JP2023058124A5 - - Google Patents

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Publication number
JP2023058124A5
JP2023058124A5 JP2021167920A JP2021167920A JP2023058124A5 JP 2023058124 A5 JP2023058124 A5 JP 2023058124A5 JP 2021167920 A JP2021167920 A JP 2021167920A JP 2021167920 A JP2021167920 A JP 2021167920A JP 2023058124 A5 JP2023058124 A5 JP 2023058124A5
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JP
Japan
Prior art keywords
groove
hole
bonding surface
structure according
forming step
Prior art date
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Application number
JP2021167920A
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English (en)
Japanese (ja)
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JP2023058124A (ja
JP7844129B2 (ja
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Priority to JP2021167920A priority Critical patent/JP7844129B2/ja
Priority claimed from JP2021167920A external-priority patent/JP7844129B2/ja
Publication of JP2023058124A publication Critical patent/JP2023058124A/ja
Publication of JP2023058124A5 publication Critical patent/JP2023058124A5/ja
Application granted granted Critical
Publication of JP7844129B2 publication Critical patent/JP7844129B2/ja
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JP2021167920A 2021-10-13 2021-10-13 構造体とその製造方法 Active JP7844129B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2021167920A JP7844129B2 (ja) 2021-10-13 2021-10-13 構造体とその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021167920A JP7844129B2 (ja) 2021-10-13 2021-10-13 構造体とその製造方法

Publications (3)

Publication Number Publication Date
JP2023058124A JP2023058124A (ja) 2023-04-25
JP2023058124A5 true JP2023058124A5 (https=) 2024-10-07
JP7844129B2 JP7844129B2 (ja) 2026-04-13

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ID=86068969

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021167920A Active JP7844129B2 (ja) 2021-10-13 2021-10-13 構造体とその製造方法

Country Status (1)

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JP (1) JP7844129B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7696954B2 (ja) * 2023-06-12 2025-06-23 キヤノン株式会社 液体吐出チップ、液体吐出用ウエハ、および液体吐出チップの製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6792225B2 (ja) 2014-10-08 2020-11-25 ローム株式会社 インクジェット装置およびインクジェット装置の製造方法
EP3424720B1 (en) 2016-03-03 2020-09-23 Ricoh Company, Ltd. Liquid-discharging head, liquid-discharging unit, and device for discharging liquid

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