JP2023522528A5 - - Google Patents

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Publication number
JP2023522528A5
JP2023522528A5 JP2022544860A JP2022544860A JP2023522528A5 JP 2023522528 A5 JP2023522528 A5 JP 2023522528A5 JP 2022544860 A JP2022544860 A JP 2022544860A JP 2022544860 A JP2022544860 A JP 2022544860A JP 2023522528 A5 JP2023522528 A5 JP 2023522528A5
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JP
Japan
Prior art keywords
pulley
end effector
substrate transport
band
transport apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022544860A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023522528A (ja
JP7566916B2 (ja
Filing date
Publication date
Priority claimed from US17/156,007 external-priority patent/US11235935B2/en
Application filed filed Critical
Publication of JP2023522528A publication Critical patent/JP2023522528A/ja
Publication of JP2023522528A5 publication Critical patent/JP2023522528A5/ja
Application granted granted Critical
Publication of JP7566916B2 publication Critical patent/JP7566916B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2022544860A 2020-01-23 2021-01-25 基板搬送装置 Active JP7566916B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US202062964817P 2020-01-23 2020-01-23
US62/964,817 2020-01-23
US17/156,007 2021-01-22
US17/156,007 US11235935B2 (en) 2020-01-23 2021-01-22 Substrate transport apparatus
PCT/US2021/014899 WO2021154640A1 (en) 2020-01-23 2021-01-25 Substrate transport apparatus

Publications (3)

Publication Number Publication Date
JP2023522528A JP2023522528A (ja) 2023-05-31
JP2023522528A5 true JP2023522528A5 (enExample) 2024-02-02
JP7566916B2 JP7566916B2 (ja) 2024-10-15

Family

ID=76969728

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022544860A Active JP7566916B2 (ja) 2020-01-23 2021-01-25 基板搬送装置

Country Status (7)

Country Link
US (2) US11235935B2 (enExample)
EP (1) EP4094286A4 (enExample)
JP (1) JP7566916B2 (enExample)
KR (2) KR102763011B1 (enExample)
CN (2) CN115280481A (enExample)
TW (1) TWI851868B (enExample)
WO (1) WO2021154640A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11235935B2 (en) * 2020-01-23 2022-02-01 Brooks Automation, Inc. Substrate transport apparatus
US11413744B2 (en) 2020-03-03 2022-08-16 Applied Materials, Inc. Multi-turn drive assembly and systems and methods of use thereof
US12163228B2 (en) * 2021-05-18 2024-12-10 Mellanox Technologies, Ltd. CVD system with substrate carrier and associated mechanisms for moving substrate therethrough
KR20250107873A (ko) * 2022-12-28 2025-07-14 가와사끼 쥬고교 가부시끼 가이샤 기판 반송 로봇
CN116750481A (zh) * 2023-06-09 2023-09-15 未来维度(深圳)科技有限公司 一种转运系统
US20250065509A1 (en) * 2023-08-21 2025-02-27 Applied Materials Israel Ltd. Robot blade and wafer breakage prevention system
CN116852339B (zh) * 2023-08-24 2024-10-29 上海广川科技有限公司 一种不等臂长的双臂机械手
JP2025099796A (ja) * 2023-12-22 2025-07-03 株式会社ダイヘン ベルト伝動機構およびこれを備えた搬送ロボット
CN120395789B (zh) * 2025-07-03 2025-09-02 中科芯微智能装备(沈阳)有限公司 一种真空机械手臂
CN121157004A (zh) * 2025-11-21 2025-12-19 沈阳新松半导体设备有限公司 一种基于从动端大角度旋转的传动机构

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JPS6384887A (ja) * 1986-09-24 1988-04-15 三菱電機株式会社 ロボツトの駆動機構
JPS6384883A (ja) * 1986-09-24 1988-04-15 三菱電機株式会社 ロボツトの駆動機構
JPS6384883U (enExample) 1986-11-21 1988-06-03
JPH01240288A (ja) * 1988-03-18 1989-09-25 Mitsubishi Electric Corp 産業用ロボット
US4865577A (en) 1988-09-08 1989-09-12 Trustees Of Columbia University In The City Of New York Noncircular drive
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US6428266B1 (en) * 1995-07-10 2002-08-06 Brooks Automation, Inc. Direct driven robot
US5682795A (en) * 1995-07-10 1997-11-04 Smart Machines Robotic joint using metal bands
US6547510B1 (en) 1998-05-04 2003-04-15 Brooks Automation Inc. Substrate transport apparatus with coaxial drive shafts and dual independent scara arms
JP3944108B2 (ja) 2003-03-31 2007-07-11 株式会社東芝 医療用マニピュレータの動力伝達機構およびマニピュレータ
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JP4816521B2 (ja) 2007-03-15 2011-11-16 株式会社安川電機 ベルト伝動装置及びそれを備えたロボット
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CN104428884B (zh) * 2012-07-05 2017-10-24 应用材料公司 吊杆驱动装置、多臂机械手装置、电子器件处理系统及用于在电子器件制造系统中传送基板的方法
JP2014124741A (ja) 2012-12-27 2014-07-07 Seiko Epson Corp エンドエフェクター
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KR102323370B1 (ko) * 2014-01-05 2021-11-05 어플라이드 머티어리얼스, 인코포레이티드 전자 디바이스 제조에서 기판들을 운송하기 위한 로봇 장치, 구동 조립체들, 및 방법들
CN104948687B (zh) 2015-05-07 2019-03-19 东方晶源微电子科技（北京）有限公司 一种适用于光机检测系统的带传动机构
US11270904B2 (en) 2016-07-12 2022-03-08 Brooks Automation Us, Llc Substrate processing apparatus
JP6384883B1 (ja) 2017-03-27 2018-09-05 株式会社サンセイアールアンドディ 遊技機
US10155309B1 (en) 2017-11-16 2018-12-18 Lam Research Corporation Wafer handling robots with rotational joint encoders
US11192239B2 (en) * 2018-10-05 2021-12-07 Brooks Automation, Inc. Substrate processing apparatus
US11235935B2 (en) * 2020-01-23 2022-02-01 Brooks Automation, Inc. Substrate transport apparatus
US11413744B2 (en) * 2020-03-03 2022-08-16 Applied Materials, Inc. Multi-turn drive assembly and systems and methods of use thereof

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