JP2022533584A - 基板処理チャンバの漂遊プラズマ防止装置 - Google Patents
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- 229920001343 polytetrafluoroethylene Polymers 0.000 claims abstract description 9
- 239000004810 polytetrafluoroethylene Substances 0.000 claims abstract description 9
- 229930040373 Paraformaldehyde Natural products 0.000 claims abstract description 8
- 239000004696 Poly ether ether ketone Substances 0.000 claims abstract description 8
- 229920002530 polyetherether ketone Polymers 0.000 claims abstract description 8
- -1 polyoxymethylene Polymers 0.000 claims abstract description 8
- 229920006324 polyoxymethylene Polymers 0.000 claims abstract description 8
- 239000004033 plastic Substances 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 20
- 210000002381 plasma Anatomy 0.000 description 68
- 239000007789 gas Substances 0.000 description 26
- 238000009826 distribution Methods 0.000 description 12
- 238000001636 atomic emission spectroscopy Methods 0.000 description 4
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- 150000002367 halogens Chemical class 0.000 description 3
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- 239000004065 semiconductor Substances 0.000 description 3
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 3
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- 238000005530 etching Methods 0.000 description 2
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- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 description 1
- 229910003910 SiCl4 Inorganic materials 0.000 description 1
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
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- 230000008054 signal transmission Effects 0.000 description 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32513—Sealing means, e.g. sealing between different parts of the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
- H01J37/32495—Means for protecting the vessel against plasma
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
- H01J37/32724—Temperature
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
- H01J37/32119—Windows
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
- H01J37/32449—Gas control, e.g. control of the gas flow
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32467—Material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32522—Temperature
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
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Abstract
Description
Claims (20)
- 基板処理チャンバ内の漂遊プラズマを防止するための装置であって、
誘電体材料から形成された管状本体であって、該管状本体の第1の端部から第2の端部まで内部を通る中央開口部を画定する管状本体と、
前記管状本体の第1の端部から半径方向に延びるフランジと
を備える、装置。 - 前記装置は、処理適合性プラスチック材料から形成されている、請求項1に記載の装置。
- 前記装置は、ポリオキシメチレン(POM)、ポリエーテルエーテルケトン(PEEK)、またはポリテトラフルオロエチレン(PTFE)のうちの少なくとも1つから形成されている、請求項1に記載の装置。
- 前記フランジは、前記管状本体の前記第2の端部と反対側の前記フランジの側部上に傾斜した外側半径を有する、請求項1に記載の装置。
- 前記装置が、前記管状本体および前記フランジからなる、請求項1から4のいずれか一項に記載の装置。
- 前記中央開口部が、約0.2~約0.4インチの直径を有する、請求項1から4のいずれか一項に記載の装置。
- 前記フランジが、少なくとも約1インチの外径または約0.1~約0.15インチの厚さのうちの少なくとも1つを有する、請求項1から4のいずれか一項に記載の装置。
- 前記装置が前記管状本体と前記フランジとからなり、前記中央開口部が約0.2~約0.4インチの直径を有し、前記フランジが少なくとも約1インチの外径と約0.1~約0.15インチの厚さを有する、請求項1から4のいずれか一項に記載の装置。
- チャンバ壁の内部空間対向側面上にその中に形成された凹部を有する、前記チャンバ壁と、
前記凹部内に部分的に配置される漂遊プラズマを防止するための装置とを備える、基板を処理するための装置であって、漂遊プラズマを防止するための前記装置は、
誘電体材料から形成された管状本体であって、前記管状本体の第1の端部から第2の端部まで内部を通る中央開口部を画定する管状本体と、
前記管状本体の前記第1の端部から半径方向に延びるフランジであって、前記管状本体は前記凹部内に延び、前記フランジは前記凹部の周囲の前記チャンバ壁に沿って延びる、管状本体と
を備える、基板を処理するための装置。 - 前記チャンバ壁に隣接して配置されたライナをさらに含み、漂遊プラズマを防止するための前記装置が前記チャンバ壁と前記ライナとの間に配置される、請求項9に記載の装置。
- 漂遊プラズマを防止するための前記装置の前記フランジと前記ライナとの対向面の間に画定された間隙をさらに含み、前記間隙を横切って測定される距離は、約0.5~約1.5mmである、請求項10に記載の装置。
- 前記チャンバ壁を貫通して形成された窓をさらに含み、前記凹部が前記窓の一部である、請求項9から11のいずれか一項に記載の装置。
- 前記窓は、前記チャンバ壁を通して配置された開口部と、前記開口部を部分的に満たすプラグとから形成され、前記管状本体は、前記管状本体の前記第2の端部が前記プラグの端面に近接して終端するように、前記開口部内に延びる、請求項12に記載の装置。
- 前記プラグが、主として前記開口部を通って延び、前記チャンバ壁の内部空間対向面に近接するが、到達せずに終端となる、請求項13に記載の装置。
- 前記プラグが、前記チャンバ壁の外面に近接する前記開口部の第1の端部にのみ近接して配置される、請求項13に記載の装置。
- 前記窓は、前記チャンバ壁を貫通して配置された開口部と、前記開口部を部分的に満たすプラグとから形成され、前記管状本体は、前記管状本体の前記第2の端部が前記プラグの端面に重なるように、前記開口部内に延びる、請求項12に記載の装置。
- 前記プラグの第1の端部は、前記管状本体が前記プラグの第1の部分に沿って前記プラグに重なるように、前記第1の端部に近接する前記第1の部分内に、より小さな半径を画定する肩部を含む、請求項16に記載の装置。
- プラズマ処理チャンバ内の漂遊プラズマを低減または防止する方法であって、
チャンバ壁と前記プラズマ処理チャンバのライナとの間に誘電体材料を含む漂遊プラズマ防止装置を配置して、前記漂遊プラズマ防止装置と前記ライナとの対向面の間に、前記チャンバ壁と前記ライナとの間の距離よりも小さい間隙を画定すること、を含む方法。 - 前記チャンバ壁は、前記チャンバ壁の内部空間対向側面上にその中に形成された凹部を含み、前記方法は、前記漂遊プラズマ防止装置を前記凹部内に部分的に配置することをさらに含む、請求項18に記載の方法。
- 前記漂遊プラズマ防止装置と前記ライナとの対向面の間の前記間隙を横切って測定される距離は、約0.5~約1.5mmである、請求項19に記載の方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201962848537P | 2019-05-15 | 2019-05-15 | |
US62/848,537 | 2019-05-15 | ||
US15/931,304 | 2020-05-13 | ||
US15/931,304 US20200365375A1 (en) | 2019-05-15 | 2020-05-13 | Stray plasma prevention apparatus for substrate process chamber |
PCT/US2020/032813 WO2020232205A1 (en) | 2019-05-15 | 2020-05-14 | Stray plasma prevention apparatus for substrate process chamber |
Publications (2)
Publication Number | Publication Date |
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JP2022533584A true JP2022533584A (ja) | 2022-07-25 |
JP7357696B2 JP7357696B2 (ja) | 2023-10-06 |
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JP2021567792A Active JP7357696B2 (ja) | 2019-05-15 | 2020-05-14 | 基板処理チャンバの漂遊プラズマ防止装置 |
Country Status (6)
Country | Link |
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US (1) | US20200365375A1 (ja) |
JP (1) | JP7357696B2 (ja) |
KR (1) | KR20210154275A (ja) |
CN (1) | CN113811979A (ja) |
TW (1) | TW202109609A (ja) |
WO (1) | WO2020232205A1 (ja) |
Citations (4)
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JPS6329520A (ja) * | 1986-07-23 | 1988-02-08 | Hitachi Ltd | プラズマ処理装置 |
JP2002050616A (ja) * | 2000-08-04 | 2002-02-15 | Matsushita Electric Ind Co Ltd | プラズマ処理方法及び装置 |
KR101306689B1 (ko) * | 2012-04-27 | 2013-09-10 | 전세훈 | 플라즈마 에칭 장비의 프로세스 챔버를 위한 아크 방지 장치 |
JP2016535410A (ja) * | 2013-08-16 | 2016-11-10 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 高温低圧環境用の細長い容量結合プラズマ源 |
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TW323387B (ja) * | 1995-06-07 | 1997-12-21 | Tokyo Electron Co Ltd | |
US5851343A (en) * | 1997-05-16 | 1998-12-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Protective shield around the inner edge of endpoint window in a plasma etching chamber |
US6798519B2 (en) * | 2002-09-30 | 2004-09-28 | Tokyo Electron Limited | Method and apparatus for an improved optical window deposition shield in a plasma processing system |
JP2004296553A (ja) * | 2003-03-25 | 2004-10-21 | Ngk Insulators Ltd | 半導体製造装置用部材 |
US7241397B2 (en) * | 2004-03-30 | 2007-07-10 | Tokyo Electron Limited | Honeycomb optical window deposition shield and method for a plasma processing system |
US20060165873A1 (en) * | 2005-01-25 | 2006-07-27 | Micron Technology, Inc. | Plasma detection and associated systems and methods for controlling microfeature workpiece deposition processes |
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KR101897315B1 (ko) * | 2011-12-12 | 2018-09-11 | 캐논 아네르바 가부시키가이샤 | 스퍼터링 장치 및 실드 |
US20130240142A1 (en) * | 2012-03-15 | 2013-09-19 | Globalfoundries Singapore Pte. Ltd. | Isolation between a baffle plate and a focus adapter |
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KR102537309B1 (ko) * | 2015-10-08 | 2023-05-25 | 어플라이드 머티어리얼스, 인코포레이티드 | 감소된 배면 플라즈마 점화를 갖는 샤워헤드 |
TWI677009B (zh) * | 2016-01-24 | 2019-11-11 | 美商應用材料股份有限公司 | 雙端饋電可調諧電漿源 |
-
2020
- 2020-05-13 US US15/931,304 patent/US20200365375A1/en not_active Abandoned
- 2020-05-14 CN CN202080034956.7A patent/CN113811979A/zh active Pending
- 2020-05-14 WO PCT/US2020/032813 patent/WO2020232205A1/en active Application Filing
- 2020-05-14 JP JP2021567792A patent/JP7357696B2/ja active Active
- 2020-05-14 TW TW109116018A patent/TW202109609A/zh unknown
- 2020-05-14 KR KR1020217040758A patent/KR20210154275A/ko not_active Application Discontinuation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6329520A (ja) * | 1986-07-23 | 1988-02-08 | Hitachi Ltd | プラズマ処理装置 |
JP2002050616A (ja) * | 2000-08-04 | 2002-02-15 | Matsushita Electric Ind Co Ltd | プラズマ処理方法及び装置 |
KR101306689B1 (ko) * | 2012-04-27 | 2013-09-10 | 전세훈 | 플라즈마 에칭 장비의 프로세스 챔버를 위한 아크 방지 장치 |
JP2016535410A (ja) * | 2013-08-16 | 2016-11-10 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 高温低圧環境用の細長い容量結合プラズマ源 |
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US20200365375A1 (en) | 2020-11-19 |
WO2020232205A1 (en) | 2020-11-19 |
TW202109609A (zh) | 2021-03-01 |
JP7357696B2 (ja) | 2023-10-06 |
KR20210154275A (ko) | 2021-12-20 |
CN113811979A (zh) | 2021-12-17 |
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