JP2023057047A5 - - Google Patents

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Publication number
JP2023057047A5
JP2023057047A5 JP2022160497A JP2022160497A JP2023057047A5 JP 2023057047 A5 JP2023057047 A5 JP 2023057047A5 JP 2022160497 A JP2022160497 A JP 2022160497A JP 2022160497 A JP2022160497 A JP 2022160497A JP 2023057047 A5 JP2023057047 A5 JP 2023057047A5
Authority
JP
Japan
Prior art keywords
substrate
elastic seal
shielding
shielding member
porous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022160497A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023057047A (ja
Filing date
Publication date
Application filed filed Critical
Priority to CN202280067725.5A priority Critical patent/CN118176088A/zh
Priority to PCT/JP2022/037612 priority patent/WO2023058751A1/ja
Priority to KR1020247009890A priority patent/KR20240087743A/ko
Priority to TW111138207A priority patent/TW202320156A/zh
Priority to US18/698,305 priority patent/US20240416480A1/en
Priority to EP22878618.2A priority patent/EP4414127A4/en
Publication of JP2023057047A publication Critical patent/JP2023057047A/ja
Publication of JP2023057047A5 publication Critical patent/JP2023057047A5/ja
Pending legal-status Critical Current

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JP2022160497A 2021-10-08 2022-10-04 基板吸着部材、弾性シール組立体、トップリング、および基板処理装置 Pending JP2023057047A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
CN202280067725.5A CN118176088A (zh) 2021-10-08 2022-10-07 基板吸附构件、弹性密封组装体、顶环及基板处理装置
PCT/JP2022/037612 WO2023058751A1 (ja) 2021-10-08 2022-10-07 基板吸着部材、弾性シール組立体、トップリング、および基板処理装置
KR1020247009890A KR20240087743A (ko) 2021-10-08 2022-10-07 기판 흡착 부재, 탄성 시일 조립체, 톱링 및 기판 처리 장치
TW111138207A TW202320156A (zh) 2021-10-08 2022-10-07 基板吸附構件、彈性密封組合體、頂環、及基板處理裝置
US18/698,305 US20240416480A1 (en) 2021-10-08 2022-10-07 Substrate suction member, elastic seal assembly, top ring, and substrate processing apparatus
EP22878618.2A EP4414127A4 (en) 2021-10-08 2022-10-07 SUBSTRATE SUCTION ELEMENT, ELASTIC SEAL ASSEMBLY, UPPER RING AND SUBSTRATE TREATMENT DEVICE

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021166120 2021-10-08
JP2021166120 2021-10-08

Publications (2)

Publication Number Publication Date
JP2023057047A JP2023057047A (ja) 2023-04-20
JP2023057047A5 true JP2023057047A5 (enExample) 2025-06-27

Family

ID=86004786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022160497A Pending JP2023057047A (ja) 2021-10-08 2022-10-04 基板吸着部材、弾性シール組立体、トップリング、および基板処理装置

Country Status (1)

Country Link
JP (1) JP2023057047A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023140438A (ja) * 2022-03-23 2023-10-05 株式会社ディスコ 保持パッド及び搬送装置

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