JP2022529608A - 測定システム及び光の回折方法 - Google Patents
測定システム及び光の回折方法 Download PDFInfo
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- JP2022529608A JP2022529608A JP2021560248A JP2021560248A JP2022529608A JP 2022529608 A JP2022529608 A JP 2022529608A JP 2021560248 A JP2021560248 A JP 2021560248A JP 2021560248 A JP2021560248 A JP 2021560248A JP 2022529608 A JP2022529608 A JP 2022529608A
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- JP
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- arm
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- optical
- focusing lens
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 title claims abstract description 44
- 238000002050 diffraction method Methods 0.000 title abstract description 4
- 230000003287 optical effect Effects 0.000 claims abstract description 96
- 239000000758 substrate Substances 0.000 claims abstract description 52
- 238000000034 method Methods 0.000 claims abstract description 24
- 238000006073 displacement reaction Methods 0.000 claims abstract description 12
- 238000012360 testing method Methods 0.000 claims abstract description 6
- 238000010586 diagram Methods 0.000 abstract description 15
- 239000002245 particle Substances 0.000 description 4
- 230000003190 augmentative effect Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02041—Interferometers characterised by particular imaging or detection techniques
- G01B9/02048—Rough and fine measurement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0237—Adjustable, e.g. focussing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/286—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/56—Measuring geometric parameters of semiconductor structures, e.g. profile, critical dimensions or trench depth
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9511—Optical elements other than lenses, e.g. mirrors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Geometry (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201962834219P | 2019-04-15 | 2019-04-15 | |
US62/834,219 | 2019-04-15 | ||
US16/539,930 | 2019-08-13 | ||
US16/539,930 US10801890B1 (en) | 2018-12-17 | 2019-08-13 | Measurement system and a method of diffracting light |
PCT/US2020/026829 WO2020214444A1 (en) | 2019-04-15 | 2020-04-06 | Measurement system and a method of diffracting light |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2022529608A true JP2022529608A (ja) | 2022-06-23 |
Family
ID=72838385
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021560248A Pending JP2022529608A (ja) | 2019-04-15 | 2020-04-06 | 測定システム及び光の回折方法 |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP3956629A4 (zh) |
JP (1) | JP2022529608A (zh) |
KR (1) | KR20210140774A (zh) |
CN (2) | CN117387912A (zh) |
TW (1) | TW202045893A (zh) |
WO (1) | WO2020214444A1 (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20210072123A (ko) * | 2018-11-07 | 2021-06-16 | 어플라이드 머티어리얼스, 인코포레이티드 | 도파관 계측을 위한 방법들 및 장치 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6487019B2 (en) * | 2000-03-27 | 2002-11-26 | Chromaplex, Inc. | Optical diffraction grating structure with reduced polarization sensitivity |
US6577786B1 (en) * | 2000-06-02 | 2003-06-10 | Digital Lightwave, Inc. | Device and method for optical performance monitoring in an optical communications network |
WO2002014846A2 (en) * | 2000-08-10 | 2002-02-21 | Kla-Tencor Corporation | Multiple beam inspection apparatus and method |
US6809809B2 (en) * | 2000-11-15 | 2004-10-26 | Real Time Metrology, Inc. | Optical method and apparatus for inspecting large area planar objects |
JP2003035521A (ja) * | 2001-07-23 | 2003-02-07 | Mitsutoyo Corp | 格子周期計測装置及び格子周期計測方法 |
EP1347271B1 (en) * | 2002-03-18 | 2012-01-11 | Mitutoyo Corporation | Optical displacement sensing device with reduced sensitivity to misalignment |
US20040263959A1 (en) * | 2003-06-30 | 2004-12-30 | Dixon Arthur E. | Scanning beam optical imaging system for macroscopic imaging of an object |
US9068917B1 (en) * | 2006-03-14 | 2015-06-30 | Kla-Tencor Technologies Corp. | Systems and methods for inspection of a specimen |
JP5032396B2 (ja) * | 2008-05-20 | 2012-09-26 | 信越化学工業株式会社 | 薄膜欠陥検査用標準基板、その製造方法、および薄膜欠陥検査方法 |
JP2012137350A (ja) * | 2010-12-27 | 2012-07-19 | Hitachi High-Technologies Corp | 欠陥検査方法および欠陥検査装置 |
US8629407B2 (en) * | 2011-04-13 | 2014-01-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Contamination inspection |
CN103940796A (zh) * | 2014-04-22 | 2014-07-23 | 浙江大学 | 新型多角度多模式快速切换环状光学照明显微成像系统 |
CN104280215B (zh) * | 2014-10-11 | 2017-02-15 | 哈尔滨工程大学 | 一种y波导的双通道光学性能双向多对轴角度自动测试装置 |
FR3029633A1 (fr) * | 2014-12-09 | 2016-06-10 | Bioaxial | Procede et dispositif de mesure optique |
US9612212B1 (en) * | 2015-11-30 | 2017-04-04 | Samsung Electronics Co., Ltd. | Ellipsometer and method of inspecting pattern asymmetry using the same |
JP6732543B2 (ja) * | 2016-06-02 | 2020-07-29 | Dmg森精機株式会社 | 変位検出装置 |
CN109186945A (zh) * | 2018-09-12 | 2019-01-11 | 武汉理工大学 | 大口径光栅衍射效率光谱及其均匀性的测量装置和方法 |
-
2020
- 2020-04-06 EP EP20791522.4A patent/EP3956629A4/en active Pending
- 2020-04-06 KR KR1020217036259A patent/KR20210140774A/ko unknown
- 2020-04-06 CN CN202311318201.1A patent/CN117387912A/zh active Pending
- 2020-04-06 JP JP2021560248A patent/JP2022529608A/ja active Pending
- 2020-04-06 CN CN202080027552.5A patent/CN113677952A/zh active Pending
- 2020-04-06 WO PCT/US2020/026829 patent/WO2020214444A1/en unknown
- 2020-04-14 TW TW109112439A patent/TW202045893A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
EP3956629A1 (en) | 2022-02-23 |
CN113677952A (zh) | 2021-11-19 |
TW202045893A (zh) | 2020-12-16 |
WO2020214444A1 (en) | 2020-10-22 |
KR20210140774A (ko) | 2021-11-23 |
EP3956629A4 (en) | 2023-01-04 |
CN117387912A (zh) | 2024-01-12 |
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