CN115280481A - 基板运输设备 - Google Patents

基板运输设备 Download PDF

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Publication number
CN115280481A
CN115280481A CN202180023838.0A CN202180023838A CN115280481A CN 115280481 A CN115280481 A CN 115280481A CN 202180023838 A CN202180023838 A CN 202180023838A CN 115280481 A CN115280481 A CN 115280481A
Authority
CN
China
Prior art keywords
pulley
belt
end effector
drive
pulleys
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180023838.0A
Other languages
English (en)
Chinese (zh)
Inventor
D·巴布斯
V·W·曾
R·C·梅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Borucos Automation Usa Co ltd
Original Assignee
Borucos Automation Usa Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Borucos Automation Usa Co ltd filed Critical Borucos Automation Usa Co ltd
Priority to CN202411738385.1A priority Critical patent/CN119650486A/zh
Publication of CN115280481A publication Critical patent/CN115280481A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0052—Gripping heads and other end effectors multiple gripper units or multiple end effectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/104—Program-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H19/00—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion
    • F16H19/001—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for conveying reciprocating or limited rotary motion
    • F16H19/003—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for conveying reciprocating or limited rotary motion comprising a flexible member
    • F16H19/005—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for conveying reciprocating or limited rotary motion comprising a flexible member for conveying oscillating or limited rotary motion
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0452—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the layout of the process chambers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0452—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the layout of the process chambers
    • H10P72/0454—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the layout of the process chambers surrounding a central transfer chamber
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0464—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the construction of the transfer chamber
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7602—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a robot blade or gripped by a gripper for conveyance

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • General Engineering & Computer Science (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
CN202180023838.0A 2020-01-23 2021-01-25 基板运输设备 Pending CN115280481A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202411738385.1A CN119650486A (zh) 2020-01-23 2021-01-25 基板运输设备

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US202062964817P 2020-01-23 2020-01-23
US62/964817 2020-01-23
US17/156007 2021-01-22
US17/156,007 US11235935B2 (en) 2020-01-23 2021-01-22 Substrate transport apparatus
PCT/US2021/014899 WO2021154640A1 (en) 2020-01-23 2021-01-25 Substrate transport apparatus

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN202411738385.1A Division CN119650486A (zh) 2020-01-23 2021-01-25 基板运输设备

Publications (1)

Publication Number Publication Date
CN115280481A true CN115280481A (zh) 2022-11-01

Family

ID=76969728

Family Applications (2)

Application Number Title Priority Date Filing Date
CN202180023838.0A Pending CN115280481A (zh) 2020-01-23 2021-01-25 基板运输设备
CN202411738385.1A Pending CN119650486A (zh) 2020-01-23 2021-01-25 基板运输设备

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN202411738385.1A Pending CN119650486A (zh) 2020-01-23 2021-01-25 基板运输设备

Country Status (7)

Country Link
US (2) US11235935B2 (enExample)
EP (1) EP4094286A4 (enExample)
JP (1) JP7566916B2 (enExample)
KR (2) KR102763011B1 (enExample)
CN (2) CN115280481A (enExample)
TW (1) TWI851868B (enExample)
WO (1) WO2021154640A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116750481A (zh) * 2023-06-09 2023-09-15 未来维度(深圳)科技有限公司 一种转运系统
CN120395789A (zh) * 2025-07-03 2025-08-01 中科芯微智能装备(沈阳)有限公司 一种真空机械手臂
CN121157004A (zh) * 2025-11-21 2025-12-19 沈阳新松半导体设备有限公司 一种基于从动端大角度旋转的传动机构

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* Cited by examiner, † Cited by third party
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US11235935B2 (en) * 2020-01-23 2022-02-01 Brooks Automation, Inc. Substrate transport apparatus
US11413744B2 (en) 2020-03-03 2022-08-16 Applied Materials, Inc. Multi-turn drive assembly and systems and methods of use thereof
US12163228B2 (en) * 2021-05-18 2024-12-10 Mellanox Technologies, Ltd. CVD system with substrate carrier and associated mechanisms for moving substrate therethrough
KR20250107873A (ko) * 2022-12-28 2025-07-14 가와사끼 쥬고교 가부시끼 가이샤 기판 반송 로봇
US20250065509A1 (en) * 2023-08-21 2025-02-27 Applied Materials Israel Ltd. Robot blade and wafer breakage prevention system
CN116852339B (zh) * 2023-08-24 2024-10-29 上海广川科技有限公司 一种不等臂长的双臂机械手
JP2025099796A (ja) * 2023-12-22 2025-07-03 株式会社ダイヘン ベルト伝動機構およびこれを備えた搬送ロボット

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US20100178146A1 (en) * 2009-01-11 2010-07-15 Applied Materials, Inc. Systems, apparatus and methods for transporting substrates
CN103503127A (zh) * 2011-03-11 2014-01-08 布鲁克斯自动化公司 基底处理工具

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US11235935B2 (en) * 2020-01-23 2022-02-01 Brooks Automation, Inc. Substrate transport apparatus
US11413744B2 (en) * 2020-03-03 2022-08-16 Applied Materials, Inc. Multi-turn drive assembly and systems and methods of use thereof

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US20040266574A1 (en) * 2003-03-31 2004-12-30 Kabushiki Kaisha Toshiba Power transmission mechanism and manipulator
US20100178146A1 (en) * 2009-01-11 2010-07-15 Applied Materials, Inc. Systems, apparatus and methods for transporting substrates
CN103503127A (zh) * 2011-03-11 2014-01-08 布鲁克斯自动化公司 基底处理工具

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116750481A (zh) * 2023-06-09 2023-09-15 未来维度(深圳)科技有限公司 一种转运系统
CN120395789A (zh) * 2025-07-03 2025-08-01 中科芯微智能装备(沈阳)有限公司 一种真空机械手臂
CN121157004A (zh) * 2025-11-21 2025-12-19 沈阳新松半导体设备有限公司 一种基于从动端大角度旋转的传动机构

Also Published As

Publication number Publication date
WO2021154640A1 (en) 2021-08-05
US11235935B2 (en) 2022-02-01
TWI851868B (zh) 2024-08-11
KR20220131978A (ko) 2022-09-29
US12162698B2 (en) 2024-12-10
TW202138143A (zh) 2021-10-16
EP4094286A1 (en) 2022-11-30
JP2023522528A (ja) 2023-05-31
CN119650486A (zh) 2025-03-18
US20220153535A1 (en) 2022-05-19
KR102763011B1 (ko) 2025-02-05
US20210229934A1 (en) 2021-07-29
EP4094286A4 (en) 2024-03-06
KR20250022887A (ko) 2025-02-17
JP7566916B2 (ja) 2024-10-15
TW202508789A (zh) 2025-03-01

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