JP2024122352A5 - - Google Patents
Info
- Publication number
- JP2024122352A5 JP2024122352A5 JP2023029849A JP2023029849A JP2024122352A5 JP 2024122352 A5 JP2024122352 A5 JP 2024122352A5 JP 2023029849 A JP2023029849 A JP 2023029849A JP 2023029849 A JP2023029849 A JP 2023029849A JP 2024122352 A5 JP2024122352 A5 JP 2024122352A5
- Authority
- JP
- Japan
- Prior art keywords
- concentration
- raw material
- flow rate
- gas
- control device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023029849A JP2024122352A (ja) | 2023-02-28 | 2023-02-28 | 濃度制御装置、原料気化システム、濃度制御方法及び濃度制御プログラム |
| KR1020240025209A KR20240133605A (ko) | 2023-02-28 | 2024-02-21 | 농도 제어 장치, 원료 기화 시스템, 농도 제어 방법, 및 농도 제어 프로그램을 격납한 기록 매체 |
| TW113106614A TW202448566A (zh) | 2023-02-28 | 2024-02-23 | 濃度控制裝置、原料氣化系統、濃度控制方法和存儲有濃度控制程式的存儲介質 |
| US18/588,463 US20240286060A1 (en) | 2023-02-28 | 2024-02-27 | Concentration control device, raw material vaporization system, concentration control method, and recording medium storing concentration control program |
| CN202410213862.6A CN118564832A (zh) | 2023-02-28 | 2024-02-27 | 浓度控制装置、原料气化系统、浓度控制方法和存储有浓度控制程序的存储介质 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023029849A JP2024122352A (ja) | 2023-02-28 | 2023-02-28 | 濃度制御装置、原料気化システム、濃度制御方法及び濃度制御プログラム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024122352A JP2024122352A (ja) | 2024-09-09 |
| JP2024122352A5 true JP2024122352A5 (cg-RX-API-DMAC7.html) | 2026-01-26 |
Family
ID=92461882
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023029849A Pending JP2024122352A (ja) | 2023-02-28 | 2023-02-28 | 濃度制御装置、原料気化システム、濃度制御方法及び濃度制御プログラム |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20240286060A1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP2024122352A (cg-RX-API-DMAC7.html) |
| KR (1) | KR20240133605A (cg-RX-API-DMAC7.html) |
| CN (1) | CN118564832A (cg-RX-API-DMAC7.html) |
| TW (1) | TW202448566A (cg-RX-API-DMAC7.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7829898B1 (ja) * | 2025-03-31 | 2026-03-16 | 株式会社エイシング | 遅れ補償システム、方法、及びプログラム |
-
2023
- 2023-02-28 JP JP2023029849A patent/JP2024122352A/ja active Pending
-
2024
- 2024-02-21 KR KR1020240025209A patent/KR20240133605A/ko active Pending
- 2024-02-23 TW TW113106614A patent/TW202448566A/zh unknown
- 2024-02-27 CN CN202410213862.6A patent/CN118564832A/zh active Pending
- 2024-02-27 US US18/588,463 patent/US20240286060A1/en active Pending
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