without auxiliary power
    • G05D23/13—Control of temperature without auxiliary power by varying the mixing ratio of two fluids having different temperatures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Temperature (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
JP2023195146A 2023-11-16 2023-11-16 熱媒体供給装置 Active JP7864678B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2023195146A JP7864678B2 (ja) 2023-11-16 2023-11-16 熱媒体供給装置
PCT/JP2024/036011 WO2025105078A1 (ja) 2023-11-16 2024-10-08 熱媒体供給装置
TW113142460A TW202527111A (zh) 2023-11-16 2024-11-06 熱媒介供給裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2023195146A JP7864678B2 (ja) 2023-11-16 2023-11-16 熱媒体供給装置

Publications (3)

Publication Number Publication Date
JP2025081992A JP2025081992A (ja) 2025-05-28
JP2025081992A5 JP2025081992A5 (enExample) 2026-01-06
JP7864678B2 true JP7864678B2 (ja) 2026-05-25

Family

ID=95742486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023195146A Active JP7864678B2 (ja) 2023-11-16 2023-11-16 熱媒体供給装置

Country Status (3)

Country Link
JP (1) JP7864678B2 (enExample)
TW (1) TW202527111A (enExample)
WO (1) WO2025105078A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7707119B2 (ja) * 2022-03-31 2025-07-14 株式会社荏原製作所 半導体製造装置のための温度調節装置、および半導体製造システム

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020217800A1 (ja) 2019-04-23 2020-10-29 Ckd株式会社 熱交換システム
JP2023028844A (ja) 2021-08-20 2023-03-03 Ckd株式会社 温度制御システム
JP2023149554A (ja) 2022-03-31 2023-10-13 荏原冷熱システム株式会社 半導体製造装置のための温度調節装置、および半導体製造システム

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020217800A1 (ja) 2019-04-23 2020-10-29 Ckd株式会社 熱交換システム
JP2023028844A (ja) 2021-08-20 2023-03-03 Ckd株式会社 温度制御システム
JP2023149554A (ja) 2022-03-31 2023-10-13 荏原冷熱システム株式会社 半導体製造装置のための温度調節装置、および半導体製造システム

Also Published As

Publication number Publication date
JP2025081992A (ja) 2025-05-28
WO2025105078A1 (ja) 2025-05-22
TW202527111A (zh) 2025-07-01

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20251222

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20251222

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20251222

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20260324

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20260414

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20260512

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20260513

R150 Certificate of patent or registration of utility model

Ref document number: 7864678

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150