JP2024121394A5 - - Google Patents
Info
- Publication number
- JP2024121394A5 JP2024121394A5 JP2023028476A JP2023028476A JP2024121394A5 JP 2024121394 A5 JP2024121394 A5 JP 2024121394A5 JP 2023028476 A JP2023028476 A JP 2023028476A JP 2023028476 A JP2023028476 A JP 2023028476A JP 2024121394 A5 JP2024121394 A5 JP 2024121394A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- less
- thickness
- semiconductor device
- insulating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023028476A JP2024121394A (ja) | 2023-02-27 | 2023-02-27 | 半導体装置 |
| US18/435,094 US20240290861A1 (en) | 2023-02-27 | 2024-02-07 | Semiconductor device |
| KR1020240018734A KR102898869B1 (ko) | 2023-02-27 | 2024-02-07 | 반도체 장치 |
| CN202410201026.6A CN118553770A (zh) | 2023-02-27 | 2024-02-23 | 半导体装置 |
| TW113106741A TW202435432A (zh) | 2023-02-27 | 2024-02-26 | 半導體裝置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023028476A JP2024121394A (ja) | 2023-02-27 | 2023-02-27 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024121394A JP2024121394A (ja) | 2024-09-06 |
| JP2024121394A5 true JP2024121394A5 (https=) | 2026-02-20 |
Family
ID=92451311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023028476A Pending JP2024121394A (ja) | 2023-02-27 | 2023-02-27 | 半導体装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20240290861A1 (https=) |
| JP (1) | JP2024121394A (https=) |
| KR (1) | KR102898869B1 (https=) |
| CN (1) | CN118553770A (https=) |
| TW (1) | TW202435432A (https=) |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9142568B2 (en) * | 2010-09-10 | 2015-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing light-emitting display device |
| US8871565B2 (en) | 2010-09-13 | 2014-10-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
| US9443984B2 (en) * | 2010-12-28 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
| EP2880690B1 (en) | 2012-08-03 | 2019-02-27 | Semiconductor Energy Laboratory Co. Ltd. | Semiconductor device with oxide semiconductor stacked film |
| TWI761605B (zh) | 2012-09-14 | 2022-04-21 | 日商半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
| KR102220279B1 (ko) | 2012-10-19 | 2021-02-24 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 산화물 반도체막을 포함하는 다층막 및 반도체 장치의 제작 방법 |
| US9425217B2 (en) | 2013-09-23 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| KR20150065020A (ko) * | 2013-12-04 | 2015-06-12 | 주성엔지니어링(주) | 게이트 절연막 및 그를 이용한 박막 트랜지스터 |
| CN109121438B (zh) | 2016-02-12 | 2022-02-18 | 株式会社半导体能源研究所 | 半导体装置以及包括该半导体装置的显示装置 |
| KR20210010333A (ko) * | 2019-07-19 | 2021-01-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
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2023
- 2023-02-27 JP JP2023028476A patent/JP2024121394A/ja active Pending
-
2024
- 2024-02-07 US US18/435,094 patent/US20240290861A1/en active Pending
- 2024-02-07 KR KR1020240018734A patent/KR102898869B1/ko active Active
- 2024-02-23 CN CN202410201026.6A patent/CN118553770A/zh active Pending
- 2024-02-26 TW TW113106741A patent/TW202435432A/zh unknown