JP2022551129A5 - - Google Patents

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Publication number
JP2022551129A5
JP2022551129A5 JP2022520938A JP2022520938A JP2022551129A5 JP 2022551129 A5 JP2022551129 A5 JP 2022551129A5 JP 2022520938 A JP2022520938 A JP 2022520938A JP 2022520938 A JP2022520938 A JP 2022520938A JP 2022551129 A5 JP2022551129 A5 JP 2022551129A5
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Japan
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image
area
pattern
inspected
reflected
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JP2022520938A
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English (en)
Japanese (ja)
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JP2022551129A (ja
JP7538221B2 (ja
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Priority claimed from PCT/IL2020/051062 external-priority patent/WO2021070174A1/en
Publication of JP2022551129A publication Critical patent/JP2022551129A/ja
Publication of JP2022551129A5 publication Critical patent/JP2022551129A5/ja
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Publication of JP7538221B2 publication Critical patent/JP7538221B2/ja
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JP2022520938A 2019-10-06 2020-09-30 ハイブリッド３ｄ検査システム Active JP7538221B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201962911279P 2019-10-06 2019-10-06
US62/911,279 2019-10-06
PCT/IL2020/051062 WO2021070174A1 (en) 2019-10-06 2020-09-30 Hybrid 3d inspection system

Publications (3)

Publication Number Publication Date
JP2022551129A JP2022551129A (ja) 2022-12-07
JP2022551129A5 true JP2022551129A5 (https=) 2023-09-11
JP7538221B2 JP7538221B2 (ja) 2024-08-21

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JP2022520938A Active JP7538221B2 (ja) 2019-10-06 2020-09-30 ハイブリッド３ｄ検査システム

Country Status (6)

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US (1) US11313794B2 (https=)
EP (1) EP4028719B1 (https=)
JP (1) JP7538221B2 (https=)
KR (1) KR102699398B1 (https=)
CN (1) CN114502912B (https=)
IL (1) IL291884B1 (https=)

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