JP2022538846A - コンデンサ構造体 - Google Patents
コンデンサ構造体 Download PDFInfo
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- JP2022538846A JP2022538846A JP2021576781A JP2021576781A JP2022538846A JP 2022538846 A JP2022538846 A JP 2022538846A JP 2021576781 A JP2021576781 A JP 2021576781A JP 2021576781 A JP2021576781 A JP 2021576781A JP 2022538846 A JP2022538846 A JP 2022538846A
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- 239000003990 capacitor Substances 0.000 title claims description 143
- 239000004020 conductor Substances 0.000 claims abstract description 72
- 239000004065 semiconductor Substances 0.000 claims description 58
- 239000002210 silicon-based material Substances 0.000 claims description 27
- 230000008878 coupling Effects 0.000 claims description 26
- 238000010168 coupling process Methods 0.000 claims description 26
- 238000005859 coupling reaction Methods 0.000 claims description 26
- 238000003860 storage Methods 0.000 claims description 14
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- 238000000034 method Methods 0.000 claims description 10
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 8
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 7
- 229920005591 polysilicon Polymers 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 description 22
- 238000010586 diagram Methods 0.000 description 12
- 102100040862 Dual specificity protein kinase CLK1 Human genes 0.000 description 9
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- 101000749294 Homo sapiens Dual specificity protein kinase CLK1 Proteins 0.000 description 9
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- 238000002955 isolation Methods 0.000 description 9
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- 229910052751 metal Inorganic materials 0.000 description 6
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- 230000006870 function Effects 0.000 description 5
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
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- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
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- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910003855 HfAlO Inorganic materials 0.000 description 1
- 229910004129 HfSiO Inorganic materials 0.000 description 1
- -1 It may comprise Chemical class 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910007875 ZrAlO Inorganic materials 0.000 description 1
- ILCYGSITMBHYNK-UHFFFAOYSA-N [Si]=O.[Hf] Chemical compound [Si]=O.[Hf] ILCYGSITMBHYNK-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- MIQVEZFSDIJTMW-UHFFFAOYSA-N aluminum hafnium(4+) oxygen(2-) Chemical compound [O-2].[Al+3].[Hf+4] MIQVEZFSDIJTMW-UHFFFAOYSA-N 0.000 description 1
- HVXCTUSYKCFNMG-UHFFFAOYSA-N aluminum oxygen(2-) zirconium(4+) Chemical compound [O-2].[Zr+4].[Al+3] HVXCTUSYKCFNMG-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
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- 230000005685 electric field effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
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- H01L29/66181—Conductor-insulator-semiconductor capacitors, e.g. trench capacitors
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Abstract
Description
具体的実施形態が本明細書で例証及び説明されてきたが、同じ目的を達成するために計算された任意の配置が、示された具体的実施形態の代わりになり得ることは当業者によって理解されるであろう。実施形態の多くの適合は、当業者には明らかであろう。したがって、この出願は、実施形態の任意の適合又は変形を包含することを意図している。
Claims (27)
- 第1の導電性型を有する、第1の導電性領域の第1のアイランド及び前記第1の導電性領域の第2のアイランドであって、前記第1の導電性領域は、前記第1の導電性型を有する連続する導電性領域である、前記第1のアイランド及び前記第2のアイランドと、
前記第1の導電性型とは異なる第2の導電性型を有する第2の導電性領域のアイランドと、
前記第1の導電性領域の前記第1のアイランドの上にある誘電体と、
前記誘電体の上にある導体と、
前記第1の導電性領域の前記第2のアイランドの上にあり、前記第2の導電性領域の前記アイランドの上にあるダイオードの端子と
を含むコンデンサ構造体。 - 前記第1の導電性領域は、n型導電性ドープ単結晶シリコンの領域を含み、前記導体は、n型導電性ドープポリシリコンを含む、請求項1に記載のコンデンサ構造体。
- 前記ダイオードの前記端子は、n型導電性ドープシリコン材料を含む、請求項2に記載のコンデンサ構造体。
- 前記n型導電性ドープシリコン材料は、n型導電性ドープ単結晶シリコン及びn型導電性ドープポリシリコンからなるグループから選択される、請求項3に記載のコンデンサ構造体。
- 前記導体は第1の導体であり、前記ダイオードの端子は、前記第1の導体と同時に形成された第2の導体を含む、請求項1に記載のコンデンサ構造体。
- 前記誘電体は第1の誘電体であり、前記第1の誘電体と同時に形成された第2の誘電体は、前記ダイオードの前記端子と前記第1の導電性領域の前記第2のアイランドとの間、及び前記ダイオードの前記端子と前記第2の導電性領域の前記アイランドとの間にある、請求項5に記載のコンデンサ構造体。
- 前記第1の導電性領域は、n型導電性ドープ単結晶シリコンの領域であり、前記導体は、p型導電性ドープポリシリコンである、請求項1に記載のコンデンサ構造体。
- 前記誘電体は、前記第1の導電性領域の前記第1のアイランドの熱酸化物を含む、請求項1に記載のコンデンサ構造体。
- 前記ダイオードは、前記ダイオードの前記端子と前記第1の導電性領域の前記第2のアイランドとの間に形成されたツェナーダイオードと、前記ダイオードの前記端子と前記第2の導電性領域の前記アイランドとの間に形成されたツェナーダイオードとからなるグループから選択されるツェナーダイオードである、請求項1に記載のコンデンサ構造体。
- 前記ツェナーダイオードのツェナー電圧は3~7Vの範囲内にある、請求項9に記載のコンデンサ構造体。
- 前記導体は他の導電性材料から絶縁される、請求項1に記載のコンデンサ構造体。
- 半導体の第1の導電性ドープ領域の第1のアイランド及び前記半導体の前記第1の導電性ドープ領域の第2のアイランドであって、前記半導体の前記第1の導電性ドープ領域は第1の導電性型を有し、前記半導体は、前記第1の導電性型とは異なる第2の導電性型を有する、前記第1のアイランド及び前記第2のアイランドと、
前記第2の導電性型を有する前記半導体の第2の導電性ドープ領域のアイランドと、
前記第1の導電性ドープ領域の前記第1のアイランドの上にある誘電体と、
前記誘電体の上にある導体と、
前記第1の導電性ドープ領域の前記第2のアイランドの上にあり、前記第2の導電性ドープ領域の前記アイランドの上にあるダイオードの端子と
を含み、
前記ダイオードの前記端子は、前記第1の導電性ドープ領域の前記第2のアイランドと前記第2の導電性ドープ領域の前記アイランドとの間の導電性経路の一部分であるように構成される、
コンデンサ構造体。 - 前記半導体はp型半導体を含み、前記半導体の前記第2の導電性ドープ領域は、前記半導体のp型導電性ドープ領域を含み、前記半導体の前記第1の導電性ドープ領域は、前記半導体のn型導電性ドープ領域を含む、請求項12に記載のコンデンサ構造体。
- 前記半導体はp型単結晶シリコンを含み、前記導体は、n型導電性及びp型導電性からなるグループから選択される導電性型を有する導電性ドープポリシリコンを含む、請求項13に記載のコンデンサ構造体。
- 前記ダイオードの前記端子は、単結晶シリコン及びポリシリコンからなるグループから選択される導電性ドープシリコン材料を含み、前記導電性ドープシリコン材料は、n型導電性及びp型導電性からなるグループから選択される導電性型を有する、請求項14に記載のコンデンサ構造体。
- 前記半導体の前記第1の導電性ドープ領域の前記第1のアイランドは、前記コンデンサ構造体のコンデンサの第1の電極を形成し、前記導体は、前記コンデンサ構造体の前記コンデンサの第2の電極を形成する、請求項12に記載のコンデンサ構造体。
- 前記ダイオードの第2の端子は、前記第1の導電性ドープ領域の前記第2のアイランド及び前記第2の導電性ドープ領域の前記アイランドからなるグループから選択される、請求項12に記載のコンデンサ構造体。
- 前記導体は、カップリングコンデンサ、デカップリングコンデンサ、及び蓄積コンデンサからなるグループから選択される特定のコンデンサの第1の電極を形成し、前記半導体の前記第1の導電性ドープ領域の前記第1のアイランドは、前記特定のコンデンサの第2の電極を形成する、請求項12に記載のコンデンサ構造体。
- 前記特定のコンデンサは、3次元NANDメモリアレイのための周辺回路の電圧生成回路のカップリングコンデンサ、前記3次元NANDメモリアレイのための前記周辺回路の前記電圧生成回路の蓄積コンデンサ、及び前記3次元NANDメモリアレイのための前記周辺回路の電力レール間に接続されたデカップリングコンデンサからなるグループから選択される、請求項18に記載のコンデンサ構造体。
- 前記特定のコンデンサは、3次元NANDメモリアレイのための周辺回路の一部分を形成し、前記周辺回路は、前記3次元NANDメモリアレイの下に形成される、請求項18に記載のコンデンサ構造体。
- n型導電性ドープシリコン材料の第1の領域の第1のアイランド、及びn型導電性ドープシリコン材料の前記第1の領域の第2のアイランドであって、n型導電性ドープシリコン材料の前記第1の領域はn型導電性ドープシリコン材料の連続する領域である、前記第1のアイランド及び前記第2のアイランドと、
p型導電性ドープシリコン材料の領域のアイランドと、
n型導電性ドープシリコン材料の前記第1の領域の前記第1のアイランドの上にある誘電体と、
前記誘電体の上にあるn型導電性ドープシリコン材料の第2の領域と、
n型導電性ドープシリコン材料の前記第1の領域の前記第2のアイランドの上にあり、p型導電性ドープシリコン材料の前記領域の前記アイランドの上にある、n型導電性ドープシリコン材料の第3の領域と
を含むコンデンサ構造体。 - 前記誘電体は第1の誘電体であり、前記コンデンサ構造体は、n型導電性ドープシリコン材料の前記第3の領域とn型導電性ドープシリコン材料の前記第1の領域の前記第2のアイランドとの間、及びn型導電性ドープシリコン材料の前記第3の領域とp型導電性ドープシリコン材料の前記領域の前記アイランドとの間に第2の誘電体を更に含む、請求項21に記載のコンデンサ構造体。
- 前記第1の誘電体及び前記第2の誘電体は同時に形成される、請求項22に記載のコンデンサ構造体。
- 前記第1の誘電体及び前記第2の誘電体は熱酸化物を含む、請求項22に記載のコンデンサ構造体。
- n型導電性ドープシリコン材料の前記第3の領域は、n型導電性ドープシリコン材料の前記第1の領域の前記第2のアイランドの上にあって接触し、p型導電性ドープシリコン材料の前記領域の前記アイランド上にあって接触する、請求項21に記載のコンデンサ構造体。
- n型導電性ドープシリコン材料の前記第3の領域は、n型導電性ドープシリコン材料の前記第1の領域の前記第2のアイランドとp型導電性ドープシリコン材料の前記領域の前記アイランドとの間のp型半導体の一部分と更に接触する、請求項25に記載のコンデンサ構造体。
- n型導電性ドープシリコン材料の前記第1の領域は、n型導電性ドープシリコン材料の前記第1の領域の前記第1のアイランドと、n型導電性ドープシリコン材料の前記第1の領域の前記第2のアイランドとの間で連続する、請求項21に記載のコンデンサ構造体。
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