JP2023523921A5 - - Google Patents
Info
- Publication number
- JP2023523921A5 JP2023523921A5 JP2022564144A JP2022564144A JP2023523921A5 JP 2023523921 A5 JP2023523921 A5 JP 2023523921A5 JP 2022564144 A JP2022564144 A JP 2022564144A JP 2022564144 A JP2022564144 A JP 2022564144A JP 2023523921 A5 JP2023523921 A5 JP 2023523921A5
- Authority
- JP
- Japan
- Prior art keywords
- flow
- mode
- control valve
- valve
- lcv
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2025186007A JP2026027337A (ja) | 2020-04-24 | 2025-11-05 | 分流レスガス投与 |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202063015243P | 2020-04-24 | 2020-04-24 | |
| US63/015,243 | 2020-04-24 | ||
| US202062706328P | 2020-08-10 | 2020-08-10 | |
| US62/706,328 | 2020-08-10 | ||
| PCT/US2021/027555 WO2021216352A1 (en) | 2020-04-24 | 2021-04-15 | Divertless gas-dosing |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025186007A Division JP2026027337A (ja) | 2020-04-24 | 2025-11-05 | 分流レスガス投与 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2023523921A JP2023523921A (ja) | 2023-06-08 |
| JP2023523921A5 true JP2023523921A5 (https=) | 2024-04-23 |
| JP7771082B2 JP7771082B2 (ja) | 2025-11-17 |
Family
ID=78270147
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022564144A Active JP7771082B2 (ja) | 2020-04-24 | 2021-04-15 | 分流レスガス投与 |
| JP2025186007A Pending JP2026027337A (ja) | 2020-04-24 | 2025-11-05 | 分流レスガス投与 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025186007A Pending JP2026027337A (ja) | 2020-04-24 | 2025-11-05 | 分流レスガス投与 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US12410517B2 (https=) |
| JP (2) | JP7771082B2 (https=) |
| KR (1) | KR20230007427A (https=) |
| CN (1) | CN115443348A (https=) |
| WO (1) | WO2021216352A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12410517B2 (en) | 2020-04-24 | 2025-09-09 | Lam Research Corporation | Divertless gas-dosing |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4964484A (https=) * | 1972-10-20 | 1974-06-21 | ||
| US7628860B2 (en) * | 2004-04-12 | 2009-12-08 | Mks Instruments, Inc. | Pulsed mass flow delivery system and method |
| WO2007114156A1 (ja) * | 2006-03-30 | 2007-10-11 | Mitsui Engineering & Shipbuilding Co., Ltd. | 原子層成長装置 |
| JP4964484B2 (ja) | 2006-03-31 | 2012-06-27 | ステラケミファ株式会社 | 微細加工処理方法 |
| JP5750281B2 (ja) | 2011-03-07 | 2015-07-15 | 株式会社アルバック | 真空一貫基板処理装置及び成膜方法 |
| JP2013151720A (ja) * | 2012-01-25 | 2013-08-08 | Ulvac Japan Ltd | 真空成膜装置 |
| KR101661483B1 (ko) | 2012-10-22 | 2016-09-30 | 다이요 닛산 가부시키가이샤 | 셀렌화수소 혼합 가스의 공급 방법 및 공급 장치 |
| JP6413293B2 (ja) | 2014-03-27 | 2018-10-31 | 東京エレクトロン株式会社 | 成膜方法及び記憶媒体 |
| JP6359913B2 (ja) * | 2014-08-12 | 2018-07-18 | 東京エレクトロン株式会社 | 処理装置 |
| JP6533740B2 (ja) | 2015-12-15 | 2019-06-19 | Ckd株式会社 | ガス流量監視方法及びガス流量監視装置 |
| US10515783B2 (en) | 2016-02-23 | 2019-12-24 | Lam Research Corporation | Flow through line charge volume |
| JP7107648B2 (ja) | 2017-07-11 | 2022-07-27 | 株式会社堀場エステック | 流体制御装置、流体制御システム、流体制御方法、及び、流体制御装置用プログラム |
| US10947621B2 (en) | 2017-10-23 | 2021-03-16 | Applied Materials, Inc. | Low vapor pressure chemical delivery |
| JP7182988B2 (ja) | 2018-10-12 | 2022-12-05 | 東京エレクトロン株式会社 | 原料ガス供給装置、成膜装置及び原料ガス供給方法 |
| US12410517B2 (en) | 2020-04-24 | 2025-09-09 | Lam Research Corporation | Divertless gas-dosing |
-
2021
- 2021-04-15 US US17/920,578 patent/US12410517B2/en active Active
- 2021-04-15 JP JP2022564144A patent/JP7771082B2/ja active Active
- 2021-04-15 WO PCT/US2021/027555 patent/WO2021216352A1/en not_active Ceased
- 2021-04-15 CN CN202180030493.1A patent/CN115443348A/zh active Pending
- 2021-04-15 KR KR1020227041167A patent/KR20230007427A/ko active Pending
-
2025
- 2025-11-05 JP JP2025186007A patent/JP2026027337A/ja active Pending
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