JP2024546903A - ダイ装着電圧調整器を有する３ｄ半導体パッケージ - Google Patents

ダイ装着電圧調整器を有する３ｄ半導体パッケージ Download PDF

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Publication number
JP2024546903A
JP2024546903A JP2024535699A JP2024535699A JP2024546903A JP 2024546903 A JP2024546903 A JP 2024546903A JP 2024535699 A JP2024535699 A JP 2024535699A JP 2024535699 A JP2024535699 A JP 2024535699A JP 2024546903 A JP2024546903 A JP 2024546903A
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Japan
Prior art keywords
die
region
semiconductor package
voltage regulator
package
Prior art date
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Pending
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JP2024535699A
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English (en)
Japanese (ja)
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JP2024546903A5 (https=
Inventor
エイチ． ロー ガブリエル
スワミナサン ラジャ
アガルワル ラフール
ピー． ウィルカーソン ブレット
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Advanced Micro Devices Inc
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Advanced Micro Devices Inc
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Filing date
Publication date
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Publication of JP2024546903A publication Critical patent/JP2024546903A/ja
Publication of JP2024546903A5 publication Critical patent/JP2024546903A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/427—Power or ground buses
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/611—Insulating or insulated package substrates; Interposers; Redistribution layers for connecting multiple chips together
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
    • G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
    • G05F1/10—Regulating voltage or current 
    • G05F1/46—Regulating voltage or current  wherein the variable actually regulated by the final control device is DC
    • G05F1/56—Regulating voltage or current  wherein the variable actually regulated by the final control device is DC using semiconductor devices in series with the load as final control devices
    • G05F1/575—Regulating voltage or current  wherein the variable actually regulated by the final control device is DC using semiconductor devices in series with the load as final control devices characterised by the feedback circuit
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D88/00—Three-dimensional [3D] integrated devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/435—Cross-sectional shapes or dispositions of interconnections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/44—Conductive materials thereof
    • H10W20/4403—Conductive materials thereof based on metals, e.g. alloys, metal silicides
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/63—Vias, e.g. via plugs
    • H10W70/635—Through-vias
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/65—Shapes or dispositions of interconnections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W80/00—Direct bonding of chips, wafers or substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/401—Package configurations characterised by multiple insulating or insulated package substrates, interposers or RDLs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/20—Configurations of stacked chips
    • H10W90/297—Configurations of stacked chips characterised by the through-semiconductor vias [TSVs] in the stacked chips
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Automation & Control Theory (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Geometry (AREA)
JP2024535699A 2021-12-20 2022-12-07 ダイ装着電圧調整器を有する３ｄ半導体パッケージ Pending JP2024546903A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17/556,346 2021-12-20
US17/556,346 US12165981B2 (en) 2021-12-20 2021-12-20 3D semiconductor package with die-mounted voltage regulator
PCT/US2022/052129 WO2023121876A1 (en) 2021-12-20 2022-12-07 3d semiconductor package with die-mounted voltage regulator

Publications (2)

Publication Number Publication Date
JP2024546903A true JP2024546903A (ja) 2024-12-26
JP2024546903A5 JP2024546903A5 (https=) 2025-12-17

Family

ID=86768936

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024535699A Pending JP2024546903A (ja) 2021-12-20 2022-12-07 ダイ装着電圧調整器を有する３ｄ半導体パッケージ

Country Status (6)

Country Link
US (2) US12165981B2 (https=)
EP (1) EP4454014A4 (https=)
JP (1) JP2024546903A (https=)
KR (1) KR20240128894A (https=)
CN (1) CN118613911A (https=)
WO (1) WO2023121876A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230034737A1 (en) * 2021-07-30 2023-02-02 Intel Corporation Composite ic die package including ic die directly bonded to front and back sides of an interposer
US12355006B2 (en) * 2022-02-16 2025-07-08 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor packages and methods of manufacturing thereof
CN116936531A (zh) * 2022-03-29 2023-10-24 辉达公司 具有集成功率转换器模块的集成电路基板设计及其制造方法
US12581663B2 (en) * 2022-12-22 2026-03-17 International Business Machines Corporation Heterogeneous integration structure with voltage regulation

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8716855B2 (en) * 2010-11-10 2014-05-06 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated circuit system with distributed power supply comprising interposer and voltage regulator module
US9831148B2 (en) 2016-03-11 2017-11-28 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated fan-out package including voltage regulators and methods forming same
KR102663810B1 (ko) * 2016-12-30 2024-05-07 삼성전자주식회사 전자 소자 패키지
US11515291B2 (en) 2018-08-28 2022-11-29 Adeia Semiconductor Inc. Integrated voltage regulator and passive components
CN112913014B (zh) 2018-10-26 2024-03-26 华为技术有限公司 用于集成稳压器(ivr)应用的电感器
US11671010B2 (en) 2020-02-07 2023-06-06 Taiwan Semiconductor Manufacturing Company, Ltd. Power delivery for multi-chip-package using in-package voltage regulator
US12288750B2 (en) * 2021-09-24 2025-04-29 Intel Corporation Conformal power delivery structure for direct chip attach architectures

Also Published As

Publication number Publication date
US20230197619A1 (en) 2023-06-22
US20250070031A1 (en) 2025-02-27
EP4454014A4 (en) 2026-03-25
KR20240128894A (ko) 2024-08-27
WO2023121876A1 (en) 2023-06-29
CN118613911A (zh) 2024-09-06
US12165981B2 (en) 2024-12-10
EP4454014A1 (en) 2024-10-30

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