JP2023503313A - 基板処理装置 - Google Patents
基板処理装置 Download PDFInfo
- Publication number
- JP2023503313A JP2023503313A JP2022529710A JP2022529710A JP2023503313A JP 2023503313 A JP2023503313 A JP 2023503313A JP 2022529710 A JP2022529710 A JP 2022529710A JP 2022529710 A JP2022529710 A JP 2022529710A JP 2023503313 A JP2023503313 A JP 2023503313A
- Authority
- JP
- Japan
- Prior art keywords
- antenna
- turns
- substrate processing
- support plate
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000000758 substrate Substances 0.000 title claims abstract description 35
- 238000000926 separation method Methods 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims description 16
- 230000005684 electric field Effects 0.000 description 10
- 239000010409 thin film Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000009616 inductively coupled plasma Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 239000012495 reaction gas Substances 0.000 description 3
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
- H01J37/3211—Antennas, e.g. particular shapes of coils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Plasma Technology (AREA)
- Drying Of Semiconductors (AREA)
- Removal Of Insulation Or Armoring From Wires Or Cables (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
Claims (7)
- 支持プレートと,
前記支持プレートの一面と並んで配置され,内側端から一方向に沿って巻かれる第1乃至第nターン(n=3より大きい整数)を有するアンテナと,
前記第1乃至第nターンの離隔距離を調節可能な距離調節ユニットと,を含む基板処理装置。 - 前記アンテナの外側端は固定され,
前記距離調節ユニットは,
前記アンテナの内側端に連結されるホルダと,
前記ホルダに連結されて前記アンテナを前記一方向又は,前記一方向とは反対方向に回転可能な駆動モータと,を備える請求項1記載の基板処理装置。 - 前記距離調節ユニットは,m-1ターンとmターンとの間に固定されて前記mターンの移動を制限する複数のサポータを更に備える請求項2記載の基板処理装置。
- 前記支持プレートは,中心から離隔されて配置される複数の固定溝を有するが,
前記サポータは前記固定溝にそれぞれ挿入固定される請求項3記載の基板処理装置。 - 前記距離調節ユニットは,m-1ターンとmターンとの間に固定されて前記mターンの移動を制限する複数のサポータを更に備える請求項1記載の基板処理装置(m=2,3,…,n-1の整数)。
- 前記支持プレートは,中心から離隔されて配置される複数の固定溝を有するが,
前記サポータは前記固定溝にそれぞれ挿入固定される請求項5記載の基板処理装置。 - 前記基板処理装置は,
基板に対する工程が行われる内部空間を有し,上部が開放されたチェンバと,
前記チェンバ内に設置されて前記基板が置かれるサセプタと,を更に含むが,
前記支持プレートは前記チェンバの上部に設置される請求項1~請求項6いずれか一項記載の基板処理装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2019-0150361 | 2019-11-21 | ||
KR1020190150361A KR102309660B1 (ko) | 2019-11-21 | 2019-11-21 | 기판 처리 장치 |
PCT/KR2020/016397 WO2021101279A1 (ko) | 2019-11-21 | 2020-11-19 | 기판 처리 장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2023503313A true JP2023503313A (ja) | 2023-01-27 |
JP7390760B2 JP7390760B2 (ja) | 2023-12-04 |
Family
ID=75981380
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022529710A Active JP7390760B2 (ja) | 2019-11-21 | 2020-11-19 | 基板処理装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20230005712A1 (ja) |
JP (1) | JP7390760B2 (ja) |
KR (1) | KR102309660B1 (ja) |
CN (1) | CN114730691A (ja) |
TW (1) | TWI774132B (ja) |
WO (1) | WO2021101279A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW202212620A (zh) * | 2020-06-02 | 2022-04-01 | 荷蘭商Asm Ip私人控股有限公司 | 處理基板之設備、形成膜之方法、及控制用於處理基板之設備之方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0955375A (ja) * | 1995-06-06 | 1997-02-25 | Matsushita Electric Ind Co Ltd | プラズマ処理方法および装置 |
JP2001353440A (ja) * | 2000-06-14 | 2001-12-25 | Matsushita Electric Ind Co Ltd | プラズマ処理方法及び装置 |
JP2007214262A (ja) * | 2006-02-08 | 2007-08-23 | Matsushita Electric Ind Co Ltd | プラズマ処理方法及び装置 |
JP2012253349A (ja) * | 2011-05-31 | 2012-12-20 | Semes Co Ltd | アンテナユニット、それを含む基板処理装置、及び前記装置を利用する基板処理方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IL136219A0 (en) | 1997-11-20 | 2001-05-20 | Xacct Technologies Inc | Network accounting and billing system and method |
US6229264B1 (en) * | 1999-03-31 | 2001-05-08 | Lam Research Corporation | Plasma processor with coil having variable rf coupling |
KR100530596B1 (ko) * | 2004-03-30 | 2005-11-23 | 어댑티브프라즈마테크놀로지 주식회사 | 웨이퍼 상에 높은 공정 균일도를 얻기 위한 플라즈마 소스코일을 채용하는 플라즈마 장비 |
KR101468730B1 (ko) * | 2007-08-31 | 2014-12-09 | 최대규 | 다중 무선 주파수 안테나를 갖는 유도 결합 플라즈마반응기 |
US8414736B2 (en) * | 2009-09-03 | 2013-04-09 | Applied Materials, Inc. | Plasma reactor with tiltable overhead RF inductive source |
US8390516B2 (en) * | 2009-11-23 | 2013-03-05 | Harris Corporation | Planar communications antenna having an epicyclic structure and isotropic radiation, and associated methods |
KR20130043368A (ko) * | 2011-10-20 | 2013-04-30 | 주성엔지니어링(주) | 플라즈마 발생용 안테나 및 이를 포함하는 플라즈마 처리 장치 |
-
2019
- 2019-11-21 KR KR1020190150361A patent/KR102309660B1/ko active IP Right Grant
-
2020
- 2020-11-19 CN CN202080080474.5A patent/CN114730691A/zh active Pending
- 2020-11-19 WO PCT/KR2020/016397 patent/WO2021101279A1/ko active Application Filing
- 2020-11-19 JP JP2022529710A patent/JP7390760B2/ja active Active
- 2020-11-19 US US17/778,757 patent/US20230005712A1/en active Pending
- 2020-11-20 TW TW109140765A patent/TWI774132B/zh active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0955375A (ja) * | 1995-06-06 | 1997-02-25 | Matsushita Electric Ind Co Ltd | プラズマ処理方法および装置 |
JP2001353440A (ja) * | 2000-06-14 | 2001-12-25 | Matsushita Electric Ind Co Ltd | プラズマ処理方法及び装置 |
JP2007214262A (ja) * | 2006-02-08 | 2007-08-23 | Matsushita Electric Ind Co Ltd | プラズマ処理方法及び装置 |
JP2012253349A (ja) * | 2011-05-31 | 2012-12-20 | Semes Co Ltd | アンテナユニット、それを含む基板処理装置、及び前記装置を利用する基板処理方法 |
US9496121B2 (en) * | 2011-05-31 | 2016-11-15 | Semes Co., Ltd. | Antenna units, substrate treating apparatuses including the same, and substrate treating methods using the apparatuses |
Also Published As
Publication number | Publication date |
---|---|
TW202135124A (zh) | 2021-09-16 |
TWI774132B (zh) | 2022-08-11 |
WO2021101279A1 (ko) | 2021-05-27 |
KR102309660B1 (ko) | 2021-10-07 |
CN114730691A (zh) | 2022-07-08 |
US20230005712A1 (en) | 2023-01-05 |
KR20210062309A (ko) | 2021-05-31 |
JP7390760B2 (ja) | 2023-12-04 |
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