TW202527111A - 熱媒介供給裝置 - Google Patents

熱媒介供給裝置 Download PDF

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Publication number
TW202527111A
TW202527111A TW113142460A TW113142460A TW202527111A TW 202527111 A TW202527111 A TW 202527111A TW 113142460 A TW113142460 A TW 113142460A TW 113142460 A TW113142460 A TW 113142460A TW 202527111 A TW202527111 A TW 202527111A
Authority
TW
Taiwan
Prior art keywords
cooling
heating
heat medium
temperature
return pipe
Prior art date
Application number
TW113142460A
Other languages
English (en)
Chinese (zh)
Inventor
福住幸大
今井智紀
青山淳
Original Assignee
日商荏原製作所股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商荏原製作所股份有限公司 filed Critical 日商荏原製作所股份有限公司
Publication of TW202527111A publication Critical patent/TW202527111A/zh

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/01—Control of temperature without auxiliary power
    • G05D23/13—Control of temperature without auxiliary power by varying the mixing ratio of two fluids having different temperatures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Temperature (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
TW113142460A 2023-11-16 2024-11-06 熱媒介供給裝置 TW202527111A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2023195146A JP7864678B2 (ja) 2023-11-16 2023-11-16 熱媒体供給装置
JP2023-195146 2023-11-16

Publications (1)

Publication Number Publication Date
TW202527111A true TW202527111A (zh) 2025-07-01

Family

ID=95742486

Family Applications (1)

Application Number Title Priority Date Filing Date
TW113142460A TW202527111A (zh) 2023-11-16 2024-11-06 熱媒介供給裝置

Country Status (3)

Country Link
JP (1) JP7864678B2 (enExample)
TW (1) TW202527111A (enExample)
WO (1) WO2025105078A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7707119B2 (ja) * 2022-03-31 2025-07-14 株式会社荏原製作所 半導体製造装置のための温度調節装置、および半導体製造システム

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113811833B (zh) 2019-04-23 2022-10-04 Ckd株式会社 热交换系统
JP7493895B2 (ja) 2021-08-20 2024-06-03 Ckd株式会社 温度制御システム
JP7707119B2 (ja) 2022-03-31 2025-07-14 株式会社荏原製作所 半導体製造装置のための温度調節装置、および半導体製造システム

Also Published As

Publication number Publication date
JP2025081992A (ja) 2025-05-28
JP7864678B2 (ja) 2026-05-25
WO2025105078A1 (ja) 2025-05-22

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