JP2023164878A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2023164878A5 JP2023164878A5 JP2023137349A JP2023137349A JP2023164878A5 JP 2023164878 A5 JP2023164878 A5 JP 2023164878A5 JP 2023137349 A JP2023137349 A JP 2023137349A JP 2023137349 A JP2023137349 A JP 2023137349A JP 2023164878 A5 JP2023164878 A5 JP 2023164878A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- cavity
- adjacent
- spherical
- depth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 10
- 239000011521 glass Substances 0.000 claims 1
- 239000002241 glass-ceramic Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102018110211.9A DE102018110211A1 (de) | 2018-04-27 | 2018-04-27 | Verfahren zum Erzeugen feiner Strukturen im Volumen eines Substrates aus sprödharten Material |
| DE102018110211.9 | 2018-04-27 | ||
| JP2019085719A JP7562242B2 (ja) | 2018-04-27 | 2019-04-26 | 脆性材料から成る基板の容積に微細な構造を形成する方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019085719A Division JP7562242B2 (ja) | 2018-04-27 | 2019-04-26 | 脆性材料から成る基板の容積に微細な構造を形成する方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2023164878A JP2023164878A (ja) | 2023-11-14 |
| JP2023164878A5 true JP2023164878A5 (https=) | 2025-01-20 |
Family
ID=68205389
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019085719A Active JP7562242B2 (ja) | 2018-04-27 | 2019-04-26 | 脆性材料から成る基板の容積に微細な構造を形成する方法 |
| JP2023137349A Pending JP2023164878A (ja) | 2018-04-27 | 2023-08-25 | 脆性材料から成る基板の容積に微細な構造を形成する方法 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019085719A Active JP7562242B2 (ja) | 2018-04-27 | 2019-04-26 | 脆性材料から成る基板の容積に微細な構造を形成する方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (3) | US11534754B2 (https=) |
| JP (2) | JP7562242B2 (https=) |
| KR (2) | KR102864923B1 (https=) |
| CN (2) | CN110405369B (https=) |
| DE (1) | DE102018110211A1 (https=) |
| TW (1) | TWI791824B (https=) |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102018110211A1 (de) * | 2018-04-27 | 2019-10-31 | Schott Ag | Verfahren zum Erzeugen feiner Strukturen im Volumen eines Substrates aus sprödharten Material |
| JP7139886B2 (ja) * | 2018-10-30 | 2022-09-21 | Agc株式会社 | 孔を有するガラス基板の製造方法、およびアニール用ガラス積層体 |
| DE102020105540A1 (de) * | 2019-10-11 | 2021-04-15 | Trumpf Laser- Und Systemtechnik Gmbh | Optisches Stanzen von Mikrolöchern in Dünnglas |
| JP2023015410A (ja) * | 2019-11-07 | 2023-02-01 | 株式会社エンプラス | 貫通孔パターンの形成されたガラス板、その製造方法、及び、マイクロ流路チップ |
| DE102020114195A1 (de) | 2020-05-27 | 2021-12-02 | Lpkf Laser & Electronics Aktiengesellschaft | Verfahren zum Einbringen einer Ausnehmung in ein Substrat |
| DE102020118939A1 (de) * | 2020-07-17 | 2022-01-20 | Schott Ag | Glaswafer und Glaselement für Drucksensoren |
| EP4139255B1 (de) * | 2020-07-28 | 2026-01-07 | LPKF Laser & Electronics SE | Substrat aus glas und ein verfahren zu seiner herstellung |
| JP7679688B2 (ja) * | 2020-07-28 | 2025-05-20 | Agc株式会社 | ガラス部材 |
| WO2022045355A1 (ja) * | 2020-08-31 | 2022-03-03 | 藤森工業株式会社 | 液体試料分析用マイクロチップの製造方法 |
| US12486197B2 (en) * | 2020-09-04 | 2025-12-02 | Schott Ag | Method of surface structuring a substrate body and substrate body |
| DE102020126856A1 (de) * | 2020-10-13 | 2022-04-14 | Schott Ag | Glaselement mit strukturierter Wandung und Verfahren zu dessen Herstellung |
| EP3984970B1 (en) * | 2020-10-14 | 2026-02-25 | Schott Ag | Method for processing glass by alkaline etching |
| EP4011846A1 (en) * | 2020-12-09 | 2022-06-15 | Schott Ag | Method of structuring a glass element and structured glass element produced thereby |
| KR102919128B1 (ko) * | 2021-06-25 | 2026-01-28 | 삼성디스플레이 주식회사 | 커버 윈도우 제조 시스템 및 커버 윈도우 제조 방법 |
| US12472498B2 (en) | 2021-12-01 | 2025-11-18 | Honeywell Federal Manufacturing & Technologies, Llc | Microfluidic device and method of manufacture thereof |
| DE102022104180B4 (de) | 2022-02-22 | 2026-04-30 | Schott Ag | Abschirmmaske für ionisierende Streustrahlung und Verfahren zu dessen Herstellung |
| DE102022110353A1 (de) | 2022-04-28 | 2023-11-02 | Trumpf Laser- Und Systemtechnik Gmbh | Verfahren zur Trennung eines Werkstücks |
| DE102022112386A1 (de) | 2022-05-17 | 2023-11-23 | Schott Ag | Flexibles Glaselement und Verfahren zu dessen Herstellung |
| DE102022113107B4 (de) | 2022-05-24 | 2024-02-01 | Schott Ag | Aufnahme für ein Lichtleiterbündel, Verfahren und Zwischenprodukt zu dessen Herstellung |
| DE102022114646A1 (de) | 2022-06-10 | 2023-12-21 | Trumpf Laser Gmbh | Verfahren und Vorrichtung zum Verarbeiten mindestens eines Teilbereichs eines Schichtsystems |
| DE102022114645A1 (de) | 2022-06-10 | 2023-12-21 | Trumpf Laser Gmbh | Verfahren und Vorrichtung zum Verarbeiten mindestens eines Teilbereichs eines Schichtsystems |
| DE102022116783B3 (de) * | 2022-07-05 | 2023-09-14 | Lpkf Laser & Electronics Aktiengesellschaft | Mikrostruktur aus Glas, Mikro-Mechanik und zugehörige Verwendung |
| EP4344619A1 (en) * | 2022-09-29 | 2024-04-03 | Schott Ag | Laser welded enclosure for electronics, circuitry or sensors |
| CN115548839B (zh) * | 2022-11-07 | 2025-09-26 | 山东大学 | 一种激光增益器件及其制备方法 |
| DE102022130575A1 (de) * | 2022-11-18 | 2024-05-23 | Schott Ag | Verfahren zum Strukturieren von Glaselementen durch Ätzen mit hohen Ätzraten |
| DE102022130976B3 (de) | 2022-11-23 | 2023-11-30 | Lpkf Laser & Electronics Aktiengesellschaft | Monolithische Membran aus Glas, Doppel-Vertikalmembran-Anordnung, mikromechanische Federstruktur und zugehöriges Herstellungsverfahren |
| DE102023115623A1 (de) * | 2023-06-15 | 2024-12-19 | Schott Ag | Glaselement und System zur Untersuchung von biologischem Material sowie Verfahren zu dessen Herstellung |
| DE102023126355A1 (de) * | 2023-09-27 | 2025-03-27 | Schott Ag | Verfahren zur Herstellung von ultradünnen Glaselementen und verfahrensgemäß hergestelltes Glaselement sowie deren Verwendung |
| WO2025122346A1 (en) * | 2023-12-06 | 2025-06-12 | Corning Incorporated | Methods for forming fiducial marks on glass-based substrates |
| DE102024115927A1 (de) | 2024-06-07 | 2025-12-11 | Schott Ag | Strukturiertes Glaselement und Verfahren zu dessen Herstellung |
| CN120326128B (zh) * | 2025-06-18 | 2025-10-14 | 杭州银湖激光科技有限公司 | 一种陶瓷基板的激光加工方法 |
Family Cites Families (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6857449B1 (en) * | 1998-01-20 | 2005-02-22 | Caliper Life Sciences, Inc. | Multi-layer microfluidic devices |
| US6167910B1 (en) | 1998-01-20 | 2001-01-02 | Caliper Technologies Corp. | Multi-layer microfluidic devices |
| JP2001089198A (ja) * | 1999-09-22 | 2001-04-03 | Asahi Glass Co Ltd | 半導体装置用石英ガラス治具およびその製造方法 |
| KR100460769B1 (ko) * | 2001-11-19 | 2004-12-08 | 홍석인 | 스크린프린트법을 이용한 바이오마이크로시스템용미세유체 흐름관 제작 방법 |
| CA2428187C (en) * | 2002-05-08 | 2012-10-02 | National Research Council Of Canada | Method of fabricating sub-micron structures in transparent dielectric materials |
| JP2005152693A (ja) | 2003-11-20 | 2005-06-16 | Seiko Epson Corp | 構造体の製造方法、液滴吐出ヘッド、液滴吐出装置 |
| US9138913B2 (en) * | 2005-09-08 | 2015-09-22 | Imra America, Inc. | Transparent material processing with an ultrashort pulse laser |
| US20090013724A1 (en) * | 2006-02-22 | 2009-01-15 | Nippon Sheet Glass Company, Limited | Glass Processing Method Using Laser and Processing Device |
| JP5026816B2 (ja) * | 2007-02-26 | 2012-09-19 | 東ソー・クォーツ株式会社 | 石英ガラス治具及びその製造方法 |
| US8173038B2 (en) | 2008-04-18 | 2012-05-08 | Corning Incorporated | Methods and systems for forming microstructures in glass substrates |
| US20110207323A1 (en) * | 2010-02-25 | 2011-08-25 | Robert Ditizio | Method of forming and patterning conformal insulation layer in vias and etched structures |
| DE102010002991A1 (de) | 2010-03-18 | 2011-09-22 | Robert Bosch Gmbh | Verfahren zur Herstellung einer mikrofluidischen Vorrichtung |
| DE102011085371B4 (de) | 2011-10-28 | 2020-03-26 | Robert Bosch Gmbh | Lab-on-Chip und Herstellungsverfahren für einen Lab-on-Chip |
| JP6422197B2 (ja) | 2012-03-13 | 2018-11-14 | 株式会社朝日Fr研究所 | マイクロ化学チップを製造する方法 |
| EP2719460B1 (en) | 2012-10-12 | 2016-12-14 | Sony DADC Austria AG | Microfluidic devices |
| KR101469506B1 (ko) * | 2013-03-05 | 2014-12-05 | 한국세라믹기술원 | 강도가 개선된 화학강화유리의 제조방법 |
| DE102013103370A1 (de) | 2013-04-04 | 2014-10-09 | Lpkf Laser & Electronics Ag | Verfahren zum Einbringen von Durchbrechungen in ein Glassubstrat sowie ein derart hergestelltes Glassubstrat |
| JP6353451B2 (ja) | 2013-08-23 | 2018-07-04 | 株式会社朝日Fr研究所 | マイクロ化学チップ及び反応装置 |
| US9517929B2 (en) * | 2013-11-19 | 2016-12-13 | Rofin-Sinar Technologies Inc. | Method of fabricating electromechanical microchips with a burst ultrafast laser pulses |
| US10293436B2 (en) * | 2013-12-17 | 2019-05-21 | Corning Incorporated | Method for rapid laser drilling of holes in glass and products made therefrom |
| US20150165563A1 (en) | 2013-12-17 | 2015-06-18 | Corning Incorporated | Stacked transparent material cutting with ultrafast laser beam optics, disruptive layers and other layers |
| EP3088076A4 (en) | 2013-12-27 | 2017-08-30 | ASAHI FR R&D Co., Ltd. | Three-dimensional microchemical chip |
| CN103992948B (zh) | 2014-05-30 | 2016-11-02 | 南京农业大学 | 一种用于细胞迁移研究的微纳流控器件 |
| TW201546005A (zh) * | 2014-06-09 | 2015-12-16 | Wintek Corp | 覆蓋板與其製造方法 |
| DE102014113339A1 (de) | 2014-09-16 | 2016-03-17 | Lpkf Laser & Electronics Ag | Verfahren zur Erzeugung von Ausnehmungen in einem Material |
| KR20170044143A (ko) * | 2014-09-16 | 2017-04-24 | 엘피케이에프 레이저 앤드 일렉트로닉스 악티엔게젤샤프트 | 판 모양의 작업물 안으로 적어도 하나의 컷아웃부 또는 구멍을 도입하기 위한 방법 |
| JP6734202B2 (ja) | 2015-01-13 | 2020-08-05 | ロフィン−シナール テクノロジーズ エルエルシー | 脆性材料をスクライブして化学エッチングする方法およびシステム |
| US10876089B2 (en) * | 2016-10-05 | 2020-12-29 | Boyang Zhang | Apparatus and method for high-fidelity podocyte cultivation |
| TWI859122B (zh) * | 2017-07-24 | 2024-10-21 | 美商康寧公司 | 精密結構玻璃物件、積體電路封裝、光學元件、微流體元件及其製造方法 |
| DE102018110211A1 (de) * | 2018-04-27 | 2019-10-31 | Schott Ag | Verfahren zum Erzeugen feiner Strukturen im Volumen eines Substrates aus sprödharten Material |
-
2018
- 2018-04-27 DE DE102018110211.9A patent/DE102018110211A1/de active Pending
-
2019
- 2019-04-26 US US16/395,569 patent/US11534754B2/en active Active
- 2019-04-26 KR KR1020190049154A patent/KR102864923B1/ko active Active
- 2019-04-26 JP JP2019085719A patent/JP7562242B2/ja active Active
- 2019-04-26 CN CN201910344052.3A patent/CN110405369B/zh active Active
- 2019-04-26 CN CN202310008556.4A patent/CN115922114A/zh active Pending
- 2019-04-26 TW TW108114740A patent/TWI791824B/zh active
-
2022
- 2022-08-23 US US17/893,860 patent/US12172157B2/en active Active
-
2023
- 2023-08-25 JP JP2023137349A patent/JP2023164878A/ja active Pending
-
2024
- 2024-10-23 US US18/924,649 patent/US20250050329A1/en active Pending
-
2025
- 2025-09-22 KR KR1020250136441A patent/KR20250151213A/ko active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2023164878A5 (https=) | ||
| US7387472B2 (en) | System of brick with rod for retaining wall | |
| ES2770506T3 (es) | Accionamiento de tornillo | |
| JP2010091087A (ja) | 螺子におけるドライバービット嵌合用十字溝の構造 | |
| JP2019030962A5 (https=) | ||
| US903906A (en) | Interlocking brick. | |
| US1394406A (en) | Building-block and wall | |
| JP2015086607A (ja) | 建築板 | |
| US1041389A (en) | Concrete wall construction. | |
| JP2023060888A5 (https=) | ||
| US699537A (en) | Building stone or brick. | |
| JP2024006930A (ja) | 硬質材料で作られたリンク付きリストレット | |
| JP2024141147A5 (https=) | ||
| US787787A (en) | Concrete building-block. | |
| US818551A (en) | Building-block. | |
| KR200443546Y1 (ko) | 벽돌 | |
| US57461A (en) | Improved brick | |
| US741993A (en) | Brick tile. | |
| US1093127A (en) | Building-block. | |
| US915608A (en) | Building block or brick. | |
| US989467A (en) | Interlocking brick. | |
| USD28084S (en) | Design for a tile | |
| US285308A (en) | Brick | |
| US1125908A (en) | Floor-block for building constructions. | |
| US966226A (en) | Building-block. |