JP2022530673A - 電力増幅器内の熱管理用の水冷プレート - Google Patents
電力増幅器内の熱管理用の水冷プレート Download PDFInfo
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- JP2022530673A JP2022530673A JP2021564873A JP2021564873A JP2022530673A JP 2022530673 A JP2022530673 A JP 2022530673A JP 2021564873 A JP2021564873 A JP 2021564873A JP 2021564873 A JP2021564873 A JP 2021564873A JP 2022530673 A JP2022530673 A JP 2022530673A
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- Prior art keywords
- cooling plate
- side wall
- segment
- junction
- coolant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000001816 cooling Methods 0.000 title claims abstract description 48
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims description 5
- 238000004377 microelectronic Methods 0.000 claims abstract description 14
- 238000000034 method Methods 0.000 claims abstract description 13
- 239000007787 solid Substances 0.000 claims abstract description 5
- 239000002826 coolant Substances 0.000 claims description 28
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 9
- 238000005553 drilling Methods 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000008367 deionised water Substances 0.000 claims description 2
- 229910021641 deionized water Inorganic materials 0.000 claims description 2
- 230000005669 field effect Effects 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 abstract 1
- 230000003321 amplification Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
- H03F3/20—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers
- H03F3/21—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
- F28F3/12—Elements constructed in the shape of a hollow panel, e.g. with channels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F1/00—Details of amplifiers with only discharge tubes, only semiconductor devices or only unspecified devices as amplifying elements
- H03F1/30—Modifications of amplifiers to reduce influence of variations of temperature or supply voltage or other physical parameters
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/2089—Modifications to facilitate cooling, ventilating, or heating for power electronics, e.g. for inverters for controlling motor
- H05K7/20927—Liquid coolant without phase change
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F2210/00—Heat exchange conduits
- F28F2210/10—Particular layout, e.g. for uniform temperature distribution
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F2200/00—Indexing scheme relating to amplifiers
- H03F2200/447—Indexing scheme relating to amplifiers the amplifier being protected to temperature influence
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Thermal Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Abstract
Description
Claims (15)
- 固体電力増幅器の冷却プレートであって、
第2の側壁の反対側の第1の側壁及び第4の側壁の反対側の第3の側壁を有する、矩形状の本体、
複数の熱を生成する超小型電子部品を取り付けるように構成された、前記本体の第1の側面に配置された複数の孔、並びに
前記本体内に配置され、前記第1の側壁に配置された第1のポートから前記第1の側壁に配置された第2のポートまで延在する、複数のセグメントを有するチャネルを含む、冷却プレート。 - 前記第1のポートは出口に一致し、前記第2のポートは入口に一致する、請求項1に記載の冷却プレート。
- 前記チャネルは、約4.0mmから約15.0mmの直径を有する、請求項1に記載の冷却プレート。
- 前記第1の側壁と前記第2の側壁との間の距離が、約300.0mmから約700.0mmである、請求項1に記載の冷却プレート。
- 前記複数のセグメントは、取り付け領域内で互いに対して平行に延在し、互いに対して平行に延在する隣接したセグメントは、反対方向に冷却剤を流すように構成されている、請求項1に記載の冷却プレート。
- 前記本体は、アルミニウム(Al)、銅(Cu)、又は銀(Ag)を含む、請求項1に記載の冷却プレート。
- 前記複数のセグメントは、前記第1のポートから前記第2の側壁に向けて第1の接合部へ前記第3の側壁に近接するように沿って延在する第1のセグメント、前記第1の接合部から前記第4の側壁に向けて第2の接合部へ延在する第2のセグメント、及び前記第2の接合部から前記第2のポートに向けて延在する第3のセグメントを含む、請求項1から6のいずれか一項に記載の冷却プレート。
- 前記第3のセグメントは、前記第2の接合部から前記第2のポートに向けて第3の接合部へ延在し、前記複数のセグメントは、前記第3の接合部から前記第3の側壁に向けて第4の接合部へ延在する第4のセグメント、前記第4の接合部から前記第1の側壁に向けて第5の接合部へ延在する第5のセグメント、前記第5の接合部から前記第4の側壁に向けて第6の接合部へ延在する第6のセグメント、及び前記第6の接合部から前記第2のポートに延在する第7のセグメントを更に含む、請求項7に記載の冷却プレート。
- 前記第2のセグメント、前記第4のセグメント、及び前記第6のセグメントは、互いに対して実質的に平行である、請求項8に記載の冷却プレート。
- 請求項1に記載の冷却プレートを備える固体電力増幅器であって、前記複数の熱を生成する超小型電子部品が、前記冷却プレートに取り付けられ、前記熱を生成する超小型電子部品のうちの少なくとも幾つかが、電界効果トランジスタを含む、固体電力増幅器。
- 固体電力増幅器を冷却する方法であって、
冷却プレート内に入口から出口まで延在するチャネルを生成するために、前記冷却プレートの側壁に穿孔することを含み、前記冷却プレートは、複数の熱を生成する超小型電子部品を取り付けるように構成された第1の側面を有し、前記チャネルは、冷却液を循環させるように構成され、
前記方法は更に、冷却剤源から前記チャネルを通して冷却液を流すことを含む、方法。 - 前記冷却液を流すことは、水、脱イオン水、又はエチレングリコール(CH2OH)2のうちの少なくとも1つを流すことを含む、請求項11に記載の方法。
- 前記冷却液は、摂氏約5.0度から摂氏約25.0度の温度を有する、請求項11に記載の方法。
- 前記冷却液を流すことは、分当たり約3.0リットルから約12.0リットルの流量で、前記冷却液を循環させることを含む、請求項11に記載の方法。
- 前記入口又は前記出口に一致しない前記冷却プレートの側壁の開口部において、前記チャネルをプラグで塞ぐことを更に含む、請求項11から14のいずれか一項に記載の方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201962843299P | 2019-05-03 | 2019-05-03 | |
US62/843,299 | 2019-05-03 | ||
US16/460,979 | 2019-07-02 | ||
US16/460,979 US11699634B2 (en) | 2019-05-03 | 2019-07-02 | Water cooled plate for heat management in power amplifiers |
PCT/US2020/030103 WO2020226929A1 (en) | 2019-05-03 | 2020-04-27 | Water cooled plate for heat management in power amplifiers |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022530673A true JP2022530673A (ja) | 2022-06-30 |
JP7376613B2 JP7376613B2 (ja) | 2023-11-08 |
Family
ID=73016734
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021564873A Active JP7376613B2 (ja) | 2019-05-03 | 2020-04-27 | 電力増幅器内の熱管理用の水冷プレート |
Country Status (6)
Country | Link |
---|---|
US (1) | US11699634B2 (ja) |
JP (1) | JP7376613B2 (ja) |
KR (1) | KR20210148441A (ja) |
CN (1) | CN113728426A (ja) |
TW (1) | TW202106152A (ja) |
WO (1) | WO2020226929A1 (ja) |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56161396U (ja) * | 1980-05-02 | 1981-12-01 | ||
JPS6426894U (ja) * | 1987-08-11 | 1989-02-15 | ||
JP2001127478A (ja) * | 1999-08-30 | 2001-05-11 | Electric Boat Corp | 熱伝導冷却板装置 |
JP2003130517A (ja) * | 2001-07-17 | 2003-05-08 | Hitachi Kokusai Electric Inc | 電子装置用冷却装置及び冷却装置付電子装置 |
JP2007031838A (ja) * | 2005-07-27 | 2007-02-08 | Applied Materials Inc | 制御可能なターゲットの冷却 |
EP3336471A1 (en) * | 2016-12-14 | 2018-06-20 | ICOFLEX Sarl | Electronics substrates with associated liquid-vapour phase change heat spreaders |
US20180337109A1 (en) * | 2017-05-17 | 2018-11-22 | General Electric Company | Integrated power semiconductor packaging apparatus and power converter |
WO2018235726A1 (ja) * | 2017-06-19 | 2018-12-27 | 日本電気株式会社 | 冷却構造体、冷却構造体の製造方法、電力増幅器、および、送信機 |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4268850A (en) * | 1979-05-11 | 1981-05-19 | Electric Power Research Institute | Forced vaporization heat sink for semiconductor devices |
US5703536A (en) | 1996-04-08 | 1997-12-30 | Harris Corporation | Liquid cooling system for high power solid state AM transmitter |
US5999404A (en) * | 1998-10-14 | 1999-12-07 | Sun Microsystems, Inc. | Spray cooled module with removable spray cooled sub-module |
US6388317B1 (en) | 2000-09-25 | 2002-05-14 | Lockheed Martin Corporation | Solid-state chip cooling by use of microchannel coolant flow |
SG119140A1 (en) * | 2001-07-04 | 2006-02-28 | Disco Corp | Grinding wheel |
US6711017B2 (en) * | 2001-07-17 | 2004-03-23 | Hitachi Kokusai Electric Inc. | Cooling apparatus for electronic unit |
JP4929612B2 (ja) * | 2005-04-12 | 2012-05-09 | ソニー株式会社 | 半導体レーザ装置及びヒートシンク |
US8149579B2 (en) * | 2008-03-28 | 2012-04-03 | Johnson Controls Technology Company | Cooling member |
JP5028147B2 (ja) * | 2007-05-29 | 2012-09-19 | 株式会社アライドマテリアル | 半導体装置用ヒートスプレッダとその製造方法 |
US9453691B2 (en) * | 2007-08-09 | 2016-09-27 | Coolit Systems, Inc. | Fluid heat exchange systems |
US20100078155A1 (en) * | 2008-09-30 | 2010-04-01 | Third Millennium Engineering | Thin Cavity Fluidic Heat Exchanger |
US8369090B2 (en) * | 2009-05-12 | 2013-02-05 | Iceotope Limited | Cooled electronic system |
US8169780B2 (en) * | 2009-06-18 | 2012-05-01 | Honda Motor Co., Ltd. | Power conversion device |
US20120138281A1 (en) * | 2010-12-06 | 2012-06-07 | Transistor Devices, Inc. D/B/A Tdi Power | Heat Exchanger for Electronic Assemblies |
CN103492106B (zh) * | 2011-02-14 | 2015-08-05 | 新东工业株式会社 | 模具用型材、模具用透气性构件、以及模具用型材和模具用透气性构件的制造方法 |
JP5817552B2 (ja) | 2012-01-23 | 2015-11-18 | 日本電気株式会社 | 電子装置 |
US8811015B2 (en) * | 2012-02-16 | 2014-08-19 | Mission Motor Company | Motor control device |
JP2015099031A (ja) * | 2013-11-18 | 2015-05-28 | 株式会社東芝 | 半導体マイクロ分析チップ及びその製造方法 |
JP6123741B2 (ja) * | 2014-06-20 | 2017-05-10 | トヨタ自動車株式会社 | 冷却器 |
US9492567B1 (en) | 2014-10-17 | 2016-11-15 | Daico Industries, Inc. | Combined RF/microwave amplifiers with individual power supplies |
US9445526B2 (en) * | 2014-12-22 | 2016-09-13 | Toyota Motor Engineering & Manufacturing North America, Inc. | Modular jet impingement assemblies with passive and active flow control for electronics cooling |
CN204335279U (zh) * | 2015-01-28 | 2015-05-13 | 讯凯国际股份有限公司 | 液体冷却式散热结构 |
JP6409630B2 (ja) * | 2015-03-12 | 2018-10-24 | 住友電気工業株式会社 | 光トランシーバ |
FR3057341B1 (fr) * | 2016-10-10 | 2019-05-24 | Bull Sas | Module compact de refroidissement liquide de serveur informatique |
US20190077275A1 (en) * | 2017-09-12 | 2019-03-14 | Sf Motors, Inc. | Dynamic cooling control for battery systems |
-
2019
- 2019-07-02 US US16/460,979 patent/US11699634B2/en active Active
-
2020
- 2020-04-27 JP JP2021564873A patent/JP7376613B2/ja active Active
- 2020-04-27 CN CN202080030612.9A patent/CN113728426A/zh active Pending
- 2020-04-27 WO PCT/US2020/030103 patent/WO2020226929A1/en active Application Filing
- 2020-04-27 KR KR1020217039444A patent/KR20210148441A/ko not_active Application Discontinuation
- 2020-04-29 TW TW109114281A patent/TW202106152A/zh unknown
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56161396U (ja) * | 1980-05-02 | 1981-12-01 | ||
JPS6426894U (ja) * | 1987-08-11 | 1989-02-15 | ||
JP2001127478A (ja) * | 1999-08-30 | 2001-05-11 | Electric Boat Corp | 熱伝導冷却板装置 |
JP2003130517A (ja) * | 2001-07-17 | 2003-05-08 | Hitachi Kokusai Electric Inc | 電子装置用冷却装置及び冷却装置付電子装置 |
JP2007031838A (ja) * | 2005-07-27 | 2007-02-08 | Applied Materials Inc | 制御可能なターゲットの冷却 |
EP3336471A1 (en) * | 2016-12-14 | 2018-06-20 | ICOFLEX Sarl | Electronics substrates with associated liquid-vapour phase change heat spreaders |
US20180337109A1 (en) * | 2017-05-17 | 2018-11-22 | General Electric Company | Integrated power semiconductor packaging apparatus and power converter |
WO2018235726A1 (ja) * | 2017-06-19 | 2018-12-27 | 日本電気株式会社 | 冷却構造体、冷却構造体の製造方法、電力増幅器、および、送信機 |
Also Published As
Publication number | Publication date |
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US20200350230A1 (en) | 2020-11-05 |
WO2020226929A1 (en) | 2020-11-12 |
JP7376613B2 (ja) | 2023-11-08 |
KR20210148441A (ko) | 2021-12-07 |
CN113728426A (zh) | 2021-11-30 |
US11699634B2 (en) | 2023-07-11 |
TW202106152A (zh) | 2021-02-01 |
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