JP7844129B2 - 構造体とその製造方法 - Google Patents

構造体とその製造方法

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Publication number
JP7844129B2
JP7844129B2 JP2021167920A JP2021167920A JP7844129B2 JP 7844129 B2 JP7844129 B2 JP 7844129B2 JP 2021167920 A JP2021167920 A JP 2021167920A JP 2021167920 A JP2021167920 A JP 2021167920A JP 7844129 B2 JP7844129 B2 JP 7844129B2
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Japan
Prior art keywords
groove
hole
side wall
opening
joining surface
Prior art date
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JP2021167920A
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English (en)
Japanese (ja)
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JP2023058124A (ja
JP2023058124A5 (https=
Inventor
雄貴 小森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2021167920A priority Critical patent/JP7844129B2/ja
Publication of JP2023058124A publication Critical patent/JP2023058124A/ja
Publication of JP2023058124A5 publication Critical patent/JP2023058124A5/ja
Application granted granted Critical
Publication of JP7844129B2 publication Critical patent/JP7844129B2/ja
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JP2021167920A 2021-10-13 2021-10-13 構造体とその製造方法 Active JP7844129B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2021167920A JP7844129B2 (ja) 2021-10-13 2021-10-13 構造体とその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021167920A JP7844129B2 (ja) 2021-10-13 2021-10-13 構造体とその製造方法

Publications (3)

Publication Number Publication Date
JP2023058124A JP2023058124A (ja) 2023-04-25
JP2023058124A5 JP2023058124A5 (https=) 2024-10-07
JP7844129B2 true JP7844129B2 (ja) 2026-04-13

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ID=86068969

Family Applications (1)

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JP2021167920A Active JP7844129B2 (ja) 2021-10-13 2021-10-13 構造体とその製造方法

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JP (1) JP7844129B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7696954B2 (ja) * 2023-06-12 2025-06-23 キヤノン株式会社 液体吐出チップ、液体吐出用ウエハ、および液体吐出チップの製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016076691A (ja) 2014-10-08 2016-05-12 ローム株式会社 インクジェット装置およびインクジェット装置の製造方法
WO2017150085A1 (ja) 2016-03-03 2017-09-08 株式会社リコー 液体吐出ヘッド、液体吐出ユニット、液体を吐出する装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016076691A (ja) 2014-10-08 2016-05-12 ローム株式会社 インクジェット装置およびインクジェット装置の製造方法
WO2017150085A1 (ja) 2016-03-03 2017-09-08 株式会社リコー 液体吐出ヘッド、液体吐出ユニット、液体を吐出する装置

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Publication number Publication date
JP2023058124A (ja) 2023-04-25

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