JP2023031371A - 光透過性積層体の検査方法および検査装置 - Google Patents

光透過性積層体の検査方法および検査装置 Download PDF

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Publication number
JP2023031371A
JP2023031371A JP2021136809A JP2021136809A JP2023031371A JP 2023031371 A JP2023031371 A JP 2023031371A JP 2021136809 A JP2021136809 A JP 2021136809A JP 2021136809 A JP2021136809 A JP 2021136809A JP 2023031371 A JP2023031371 A JP 2023031371A
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JP
Japan
Prior art keywords
light
laminate
transmitting
lower grip
light transmissive
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021136809A
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English (en)
Japanese (ja)
Inventor
浩次 自然
Koji Shizen
裕司 山下
Yuji Yamashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
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Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority to JP2021136809A priority Critical patent/JP2023031371A/ja
Priority to CN202280057312.9A priority patent/CN117836612A/zh
Priority to KR1020247005419A priority patent/KR20240047381A/ko
Priority to PCT/JP2022/025044 priority patent/WO2023026660A1/ja
Priority to TW111127766A priority patent/TW202309512A/zh
Publication of JP2023031371A publication Critical patent/JP2023031371A/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2021136809A 2021-08-25 2021-08-25 光透過性積層体の検査方法および検査装置 Pending JP2023031371A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2021136809A JP2023031371A (ja) 2021-08-25 2021-08-25 光透過性積層体の検査方法および検査装置
CN202280057312.9A CN117836612A (zh) 2021-08-25 2022-06-23 透光性层叠体的检查方法及检查装置
KR1020247005419A KR20240047381A (ko) 2021-08-25 2022-06-23 광 투과성 적층체의 검사 방법 및 검사 장치
PCT/JP2022/025044 WO2023026660A1 (ja) 2021-08-25 2022-06-23 光透過性積層体の検査方法および検査装置
TW111127766A TW202309512A (zh) 2021-08-25 2022-07-25 光透射性積層體之檢查方法及檢查裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021136809A JP2023031371A (ja) 2021-08-25 2021-08-25 光透過性積層体の検査方法および検査装置

Publications (1)

Publication Number Publication Date
JP2023031371A true JP2023031371A (ja) 2023-03-09

Family

ID=85322709

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021136809A Pending JP2023031371A (ja) 2021-08-25 2021-08-25 光透過性積層体の検査方法および検査装置

Country Status (5)

Country Link
JP (1) JP2023031371A (ko)
KR (1) KR20240047381A (ko)
CN (1) CN117836612A (ko)
TW (1) TW202309512A (ko)
WO (1) WO2023026660A1 (ko)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1006378C2 (nl) * 1997-06-23 1998-12-24 Tno Werkwijze en inrichting voor het inspecteren van een voorwerp met betrekking tot verstoringen.
JP2001264259A (ja) * 2000-03-16 2001-09-26 Konica Corp シート検査装置
JP4560916B2 (ja) * 2000-08-11 2010-10-13 味の素株式会社 可撓性プラスチック容器の異物検査装置
JP4670090B2 (ja) * 2000-08-11 2011-04-13 味の素株式会社 可撓性プラスチック容器の異物検査装置及びその異物検査方法
JP2005062165A (ja) 2003-07-28 2005-03-10 Nitto Denko Corp シート状製品の検査方法、検査システム、シート状製品、及び、画像表示装置
JP2005134573A (ja) * 2003-10-29 2005-05-26 Seiko Epson Corp 検査方法および検査装置
KR100789659B1 (ko) * 2005-03-31 2007-12-31 에버테크노 주식회사 편광필름 검사장치 및 방법
JP2012002676A (ja) * 2010-06-17 2012-01-05 Toshiba Corp マスク欠陥検査装置およびマスク欠陥検査方法
US9816940B2 (en) * 2015-01-21 2017-11-14 Kla-Tencor Corporation Wafer inspection with focus volumetric method

Also Published As

Publication number Publication date
WO2023026660A1 (ja) 2023-03-02
CN117836612A (zh) 2024-04-05
KR20240047381A (ko) 2024-04-12
TW202309512A (zh) 2023-03-01

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